JPS61369Y2 - - Google Patents

Info

Publication number
JPS61369Y2
JPS61369Y2 JP5072982U JP5072982U JPS61369Y2 JP S61369 Y2 JPS61369 Y2 JP S61369Y2 JP 5072982 U JP5072982 U JP 5072982U JP 5072982 U JP5072982 U JP 5072982U JP S61369 Y2 JPS61369 Y2 JP S61369Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5072982U
Other versions
JPS58155370U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5072982U priority Critical patent/JPS58155370U/ja
Publication of JPS58155370U publication Critical patent/JPS58155370U/ja
Application granted granted Critical
Publication of JPS61369Y2 publication Critical patent/JPS61369Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5072982U 1982-04-09 1982-04-09 シリコン単結晶製造装置 Granted JPS58155370U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5072982U JPS58155370U (ja) 1982-04-09 1982-04-09 シリコン単結晶製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5072982U JPS58155370U (ja) 1982-04-09 1982-04-09 シリコン単結晶製造装置

Publications (2)

Publication Number Publication Date
JPS58155370U JPS58155370U (ja) 1983-10-17
JPS61369Y2 true JPS61369Y2 (ja) 1986-01-08

Family

ID=30061513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5072982U Granted JPS58155370U (ja) 1982-04-09 1982-04-09 シリコン単結晶製造装置

Country Status (1)

Country Link
JP (1) JPS58155370U (ja)

Also Published As

Publication number Publication date
JPS58155370U (ja) 1983-10-17

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