JPS6149451U - - Google Patents

Info

Publication number
JPS6149451U
JPS6149451U JP13451884U JP13451884U JPS6149451U JP S6149451 U JPS6149451 U JP S6149451U JP 13451884 U JP13451884 U JP 13451884U JP 13451884 U JP13451884 U JP 13451884U JP S6149451 U JPS6149451 U JP S6149451U
Authority
JP
Japan
Prior art keywords
heat treatment
spacer
reinforcing material
wafer
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13451884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13451884U priority Critical patent/JPS6149451U/ja
Publication of JPS6149451U publication Critical patent/JPS6149451U/ja
Pending legal-status Critical Current

Links

JP13451884U 1984-09-06 1984-09-06 Pending JPS6149451U (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13451884U JPS6149451U (Direct) 1984-09-06 1984-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13451884U JPS6149451U (Direct) 1984-09-06 1984-09-06

Publications (1)

Publication Number Publication Date
JPS6149451U true JPS6149451U (Direct) 1986-04-03

Family

ID=30693028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13451884U Pending JPS6149451U (Direct) 1984-09-06 1984-09-06

Country Status (1)

Country Link
JP (1) JPS6149451U (Direct)

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