JPS6137497U - タ−ボ分子ポンプの軸受ダンパ - Google Patents

タ−ボ分子ポンプの軸受ダンパ

Info

Publication number
JPS6137497U
JPS6137497U JP1984044606U JP4460684U JPS6137497U JP S6137497 U JPS6137497 U JP S6137497U JP 1984044606 U JP1984044606 U JP 1984044606U JP 4460684 U JP4460684 U JP 4460684U JP S6137497 U JPS6137497 U JP S6137497U
Authority
JP
Japan
Prior art keywords
bearing damper
turbo molecular
bearing
molecular pump
damper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984044606U
Other languages
English (en)
Japanese (ja)
Other versions
JPH018711Y2 (enExample
Inventor
重一 川口
潔 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1984044606U priority Critical patent/JPS6137497U/ja
Publication of JPS6137497U publication Critical patent/JPS6137497U/ja
Application granted granted Critical
Publication of JPH018711Y2 publication Critical patent/JPH018711Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Support Of The Bearing (AREA)
JP1984044606U 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ Granted JPS6137497U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984044606U JPS6137497U (ja) 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984044606U JPS6137497U (ja) 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ

Publications (2)

Publication Number Publication Date
JPS6137497U true JPS6137497U (ja) 1986-03-08
JPH018711Y2 JPH018711Y2 (enExample) 1989-03-08

Family

ID=30557332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984044606U Granted JPS6137497U (ja) 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ

Country Status (1)

Country Link
JP (1) JPS6137497U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1760319A4 (en) * 2004-06-25 2010-07-07 Osaka Vacuum Ltd BEARING SUPPORT STRUCTURE FOR TURBOMOLECULAR PUMP

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1760319A4 (en) * 2004-06-25 2010-07-07 Osaka Vacuum Ltd BEARING SUPPORT STRUCTURE FOR TURBOMOLECULAR PUMP

Also Published As

Publication number Publication date
JPH018711Y2 (enExample) 1989-03-08

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