JPS6133505B2 - - Google Patents
Info
- Publication number
- JPS6133505B2 JPS6133505B2 JP19273881A JP19273881A JPS6133505B2 JP S6133505 B2 JPS6133505 B2 JP S6133505B2 JP 19273881 A JP19273881 A JP 19273881A JP 19273881 A JP19273881 A JP 19273881A JP S6133505 B2 JPS6133505 B2 JP S6133505B2
- Authority
- JP
- Japan
- Prior art keywords
- main electrode
- piezoelectric element
- electrode
- piezoelectric
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 14
- 238000005323 electroforming Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000007772 electroless plating Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Description
【発明の詳細な説明】
本発明は圧電発音体等として利用されるバイモ
ルフ構成の圧電型電気音響変換器の製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a piezoelectric electroacoustic transducer having a bimorph structure used as a piezoelectric sounding body or the like.
セラミツク圧電素体と金属板を接合したバイモ
ルフ振動子は圧電発音体として広く民生用、産業
エロクトニクス用として利用されている。 Bimorph resonators, which are made by bonding a ceramic piezoelectric element and a metal plate, are widely used as piezoelectric sounding bodies for consumer and industrial erectonics applications.
従来このバイモルフ振動子は第１図に示すよう
に、薄い円板（あるいは角板）形状を有するセラ
ミツク圧電素体１の両面に例えば銀ペーストを塗
布し、乾燥後700〜800℃で焼き付ける方法で電極
２を設け、分極処理を行なつたのち有機系接着剤
にて圧電素体１より大きい径を有し圧電素体１と
ほぼ同等の厚みを有する金属板３に接合して構成
される。そして電極２と金属板３からそれぞれ引
出されたリード線４１，４２に交流信号を印加す
ることで発音体となる。 Conventionally, this bimorph oscillator is manufactured by applying, for example, silver paste to both sides of a ceramic piezoelectric element 1 having a thin disk (or square plate) shape, and baking it at 700 to 800 degrees Celsius after drying, as shown in Fig. 1. The electrode 2 is provided, polarized, and then bonded to a metal plate 3 having a larger diameter than the piezoelectric element 1 and approximately the same thickness as the piezoelectric element 1 using an organic adhesive. Then, by applying an AC signal to the lead wires 4 1 and 4 2 drawn out from the electrode 2 and the metal plate 3, respectively, it becomes a sounding body.
一方最近このバイモルフ発音体は小型低周波化
の要望が強くなりつつある。バイモルフ発音体の
低周波化は直径を大きくすることにより達成する
ことが可能であるが、これは周辺機器の小型化傾
向から限度がある。また低周波化を目的として圧
電素体および金属板が薄板化するに従い従来の接
着剤による接合法が問題になつてきている。 On the other hand, recently there has been a growing demand for smaller, lower frequency bimorph sounding bodies. Although it is possible to reduce the frequency of a bimorph sounding body by increasing its diameter, there is a limit to this due to the trend toward miniaturization of peripheral devices. Furthermore, as piezoelectric elements and metal plates become thinner for the purpose of lowering frequencies, conventional bonding methods using adhesives are becoming problematic.
即ち、(1)これら薄板同士を従来の接着法で接合
する場合、圧電素体に機械的な圧力を加えて接合
するため、傷などが生じやすく、極端な場合には
圧電素体にヒビ、クラツク、カケが生じ歩留りの
低下をまねいていた。(2)金属板と圧電素体との接
合面に接着剤が十分廻り込まないため空気層を生
じ発音体として音響特性が低下し、また接着剤の
量により接着後、接着剤がはみ出したり、接着剤
層厚みのばらつきの影響が大となり同様に音響特
性が低下していた。(3)接着の際、圧電素体の金属
板を同心的に配置する必要があり、そのため位置
合せも必要であつた。また第１図に示した従来例
によれば電極からリード線を引出す必要があるた
め、たとえばこのリード線をハンダ付け等の方法
で引出した場合、発音体自体の振動のために、長
時間の使用によりリード線が切断する等の事故が
発生することがあつた。 That is, (1) when these thin plates are joined together using conventional adhesive methods, mechanical pressure is applied to the piezoelectric element to join them, which tends to cause scratches, and in extreme cases can cause cracks or cracks in the piezoelectric element. Cracks and chips occurred, leading to a decrease in yield. (2) Because the adhesive does not penetrate sufficiently to the bonding surface between the metal plate and the piezoelectric element, an air layer is created, which deteriorates the acoustic properties of the sounding body.Also, depending on the amount of adhesive, the adhesive may protrude after bonding. The influence of variations in the thickness of the adhesive layer became large, and the acoustic characteristics similarly deteriorated. (3) When bonding, it was necessary to arrange the metal plates of the piezoelectric element concentrically, which also required alignment. In addition, according to the conventional example shown in Fig. 1, it is necessary to draw out the lead wire from the electrode, so if the lead wire is drawn out by a method such as soldering, it may take a long time due to the vibration of the sounding body itself. Accidents such as lead wires breaking may occur due to use.
本発明は上記の如き問題点を解決した圧電型電
気音響変換器の製造方法を提供するものである。 The present invention provides a method for manufacturing a piezoelectric electroacoustic transducer that solves the above-mentioned problems.
本発明の方法は、圧電素体の一方の面のほぼ中
央部に部分的に第１の主電極を形成すると共にこ
の第１の主電極と一部で導通するように前記第１
の主電極の周辺部にリング状の補助電極を形成
し、前記圧電素体の他方の面全面に第２の主電極
を形成し、この第２の主電極全面に電鋳法により
金属層を形成してバイモルフ振動子を構成するこ
とを特徴とする。この本発明によれば、接着剤を
利用してバイモルフ振動子を構成する従来法に比
べ、不要な力を加える必要がないため振動子の信
頼性が高くなり、また圧電素体と金属層との間の
密着性が良好であるため優れた音響特性が得ら
れ、またリード線の切断等の事故も防止すること
ができる。 In the method of the present invention, a first main electrode is partially formed approximately in the center of one surface of a piezoelectric element body, and the first main electrode is partially electrically connected to the first main electrode.
A ring-shaped auxiliary electrode is formed around the main electrode, a second main electrode is formed on the entire surface of the other side of the piezoelectric element, and a metal layer is formed on the entire surface of the second main electrode by electroforming. It is characterized by forming a bimorph oscillator. According to the present invention, compared to the conventional method of constructing a bimorph resonator using an adhesive, there is no need to apply unnecessary force, so the reliability of the resonator is increased, and the piezoelectric element and the metal layer are Since the adhesion between the wires is good, excellent acoustic characteristics can be obtained, and accidents such as lead wire breakage can be prevented.
本発明の実施例を第２図ａ，ｂを参照して説明
する。図において、１１は円板状のセラミツク圧
電素体であり、まずその一方の面にはそのほぼ中
央部に第１の主電極１２1aを形成し、この主電極
１２1aと一部で導通して主電極１２1a周辺部にリ
ング状の補助電極１２1bを形成する。また圧電素
体１１の他方の面にはその全面に第２の主電極１
２２を形成する。第１の主電極１２1aは望ましく
は圧電素体１１の中央部に直径比0.6〜0.8程度に
形成される。これら第１、第２の主電極１２1a，
１２２は、蒸着後、無電解メツキ法、または銀ペ
ーストの焼き付け法にて設ける。この後所定の条
件にて分極処理を行い、次に第２の主電極１２２
側に電鋳法にて圧電素体１１の厚みとほぼ同等の
厚さに金属層１３を形成する。この場合、第１の
主電極１２1a側は電鋳液がつかない様あらかじめ
マスク処理を行ない、所定の電鋳治具に装着後第
２の電極１２２部分にメツキを行なう。例えば電
鋳液として一般に厚膜形成用に使用されるスルフ
アミン酸Ni液を使用することにより短時間で50
〜数百μｍ厚の金属層１３を形成することが可能
である。 An embodiment of the invention will be described with reference to FIGS. 2a and 2b. In the figure, reference numeral 11 denotes a disk-shaped ceramic piezoelectric element body, on one surface of which a first main electrode 12 1a is formed approximately in the center, and is partially electrically connected to this main electrode 12 1a . A ring-shaped auxiliary electrode 12 1b is formed around the main electrode 12 1a . Further, on the other surface of the piezoelectric element 11, a second main electrode 1 is provided on the entire surface.
2 Form 2 . The first main electrode 12 1a is preferably formed in the center of the piezoelectric element body 11 with a diameter ratio of about 0.6 to 0.8. These first and second main electrodes 12 1a ,
12 2 is provided by an electroless plating method or a silver paste baking method after vapor deposition. After this, polarization treatment is performed under predetermined conditions, and then the second main electrode 12 2
A metal layer 13 is formed on the side by electroforming to have a thickness substantially equal to that of the piezoelectric element body 11. In this case, the first main electrode 121a side is masked in advance to prevent electroforming liquid from coming into contact with it, and after mounting on a predetermined electroforming jig, the second electrode 121a is plated. For example, by using Ni sulfamate solution, which is generally used for forming thick films as an electroforming solution, it is possible to
It is possible to form a metal layer 13 with a thickness of ~ several hundred μm.
このような方法により形成されたバイモルフ圧
電振動子は、圧電素体１１と金属層１３との接合
が接着剤を介してないため密着性が良好で種々の
還境条件でも特性の劣化はなく、優れた音響特性
が得られる。また圧電振電子に不要な力を加える
必要もなく、傷、カケ、クラツクの心配もない。
さらに電鋳法による金属層は液の温度、電流密
度、時間を制御することにより厚みを一定におさ
える事が可能であり、かつ量産時の管理が簡単に
なるから音響特性のバラツキが少なく、歩留り向
上を計ることができる。また金属層は圧電素体の
一方の面全面に形成するため面倒な位置合せを要
しない。 The bimorph piezoelectric vibrator formed by such a method has good adhesion because the piezoelectric element body 11 and the metal layer 13 are not bonded through an adhesive, and the characteristics do not deteriorate even under various environmental conditions. Excellent acoustic characteristics can be obtained. There is also no need to apply unnecessary force to the piezoelectric vibrator, and there is no need to worry about scratches, chips, or cracks.
Furthermore, the thickness of the metal layer produced by electroforming can be kept constant by controlling the temperature, current density, and time of the liquid, and it is also easier to manage during mass production, resulting in less variation in acoustic characteristics and lower yields. You can measure your improvement. Further, since the metal layer is formed on the entire surface of one side of the piezoelectric element, troublesome alignment is not required.
また一般にこれらの発音体をケーシングする場
合発音体の外周部を機械的に固定、あるいは弾性
体を介して固定する方法がとられるが、この場合
本発明によれば裏面の金属層１３と表面のリング
状補助電極１２1bとをそれぞれのリード端子と
し、それぞれを電気的に絶縁する方法をとること
によりリード線を省略する事が可能となる。従つ
て長時間使用によりリード線が切断するような事
故もなくなり信頼性を大幅に改善することが可能
となる。また弾性体を介する場合に於いてもこの
弾性体として導電性ゴムを使用することにより、
やはりリード線を引出すことなくケーシングする
ことができる。 Generally, when casing these sounding bodies, the outer periphery of the sounding body is fixed mechanically or fixed via an elastic body, but in this case, according to the present invention, the metal layer 13 on the back side and the surface side are fixed together. By using a method in which the ring-shaped auxiliary electrode 12 1b is used as each lead terminal and electrically insulated from each other, lead wires can be omitted. Therefore, accidents such as breakage of the lead wire due to long-term use are eliminated, and reliability can be greatly improved. Also, when using an elastic body, by using conductive rubber as the elastic body,
After all, the casing can be done without pulling out the lead wires.
以上述べたように本発明によれば、電鋳法を利
用してバイモルフ振動子を構成することにより、
圧電型電気音響変換器の信頼性向上、音響特性の
向上を図ることができ、かつリード線切断等の事
故防止を図ることができる。 As described above, according to the present invention, by constructing a bimorph resonator using electroforming,
It is possible to improve the reliability and acoustic characteristics of the piezoelectric electroacoustic transducer, and to prevent accidents such as breakage of lead wires.
第１図は従来のバイモルフ振動子を示す斜視
図、第２図ａ，ｂは本発明の一実施例のバイモル
フ振動子を示す斜視図とそのＡ−A′断面図、で
ある。
１１……セラミツク圧電素体、１２1a……第１
の主電極、１２1b……補助電極、１２２……第２
の電極、１３……金属層。
FIG. 1 is a perspective view showing a conventional bimorph resonator, and FIGS. 2a and 2b are a perspective view and a sectional view taken along line A-A' of the bimorph resonator according to an embodiment of the present invention. 11...Ceramic piezoelectric element body, 12 1a ...First
main electrode, 12 1b ... auxiliary electrode, 12 2 ... second
electrode, 13...metal layer.
Claims (1)
第１の主電極を形成すると共にこの第１の主電極
と一部で導通するように前記第１の主電極の周辺
部にリング状の補助電極を形成し、前記圧電素体
の他方の面全面に第２の主電極を形成し、この第
２の主電極の全面に電鋳法により金属層を形成す
ることを特徴とする圧電型電気音響変換器の製造
方法。 ２ 金属層を圧電素体と略等しい厚みに形成する
特許請求の範囲第１項記載の圧電型電気音響変換
器の製造方法。 ３ 第１の主電極、補助電極および第２の主電極
を蒸着法、無電解メツキ法または銀ペースト塗
布、焼付け法により形成する特許請求の範囲第１
項記載の圧電型電気音響変換器の製造方法。[Scope of Claims] 1. A first main electrode is partially formed approximately at the center of one surface of the piezoelectric element, and the first main electrode is partially electrically connected to the first main electrode. A ring-shaped auxiliary electrode is formed around the electrode, a second main electrode is formed on the entire surface of the other side of the piezoelectric element, and a metal layer is formed on the entire surface of the second main electrode by electroforming. A method for manufacturing a piezoelectric electroacoustic transducer. 2. The method of manufacturing a piezoelectric electroacoustic transducer according to claim 1, wherein the metal layer is formed to have a thickness substantially equal to that of the piezoelectric element body. 3. Claim 1, in which the first main electrode, auxiliary electrode, and second main electrode are formed by a vapor deposition method, an electroless plating method, a silver paste application, and a baking method.
A method for manufacturing a piezoelectric electroacoustic transducer as described in 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19273881A JPS5895497A (en) | 1981-12-02 | 1981-12-02 | Production for piezoelectric electro-acoustic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19273881A JPS5895497A (en) | 1981-12-02 | 1981-12-02 | Production for piezoelectric electro-acoustic transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5895497A JPS5895497A (en) | 1983-06-07 |
| JPS6133505B2 true JPS6133505B2 (en) | 1986-08-02 |
Family
ID=16296235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19273881A Granted JPS5895497A (en) | 1981-12-02 | 1981-12-02 | Production for piezoelectric electro-acoustic transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5895497A (en) |
-
1981
- 1981-12-02 JP JP19273881A patent/JPS5895497A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5895497A (en) | 1983-06-07 |
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