JPS6149451U - - Google Patents
Info
- Publication number
- JPS6149451U JPS6149451U JP13451884U JP13451884U JPS6149451U JP S6149451 U JPS6149451 U JP S6149451U JP 13451884 U JP13451884 U JP 13451884U JP 13451884 U JP13451884 U JP 13451884U JP S6149451 U JPS6149451 U JP S6149451U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- spacer
- reinforcing material
- wafer
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 14
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 239000012779 reinforcing material Substances 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13451884U JPS6149451U (enrdf_load_stackoverflow) | 1984-09-06 | 1984-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13451884U JPS6149451U (enrdf_load_stackoverflow) | 1984-09-06 | 1984-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6149451U true JPS6149451U (enrdf_load_stackoverflow) | 1986-04-03 |
Family
ID=30693028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13451884U Pending JPS6149451U (enrdf_load_stackoverflow) | 1984-09-06 | 1984-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6149451U (enrdf_load_stackoverflow) |
-
1984
- 1984-09-06 JP JP13451884U patent/JPS6149451U/ja active Pending
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