JPS6134654B2 - - Google Patents

Info

Publication number
JPS6134654B2
JPS6134654B2 JP54140082A JP14008279A JPS6134654B2 JP S6134654 B2 JPS6134654 B2 JP S6134654B2 JP 54140082 A JP54140082 A JP 54140082A JP 14008279 A JP14008279 A JP 14008279A JP S6134654 B2 JPS6134654 B2 JP S6134654B2
Authority
JP
Japan
Prior art keywords
polymer
resolution
sensitivity
diallyl
ortho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54140082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5664336A (en
Inventor
Kazuo Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14008279A priority Critical patent/JPS5664336A/ja
Publication of JPS5664336A publication Critical patent/JPS5664336A/ja
Publication of JPS6134654B2 publication Critical patent/JPS6134654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14008279A 1979-10-30 1979-10-30 Minute pattern forming method Granted JPS5664336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14008279A JPS5664336A (en) 1979-10-30 1979-10-30 Minute pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14008279A JPS5664336A (en) 1979-10-30 1979-10-30 Minute pattern forming method

Publications (2)

Publication Number Publication Date
JPS5664336A JPS5664336A (en) 1981-06-01
JPS6134654B2 true JPS6134654B2 (enrdf_load_stackoverflow) 1986-08-08

Family

ID=15260532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14008279A Granted JPS5664336A (en) 1979-10-30 1979-10-30 Minute pattern forming method

Country Status (1)

Country Link
JP (1) JPS5664336A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2163435B (en) * 1984-07-11 1987-07-22 Asahi Chemical Ind Image-forming materials sensitive to high-energy beam
JP6147534B2 (ja) * 2013-03-25 2017-06-14 本田技研工業株式会社 鞍乗型車両
JP6965969B2 (ja) * 2015-12-03 2021-11-10 大日本印刷株式会社 インプリントモールド

Also Published As

Publication number Publication date
JPS5664336A (en) 1981-06-01

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