JPS6146805B2 - - Google Patents

Info

Publication number
JPS6146805B2
JPS6146805B2 JP53012144A JP1214478A JPS6146805B2 JP S6146805 B2 JPS6146805 B2 JP S6146805B2 JP 53012144 A JP53012144 A JP 53012144A JP 1214478 A JP1214478 A JP 1214478A JP S6146805 B2 JPS6146805 B2 JP S6146805B2
Authority
JP
Japan
Prior art keywords
output
photoelectric
array
vector
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53012144A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54104859A (en
Inventor
Takeshi Utagawa
Hiroshi Shirasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP1214478A priority Critical patent/JPS54104859A/ja
Priority to US05/972,261 priority patent/US4264810A/en
Priority to DE19782856233 priority patent/DE2856233A1/de
Publication of JPS54104859A publication Critical patent/JPS54104859A/ja
Publication of JPS6146805B2 publication Critical patent/JPS6146805B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Focusing (AREA)
JP1214478A 1977-12-24 1978-02-06 Automatic focus detector Granted JPS54104859A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1214478A JPS54104859A (en) 1978-02-06 1978-02-06 Automatic focus detector
US05/972,261 US4264810A (en) 1977-12-24 1978-12-22 Focus detecting apparatus
DE19782856233 DE2856233A1 (de) 1977-12-24 1978-12-27 Vorrichtung zum feststellen der scharfeinstellung bei einem optischen system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1214478A JPS54104859A (en) 1978-02-06 1978-02-06 Automatic focus detector

Publications (2)

Publication Number Publication Date
JPS54104859A JPS54104859A (en) 1979-08-17
JPS6146805B2 true JPS6146805B2 (enrdf_load_stackoverflow) 1986-10-16

Family

ID=11797296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1214478A Granted JPS54104859A (en) 1977-12-24 1978-02-06 Automatic focus detector

Country Status (1)

Country Link
JP (1) JPS54104859A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57165821A (en) * 1981-04-07 1982-10-13 Nippon Kogaku Kk <Nikon> Ttl automatic focusing device of camera
JPS6119211U (ja) * 1984-07-06 1986-02-04 株式会社 コシナ オ−トフオ−カス付ズ−ムレンズ
JP3345890B2 (ja) * 1990-08-06 2002-11-18 株式会社ニコン システムカメラおよびリアコンバージョンレンズ鏡筒
WO2016102127A1 (en) * 2014-12-22 2016-06-30 Asml Netherlands B.V. Level sensor, lithographic apparatus and device manufacturing method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928884B2 (ja) * 1972-12-27 1984-07-17 キヤノン株式会社 距離検出方式

Also Published As

Publication number Publication date
JPS54104859A (en) 1979-08-17

Similar Documents

Publication Publication Date Title
US4264810A (en) Focus detecting apparatus
EP0466277B1 (en) Passive ranging and rapid autofocusing
US3896304A (en) Automatic focus adjustment means
JPH04115108A (ja) 三次元スキャナ
US4562346A (en) Apparatus and method for detecting focus condition of imaging optical system employing both sharpness detection and lateral shift detection
EP2902796A2 (en) Two axis interferometric tracking device and method
JPS6146805B2 (enrdf_load_stackoverflow)
CN112629662A (zh) 一种可重构分时偏振分析系统及探测方法
CN114235151B (zh) 一种基于非傍轴坐标变换的涡旋光模式检测方法及系统
US4739157A (en) Method of detecting the correlation between signals with weighting
JPH0328689B2 (enrdf_load_stackoverflow)
JPS6356522B2 (enrdf_load_stackoverflow)
JPS6239722B2 (enrdf_load_stackoverflow)
JPS6214761B2 (enrdf_load_stackoverflow)
US4339665A (en) Apparatus for detecting displacement of optical image
US4608490A (en) Focus detection method utilizing surface acoustic wave
RU2086918C1 (ru) Телевизионно-корреляционный дальномер
RU2029976C1 (ru) Способ визуализации микроконтрастных объектов и оптический поляризационный наноскоп для его осуществления
JPS63140934A (ja) シエアリング干渉縞解析方法
JPH08327891A (ja) パターン光投光装置
JPS6236207B2 (enrdf_load_stackoverflow)
JPH06323810A (ja) マルチプローブ変位測定装置
JP3291996B2 (ja) 測距装置
JPS5936204A (ja) 画像の結像状態検知装置
JPS6237364B2 (enrdf_load_stackoverflow)