JPS6134842A - Check system of apparatus in electron microscope - Google Patents

Abstract

PURPOSE:To permit checking of signals and others in an electron microscope without using an oscilloscope by employing a waveform monitor mode for checking. CONSTITUTION:When switch means 5 is switched from A position to B position to connect a mode selecting circuit 3 to an image amplifier 9, the signal sent to a preamplifier 7 through a check circuit 6 is displayed on an observing CRT4 according to the peak value and frequency selected by a display switching circuit 8. In order to execute comparison with preceding display signals, the means 5 is switched to C position to connect the mode selecting circuit 3 to a memory circuit 10. Then, signals previously displayed and stored in the circuit 10 are displayed on the CRT4. This system can omit connecting operation to an oscilloscope and measuring terminals. Furthermore, operation is simple and data can be memoried, permitting ready comparison of check and other treatment.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to a waveform monitor (WF former Wa) in an electron microscope.
This invention relates to a system for diagnosing a device in an electron microscope, in which a signal waveform is displayed on a cathode ray tube for image observation using a veform monitor function to diagnose the device.

[Conventional technology]

FIG. 1 is a diagram showing an example of a display on a waveform monitor, and FIG. 2 is a diagram showing an example of the configuration of a display system for a conventional viewing CRT. In FIG. 2, numeral 2 indicates a preamplifier, 2 an image amplifier, 3 a mode selection circuit, and 4 a viewing CRT.

In current transmission electron microscopes and scanning electron microscopes,
The viewing CRT is used to confirm the observed image and display various other modes, and occupies a very important position for the user of the device. Observation CRTs are usually
In addition to the waveform monitor (WFM) mode
for, mMon1tor) and Y-axis modulation display (Y-
MOD) and other modes. FIG. 1 shows an example of the display on the waveform monitor.

As shown in Figure 1, the waveform monitor can display the waveform of the image signal and at the same time display a bright line scale for comparing input levels, making it possible to more accurately determine observation and photographing conditions such as image brightness, contrast, and focusing. can do. In addition, in the Y-axis modulation display, the image signal is
By adding T to the Y axis, three-dimensional display of the sample becomes possible.

The configuration of the display system of this viewing CRT is, for example,
As shown in the figure (the image signal is amplified through the preamplifier 1 and the image amplifier 2, the mode selection circuit 3 selects the mode, and according to the selected mode, the observation CRT d
The image signal is displayed on top.

[Problem that the invention seeks to solve]

Conventionally, in an electron microscope equipped with an observation CRT display system as described above, an oscilloscope has been used to check signals during manufacturing and service.

The present invention is based on the above consideration, and an object of the present invention is to provide a method for diagnosing a device in an electron microscope, which allows checking signals and the like without using an oscilloscope.

[Means for solving problems]

To this end, the device diagnostic method for the electron microscope of the present invention is to detect the signal to be diagnosed in an electron microscope equipped with a waveform monitor function that displays the waveform of the input signal at the same time as a bright line scale that indicates the input level to the cathode ray tube for image observation. Diagnostic signal input means for switching and inputting the signal, and switching means for switching between the image observation signal and the signal to be diagnosed from the diagnostic signal input means, are provided, and in the waveform monitor mode, the signal to be diagnosed is inputted by the diagnostic signal input means. The apparatus is characterized in that the signal is supplied from the signal input means to the cathode ray tube for image observation through the switching means to diagnose the apparatus.

[Effect]

Under the waveform monitor mode, when the switching means selects the signal to be diagnosed from the diagnostic signal manual means, the signal is supplied to the image observation cathode ray tube and displayed in the waveform monitor mode, so that the signal is By observing the waveforms, each part of the device can be diagnosed. In addition, by storing the waveform displayed on the image observation cathode ray tube at that time and operating the switching means to select the stored content, it is possible to view the waveform of the previous diagnostic signal as a target for diagnostic comparison. can.

〔Example〕

Examples will be described below with reference to the drawings.

FIG. 3 is a diagram showing the configuration of one embodiment of the present invention, 1 to 4 indicate those corresponding to FIG. 2, and 2.5 is a switching means;
Reference numeral 6 indicates a check circuit, 7 a preamplifier, 8 a display switching circuit, 9 an image amplifier, and 10 a memory circuit.

The terminals of the signals to be checked are connected to the digital circuit 6, and among those signals, the preamplifier 76 outputs the signals A4, A4, and A4. The display switching circuit 8 performs gain/range switching and frequency switching (using a filter circuit), and switches the peak value (GAIN) according to the display range or switches to a desired frequency. The storage circuit 10 stores check signals. The switching means 5 is for selecting a circuit to which the mode selection circuit 3 is connected.

Next, the operation will be explained. When the switching means 5 is at position A and the mode selection circuit 3 is connected to the image amplifier 2, the circuit configuration is the same as the conventional circuit configuration shown in FIG. Therefore, when the switching means 5 is switched to position B and the mode selection circuit 3 is connected to the image amplifier 9, the signal supplied to the preamplifier 7 through the check circuit Ia6 is transferred to the display switching circuit 8.
C for observation according to the peak value and frequency selected by
Displayed on RT4. When comparing with the previous display signal, the switching means 5 is switched to position C and the mode selection circuit 3 is connected to the storage circuit 1o. Then, the signals that were previously displayed and stored in the storage circuit 10 are displayed on the observation CRT 4. In addition, observation CRT
Equally spaced lines on 4 are e.g. 1 m depending on the gain
, 0.1 m, and 0.01 (V).

〔Effect of the invention〕

As is clear from the above description, according to the present invention, a waveform monitor (WFM; Wavef) in an electron microscope.

Since the change mechanism uses the rmMon1tor mode, conventionally an oscilloscope was used in manufacturing or service to connect the measurement terminals one by one to check signals, etc. No connection work is required. It is also easy to operate and can store data, making it easy to compare checks and perform other processes.

[Brief explanation of drawings]

FIG. 1 is a diagram showing an example of a display on a waveform monitor, FIG. 2 is a diagram showing an example of the configuration of a display system of a conventional viewing CRT, and FIG. 3 is a diagram showing the configuration of an embodiment of the present invention. 1...Preamplifier, 2...Image amplifier, 3...
- Mode selection circuit, 4... CRT for observation, 5... switching means, 6... check circuit, 7... preamplifier,
8... Display switching circuit, 9... Image amplifier, 1o
...Memory circuit.

Claims (3)

[Claims] (1) In an electron microscope equipped with a waveform monitor function that displays the waveform of an input signal on a cathode ray tube for image observation at the same time as a bright line scale that indicates the input level, a diagnostic signal input means that switches and inputs the signal to be diagnosed, and an image A switching means is provided for switching between an observation signal and a signal to be diagnosed from the diagnostic signal input means, and in the waveform monitor mode, the signal to be diagnosed is transmitted from the diagnostic signal input means to the cathode ray for image observation through the switching means. A method for diagnosing equipment in an electron microscope, characterized by supplying the liquid to a tube and diagnosing the equipment. (2) A diagnostic method for an apparatus in an electron microscope according to claim (1), further comprising a storage means for storing the waveform of a signal displayed on a cathode ray tube for image observation. (3) The signal to be diagnosed and the contents stored in the storage means are selectively supplied to the cathode ray tube for image observation through the switching means to diagnose the apparatus. Diagnosis method for the device in the electron microscope described in section 2).