JPS6133264Y2 - - Google Patents
Info
- Publication number
- JPS6133264Y2 JPS6133264Y2 JP5524379U JP5524379U JPS6133264Y2 JP S6133264 Y2 JPS6133264 Y2 JP S6133264Y2 JP 5524379 U JP5524379 U JP 5524379U JP 5524379 U JP5524379 U JP 5524379U JP S6133264 Y2 JPS6133264 Y2 JP S6133264Y2
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- pipe
- cryopump
- slits
- fins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 239000001307 helium Substances 0.000 claims description 5
- 229910052734 helium Inorganic materials 0.000 claims description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims 1
- 230000004927 fusion Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5524379U JPS6133264Y2 (cs) | 1979-04-26 | 1979-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5524379U JPS6133264Y2 (cs) | 1979-04-26 | 1979-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55156275U JPS55156275U (cs) | 1980-11-10 |
| JPS6133264Y2 true JPS6133264Y2 (cs) | 1986-09-29 |
Family
ID=29289508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5524379U Expired JPS6133264Y2 (cs) | 1979-04-26 | 1979-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6133264Y2 (cs) |
-
1979
- 1979-04-26 JP JP5524379U patent/JPS6133264Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55156275U (cs) | 1980-11-10 |
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