JPS613545B2 - - Google Patents
Info
- Publication number
- JPS613545B2 JPS613545B2 JP21022881A JP21022881A JPS613545B2 JP S613545 B2 JPS613545 B2 JP S613545B2 JP 21022881 A JP21022881 A JP 21022881A JP 21022881 A JP21022881 A JP 21022881A JP S613545 B2 JPS613545 B2 JP S613545B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21022881A JPS58114763A (en) | 1981-12-29 | 1981-12-29 | Method for forming thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21022881A JPS58114763A (en) | 1981-12-29 | 1981-12-29 | Method for forming thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58114763A JPS58114763A (en) | 1983-07-08 |
| JPS613545B2 true JPS613545B2 (en) | 1986-02-03 |
Family
ID=16585900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21022881A Granted JPS58114763A (en) | 1981-12-29 | 1981-12-29 | Method for forming thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58114763A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6238558A (en) * | 1985-08-12 | 1987-02-19 | Konishiroku Photo Ind Co Ltd | Magnetic sheet jacket loading device |
| JPH0474792B2 (en) * | 1985-11-01 | 1992-11-27 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193339A (en) * | 1984-03-14 | 1985-10-01 | Fujitsu Ltd | Method of coating resist film |
| JPS61161174A (en) * | 1984-12-29 | 1986-07-21 | Nordson Kk | Method for coating to material to be coated under rotation |
| JPS62114683A (en) * | 1985-11-15 | 1987-05-26 | Hitachi Tokyo Electron Co Ltd | Coating method and apparatus |
| JPH05234074A (en) * | 1992-02-21 | 1993-09-10 | Tdk Corp | Manufacture of magnetic disk and the magnetic disk |
| KR100324645B1 (en) * | 1999-01-15 | 2002-02-27 | 박호군 | Thickness Control of Thin Films Using Viscosity Changes in Solution |
| JP6465000B2 (en) * | 2015-11-16 | 2019-02-06 | 東京エレクトロン株式会社 | Coating film forming method, coating film forming apparatus, and storage medium |
| TWI666684B (en) | 2015-11-16 | 2019-07-21 | 日商東京威力科創股份有限公司 | Coating film forming method, coating film forming device and memory medium |
-
1981
- 1981-12-29 JP JP21022881A patent/JPS58114763A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6238558A (en) * | 1985-08-12 | 1987-02-19 | Konishiroku Photo Ind Co Ltd | Magnetic sheet jacket loading device |
| JPH0474792B2 (en) * | 1985-11-01 | 1992-11-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58114763A (en) | 1983-07-08 |