JPS6138758U - 電子線絞り装置 - Google Patents

電子線絞り装置

Info

Publication number
JPS6138758U
JPS6138758U JP12427684U JP12427684U JPS6138758U JP S6138758 U JPS6138758 U JP S6138758U JP 12427684 U JP12427684 U JP 12427684U JP 12427684 U JP12427684 U JP 12427684U JP S6138758 U JPS6138758 U JP S6138758U
Authority
JP
Japan
Prior art keywords
aperture
electron beam
central cylinder
positioning base
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12427684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0347246Y2 (enrdf_load_stackoverflow
Inventor
道生 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP12427684U priority Critical patent/JPS6138758U/ja
Publication of JPS6138758U publication Critical patent/JPS6138758U/ja
Application granted granted Critical
Publication of JPH0347246Y2 publication Critical patent/JPH0347246Y2/ja
Granted legal-status Critical Current

Links

JP12427684U 1984-08-13 1984-08-13 電子線絞り装置 Granted JPS6138758U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12427684U JPS6138758U (ja) 1984-08-13 1984-08-13 電子線絞り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12427684U JPS6138758U (ja) 1984-08-13 1984-08-13 電子線絞り装置

Publications (2)

Publication Number Publication Date
JPS6138758U true JPS6138758U (ja) 1986-03-11
JPH0347246Y2 JPH0347246Y2 (enrdf_load_stackoverflow) 1991-10-08

Family

ID=30683003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12427684U Granted JPS6138758U (ja) 1984-08-13 1984-08-13 電子線絞り装置

Country Status (1)

Country Link
JP (1) JPS6138758U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0347246Y2 (enrdf_load_stackoverflow) 1991-10-08

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