JPS6135954Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an apparatus for performing a contact test in a vacuum atmosphere.

When researching various materials such as relay contacts, it is extremely useful to vibrate a pair of workpieces made of the material to each other in a vacuum atmosphere and then observe changes in the surface using Auger analysis or other techniques.

The purpose of the present invention is to obtain a device that meets such requirements, and includes a rod 2 on one side that extends into an ultra-high vacuum or other vacuum chamber 1 by airtightly passing through the side wall on one side. , and a rod 3 on the other side that extends through the side wall on the other side airtightly. is connected at its outer end to a motor or other prime mover 7, which can freely rotate forward and backward, via a micrometer 5 and a speed reducer 6, and the rod 3 on the other side is connected to at least one pair of adjustment screws 8, 8 at its outer end. The rod 2 on one side has one workpiece 4 at its tip.
The rod 3 on the other side has a sample holder 11 at its tip that holds the other work via an elastic arm 10, and a strain gauge 12 is provided on the elastic arm 10. An ion gun 24 and an electron gun 25 are provided above and below both works 4, 4 in the workpiece 1.

One workpiece 4 is held along the length of the rod 2 on one side, and the other workpiece 4 is held in a position substantially perpendicular to the rod 3 on the other side. The rod 2 on one side is hermetically sealed with a bellows 13 on the outer periphery so as to pass through one side wall of the vacuum chamber 1, and the rod 3 on the other side is a cylindrical part extending from the other side wall of the chamber 1. 14 and has a rotation introduction terminal 15 at its outer end, so that the rotation introduction terminal 15 is provided with an upward and downward reversal, and furthermore, the cylindrical portion 14
has a bellows 16 at approximately half of its outer end, and has a flange 17 at its outer end, and the screws 8, 8 are inserted through the outer seat 18 and extend inward. It engages with the flange 17, so that when the screws 8, 8 move back and forth, the flange 17 tilts back and forth, giving the rod 3 a corresponding tilting motion. Further, a feed screw 20 is provided between the catch seat 18 and a fixed machine frame 19 in front thereof, and the screw 20 is rotated by a handle 21 at its tail end, so that the rod 3 is attached to the catch seat 18. It is now possible to give back and forth movement with . It is assumed that the reduction gear 6 and the prime mover 7 described above are supported by a rod 23 on the lower side via a bracket 22 on the lower side.

To explain its operation, first, both workpieces 4 and 4
The surface of the work piece 4 is cleaned by the electron gun 25 or the ion gun 24, and then the rod 3 at the other end is advanced so that the workpieces 4, 4 are vertically opposed to each other as shown in the figure, and the rod 3 is tilted to some extent. Mutual pressure contact is applied between the two works 4, 4.
From this state, the prime mover 7 is alternately given forward and reverse rotation, and this rotation is applied to the micrometer 5 through the reducer 6, causing the rod 2 in front of it to alternately move forward and backward at a relatively low speed. As a result, both works 4, 4 slide against each other while being pressed against each other. Its sliding speed is, for example, 0.05mm/min, 0.1
mm, 1.0 mm, 10 mm, etc., and the stroke is, for example, about ±1.5 mm. The rod 3 is then reversed so that the upper workpiece 4 in the drawing is removed from the upper surface of the lower workpiece 4. At this time, if there is seizure on both the workpieces 4, 4, the strain gauge 12 will be distorted, so the strain gauge 12 will be distorted.
From this, it is possible to know whether or not both the workpieces 4, 4 are seized and the degree of seizing. Finally, with both works 4, 4 dissociated, each work 4 is irradiated with ions by the ion gun 24, and composition changes in the depth direction of each work 4 are observed by Auger analysis or the like.

In this way, according to the present invention, 1
It is possible to perform all of the cleaning, pressure contact/sliding, and observation of surface changes of the pair of workpieces 4, and can be advantageously used, for example, for analysis of relay contacts and other materials. The rotation of the micrometer 5 is applied to the micrometer 5 via the speed reducer 6, and the output side of the micrometer 5 is caused to move forward and backward at a low speed, and has the advantage of being simple and reliable.

[Brief explanation of the drawing]

FIG. 1 is a partially cut-away side view of an example of the present device, and FIG. 2 is a partially cut-away side view of the device. 1... Vacuum chamber, 2, 3... Rod, 4, 4...
Workpiece, 5...micrometer, 6...reducer,
7... Prime mover, 8, 8... Adjustment screw, 9, 11...
...Sample holder, 10...Elastic arm, 12...
...Strain gauge, 24...Ion gun, 25
...electronic gun.

Claims (1)

[Scope of utility model registration request] A vacuum chamber 1 such as an ultra-high vacuum is provided with a rod 2 on one side extending through the side wall of one side airtightly and a rod 3 on the other side extending airtightly passing through the side wall on the other side. The rods 2 and 3 are opposed to each other with respective works 4 and 4 fixed to their tips, and the rods 2 and 3 on one side are
at its outer end with a micrometer 5 and a reducer 6
A motor or other prime mover 7 that can freely rotate forward or backward through
At the same time, the rod 3 on the other side is engaged with at least one pair of adjustment screws 8, 8 at its outer end so as to be freely tiltable, and the rod 2 on the one side holds one work 4 at its tip. The rod 3 on the other side has a sample holder 11 at its tip that holds the other work 4 via an elastic arm 10, and a strain gauge 12 is provided on the elastic arm 10. A contact testing device comprising an ion gun 24 and an electron gun 25 above and below both works 4, 4.