JPS613637B2 - - Google Patents

Info

Publication number
JPS613637B2
JPS613637B2 JP10049277A JP10049277A JPS613637B2 JP S613637 B2 JPS613637 B2 JP S613637B2 JP 10049277 A JP10049277 A JP 10049277A JP 10049277 A JP10049277 A JP 10049277A JP S613637 B2 JPS613637 B2 JP S613637B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10049277A
Other languages
Japanese (ja)
Other versions
JPS5434775A (en
Inventor
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10049277A priority Critical patent/JPS5434775A/ja
Publication of JPS5434775A publication Critical patent/JPS5434775A/ja
Publication of JPS613637B2 publication Critical patent/JPS613637B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP10049277A 1977-08-24 1977-08-24 Wafer handling device Granted JPS5434775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10049277A JPS5434775A (en) 1977-08-24 1977-08-24 Wafer handling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10049277A JPS5434775A (en) 1977-08-24 1977-08-24 Wafer handling device

Publications (2)

Publication Number Publication Date
JPS5434775A JPS5434775A (en) 1979-03-14
JPS613637B2 true JPS613637B2 (enExample) 1986-02-03

Family

ID=14275418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10049277A Granted JPS5434775A (en) 1977-08-24 1977-08-24 Wafer handling device

Country Status (1)

Country Link
JP (1) JPS5434775A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112518U (enExample) * 1988-01-25 1989-07-28

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4493606A (en) * 1982-05-24 1985-01-15 Proconics International, Inc. Wafer transfer apparatus
US4971932B1 (en) * 1989-02-24 1995-01-03 Corning Glass Works Magnetic memory storage devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112518U (enExample) * 1988-01-25 1989-07-28

Also Published As

Publication number Publication date
JPS5434775A (en) 1979-03-14

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