JPS613316B2 - - Google Patents

Info

Publication number
JPS613316B2
JPS613316B2 JP56075523A JP7552381A JPS613316B2 JP S613316 B2 JPS613316 B2 JP S613316B2 JP 56075523 A JP56075523 A JP 56075523A JP 7552381 A JP7552381 A JP 7552381A JP S613316 B2 JPS613316 B2 JP S613316B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56075523A
Other languages
Japanese (ja)
Other versions
JPS57191292A (en
Inventor
Hiroshi Yamazaki
Katsumi Hoshina
Yasuzane Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP56075523A priority Critical patent/JPS57191292A/ja
Publication of JPS57191292A publication Critical patent/JPS57191292A/ja
Publication of JPS613316B2 publication Critical patent/JPS613316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP56075523A 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor Granted JPS57191292A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56075523A JPS57191292A (en) 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075523A JPS57191292A (en) 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor

Publications (2)

Publication Number Publication Date
JPS57191292A JPS57191292A (en) 1982-11-25
JPS613316B2 true JPS613316B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-01-31

Family

ID=13578671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075523A Granted JPS57191292A (en) 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor

Country Status (1)

Country Link
JP (1) JPS57191292A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58156595A (ja) * 1982-03-08 1983-09-17 Ibiden Co Ltd シリコン単結晶引上げ装置用黒鉛ルツボ
JP4312432B2 (ja) * 2002-07-25 2009-08-12 東洋炭素株式会社 単結晶引き上げ用黒鉛材料及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812514B2 (ja) * 1974-12-18 1983-03-08 トウシバセラミツクス カブシキガイシヤ カ−ボン製溶融金属製造用構造物
JPS605523B2 (ja) * 1976-11-05 1985-02-12 工業技術院長 耐酸化被覆用黒鉛基材の製造法
JPS5456095A (en) * 1977-10-12 1979-05-04 Toshiba Ceramics Co Carbon baseematerial for sic coating
JPS54157778A (en) * 1978-06-02 1979-12-12 Toshiba Ceramics Co Susceptor

Also Published As

Publication number Publication date
JPS57191292A (en) 1982-11-25

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