JPS6145378B2 - - Google Patents

Info

Publication number
JPS6145378B2
JPS6145378B2 JP52158751A JP15875177A JPS6145378B2 JP S6145378 B2 JPS6145378 B2 JP S6145378B2 JP 52158751 A JP52158751 A JP 52158751A JP 15875177 A JP15875177 A JP 15875177A JP S6145378 B2 JPS6145378 B2 JP S6145378B2
Authority
JP
Japan
Prior art keywords
etching
ion milling
neutralizer
light
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52158751A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5490033A (en
Inventor
Akira Hirano
Naotake Orihara
Shunsuke Matsuyama
Niwaji Majima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15875177A priority Critical patent/JPS5490033A/ja
Publication of JPS5490033A publication Critical patent/JPS5490033A/ja
Publication of JPS6145378B2 publication Critical patent/JPS6145378B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15875177A 1977-12-28 1977-12-28 Ion milling etching sensor Granted JPS5490033A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15875177A JPS5490033A (en) 1977-12-28 1977-12-28 Ion milling etching sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15875177A JPS5490033A (en) 1977-12-28 1977-12-28 Ion milling etching sensor

Publications (2)

Publication Number Publication Date
JPS5490033A JPS5490033A (en) 1979-07-17
JPS6145378B2 true JPS6145378B2 (enExample) 1986-10-07

Family

ID=15678526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15875177A Granted JPS5490033A (en) 1977-12-28 1977-12-28 Ion milling etching sensor

Country Status (1)

Country Link
JP (1) JPS5490033A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH088234B2 (ja) * 1986-01-31 1996-01-29 株式会社日立製作所 表面処理方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN=1974 *

Also Published As

Publication number Publication date
JPS5490033A (en) 1979-07-17

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