JPS613874B2 - - Google Patents

Info

Publication number
JPS613874B2
JPS613874B2 JP56037440A JP3744081A JPS613874B2 JP S613874 B2 JPS613874 B2 JP S613874B2 JP 56037440 A JP56037440 A JP 56037440A JP 3744081 A JP3744081 A JP 3744081A JP S613874 B2 JPS613874 B2 JP S613874B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56037440A
Other languages
Japanese (ja)
Other versions
JPS57152462A (en
Inventor
Isamu Shimizu
Kyosuke Ogawa
Hidekazu Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56037440A priority Critical patent/JPS57152462A/ja
Priority to DE3208494A priority patent/DE3208494C2/de
Publication of JPS57152462A publication Critical patent/JPS57152462A/ja
Publication of JPS613874B2 publication Critical patent/JPS613874B2/ja
Priority to US06/867,624 priority patent/US4721664A/en
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP56037440A 1981-03-09 1981-03-16 Manufacture of photoconductive member Granted JPS57152462A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56037440A JPS57152462A (en) 1981-03-16 1981-03-16 Manufacture of photoconductive member
DE3208494A DE3208494C2 (de) 1981-03-09 1982-03-09 Verfahren zur Herstellung eines fotoleitfähigen Elements
US06/867,624 US4721664A (en) 1981-03-09 1986-05-27 Silicon film deposition from mixture of silanes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56037440A JPS57152462A (en) 1981-03-16 1981-03-16 Manufacture of photoconductive member

Publications (2)

Publication Number Publication Date
JPS57152462A JPS57152462A (en) 1982-09-20
JPS613874B2 true JPS613874B2 (xx) 1986-02-05

Family

ID=12497564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56037440A Granted JPS57152462A (en) 1981-03-09 1981-03-16 Manufacture of photoconductive member

Country Status (1)

Country Link
JP (1) JPS57152462A (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174450A (en) * 1981-04-21 1982-10-27 Canon Inc Production of photoconductive member
US4637938A (en) * 1983-08-19 1987-01-20 Energy Conversion Devices, Inc. Methods of using selective optical excitation in deposition processes and the detection of new compositions

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553331A (en) * 1978-10-17 1980-04-18 Canon Inc Electrophotographic photoreceptor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553331A (en) * 1978-10-17 1980-04-18 Canon Inc Electrophotographic photoreceptor

Also Published As

Publication number Publication date
JPS57152462A (en) 1982-09-20

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