JPS6144438A - 半導体特性測定装置 - Google Patents

半導体特性測定装置

Info

Publication number
JPS6144438A
JPS6144438A JP60152219A JP15221985A JPS6144438A JP S6144438 A JPS6144438 A JP S6144438A JP 60152219 A JP60152219 A JP 60152219A JP 15221985 A JP15221985 A JP 15221985A JP S6144438 A JPS6144438 A JP S6144438A
Authority
JP
Japan
Prior art keywords
sample
semiconductor
photovoltage
semiconductor sample
surface potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60152219A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237532B2 (enrdf_load_html_response
Inventor
Tadasuke Munakata
忠輔 棟方
Noriaki Honma
本間　則秋
Shigeru Nishimatsu
西松　茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60152219A priority Critical patent/JPS6144438A/ja
Publication of JPS6144438A publication Critical patent/JPS6144438A/ja
Publication of JPS6237532B2 publication Critical patent/JPS6237532B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP60152219A 1985-07-12 1985-07-12 半導体特性測定装置 Granted JPS6144438A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60152219A JPS6144438A (ja) 1985-07-12 1985-07-12 半導体特性測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60152219A JPS6144438A (ja) 1985-07-12 1985-07-12 半導体特性測定装置

Publications (2)

Publication Number Publication Date
JPS6144438A true JPS6144438A (ja) 1986-03-04
JPS6237532B2 JPS6237532B2 (enrdf_load_html_response) 1987-08-13

Family

ID=15535682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60152219A Granted JPS6144438A (ja) 1985-07-12 1985-07-12 半導体特性測定装置

Country Status (1)

Country Link
JP (1) JPS6144438A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174325A (ja) * 1997-08-29 1999-03-16 Kobe Steel Ltd 表面光電圧による半導体表面評価方法及び装置
JP2023040744A (ja) * 2021-09-10 2023-03-23 株式会社東芝 検査方法、半導体装置の製造方法、検査装置、検査システム、プログラム、及び記憶媒体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174325A (ja) * 1997-08-29 1999-03-16 Kobe Steel Ltd 表面光電圧による半導体表面評価方法及び装置
JP2023040744A (ja) * 2021-09-10 2023-03-23 株式会社東芝 検査方法、半導体装置の製造方法、検査装置、検査システム、プログラム、及び記憶媒体

Also Published As

Publication number Publication date
JPS6237532B2 (enrdf_load_html_response) 1987-08-13

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