JPS6149447U - - Google Patents
Info
- Publication number
- JPS6149447U JPS6149447U JP13369184U JP13369184U JPS6149447U JP S6149447 U JPS6149447 U JP S6149447U JP 13369184 U JP13369184 U JP 13369184U JP 13369184 U JP13369184 U JP 13369184U JP S6149447 U JPS6149447 U JP S6149447U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- view
- protrusions
- manufacturing process
- identification code
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13369184U JPS6149447U (lv) | 1984-09-03 | 1984-09-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13369184U JPS6149447U (lv) | 1984-09-03 | 1984-09-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6149447U true JPS6149447U (lv) | 1986-04-03 |
Family
ID=30692229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13369184U Pending JPS6149447U (lv) | 1984-09-03 | 1984-09-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6149447U (lv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63153517U (lv) * | 1987-03-28 | 1988-10-07 | ||
JP2011018908A (ja) | 2010-07-15 | 2011-01-27 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |
-
1984
- 1984-09-03 JP JP13369184U patent/JPS6149447U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63153517U (lv) * | 1987-03-28 | 1988-10-07 | ||
JP2011018908A (ja) | 2010-07-15 | 2011-01-27 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |