JPS613393B2 - - Google Patents

Info

Publication number
JPS613393B2
JPS613393B2 JP2258482A JP2258482A JPS613393B2 JP S613393 B2 JPS613393 B2 JP S613393B2 JP 2258482 A JP2258482 A JP 2258482A JP 2258482 A JP2258482 A JP 2258482A JP S613393 B2 JPS613393 B2 JP S613393B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2258482A
Other versions
JPS58141382A (ja
Inventor
Isao Saito
Tooru Ii
Takao Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2258482A priority Critical patent/JPS58141382A/ja
Publication of JPS58141382A publication Critical patent/JPS58141382A/ja
Publication of JPS613393B2 publication Critical patent/JPS613393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP2258482A 1982-02-17 1982-02-17 イオンプレ−テイング装置 Granted JPS58141382A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2258482A JPS58141382A (ja) 1982-02-17 1982-02-17 イオンプレ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2258482A JPS58141382A (ja) 1982-02-17 1982-02-17 イオンプレ−テイング装置

Publications (2)

Publication Number Publication Date
JPS58141382A JPS58141382A (ja) 1983-08-22
JPS613393B2 true JPS613393B2 (ja) 1986-01-31

Family

ID=12086898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2258482A Granted JPS58141382A (ja) 1982-02-17 1982-02-17 イオンプレ−テイング装置

Country Status (1)

Country Link
JP (1) JPS58141382A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3091837B2 (ja) * 1996-10-11 2000-09-25 株式会社サン・プロジェクト ニンニク/卵黄複合加工食品の製造方法

Also Published As

Publication number Publication date
JPS58141382A (ja) 1983-08-22

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