JPS6131793Y2 - - Google Patents
Info
- Publication number
- JPS6131793Y2 JPS6131793Y2 JP1985051160U JP5116085U JPS6131793Y2 JP S6131793 Y2 JPS6131793 Y2 JP S6131793Y2 JP 1985051160 U JP1985051160 U JP 1985051160U JP 5116085 U JP5116085 U JP 5116085U JP S6131793 Y2 JPS6131793 Y2 JP S6131793Y2
- Authority
- JP
- Japan
- Prior art keywords
- sliding body
- load
- feed
- force
- sliding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 19
- 230000003068 static effect Effects 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 3
- 230000005489 elastic deformation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
- Transmission Devices (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【考案の詳細な説明】
本考案は、摺動体を低速度で摺動させようとす
る際、摺動抵抗のもつ非線形特性と駆動系の弾性
変形により生じる附着すべり現象によつて、正確
でなめらかな位置決めが困難な場合に使用する送
り機構とは別に装着する送り力補償装置に関す
る。[Detailed description of the invention] This invention uses the nonlinear characteristics of sliding resistance and the adhesion slip phenomenon caused by the elastic deformation of the drive system to ensure accurate and smooth sliding when the sliding body is trying to slide at low speed. The present invention relates to a feeding force compensator that is installed separately from a feeding mechanism and is used when accurate positioning is difficult.
一般に摺動体は低速送りにおいても附着すべり
を起こすことなく滑らかに移動し、かつ送り方向
の変動負荷に対しても振動を起こすことなく力学
的に高剛性であることが望まれる。 In general, it is desired that a sliding body move smoothly without causing adhesion slip even during low-speed feeding, and be mechanically highly rigid without causing vibration even under fluctuating loads in the feeding direction.
前者の要望に対しては、案内面に転動体を置く
転り案内、もしくは静圧パツドを有する静圧案内
面が適し、これによつて附着すべりは十分避けら
れる。しかし、後者に対しては、送り方向の変動
負荷がこれらの場合ほとんど直接摺動体駆動系に
作用し、このため吸振効果が極めて劣り、減衰比
の値が実用上0.02ないし0.05の間にあり、動剛性
が極めて不十分である。 For the former requirement, a rolling guide in which rolling elements are placed on the guide surface or a static pressure guide surface having static pressure pads is suitable, whereby sticking and slipping can be sufficiently avoided. However, for the latter, the variable load in the feed direction almost directly acts on the slider drive system in these cases, and therefore the vibration absorption effect is extremely poor, and the value of the damping ratio is practically between 0.02 and 0.05. Dynamic stiffness is extremely inadequate.
これに比べ通常の滑り案内方式においては摺動
体と案内面の間に存在する送り方向の摩擦抵抗の
ため吸振特性にすぐれ、摺動体および駆動系の総
合的動剛性は高く、この場合も前者の要望に対し
ては、摩擦抵抗のもつ非線形特性と駆動系の弾性
変形のため低速送りのときに附着すべりの発生が
避けられない。このような欠点を緩和するため静
止摩擦係数と動摩擦係数の差が比較的小さい高分
子化合物の薄膜が利用され効果を上げているが機
械的強度が弱くかつ精密研削時のといし台送りの
ように微細送りの場合には十分とは言い難い。 In contrast, in a normal sliding guide system, the frictional resistance in the feeding direction that exists between the sliding body and the guide surface has excellent vibration absorption characteristics, and the overall dynamic rigidity of the sliding body and drive system is high. In response to this request, the occurrence of adhesion slippage is unavoidable during low-speed feeding due to the nonlinear characteristics of frictional resistance and the elastic deformation of the drive system. To alleviate these drawbacks, thin films of polymer compounds with a relatively small difference between the coefficient of static friction and the coefficient of kinetic friction have been used and have been effective, but their mechanical strength is weak and they are difficult to use when feeding the wheelhead during precision grinding. It cannot be said that this is sufficient in the case of fine feed.
また前記の方式はいずれも送り方向の負荷によ
つて送り機構に弾性変形が生じ、正確な位置決め
が困難である。 Furthermore, in all of the above methods, elastic deformation occurs in the feeding mechanism due to the load in the feeding direction, making accurate positioning difficult.
本考案は、以上のことに鑑みて考案されたもの
で、送り機構に働く負荷を別の要素によつて支え
駆動系を送りネジと噛合するナツトと摺動体の間
の連結部を静圧結合とし、前記送りネジなど駆動
部の動きが摺動方向のみ効率よく伝達できる構成
とし、更に駆動系に働く負荷を実質的に小さくす
ることによて、駆動系に生じる弾性変形を小さく
し、これによつて附着すべりの発生を抑制し、か
つ摺動抵抗による吸振効果を同時に有することを
特徴とする。すなわち、摺動体送りに伴う負荷を
L、送り機構の送り方向の剛性をZとすると、送
り機構に生じるたわみeはe=L/Zと表わされ
る。ここで、たわみeを小さくするために、これ
まで行なわれてきた剛性Zを大きくする方法のか
わりに、負荷Lを別の手段によつて補償し、送り
機構に加わる実質的な負荷を小さくする方法が考
えられる。これを実現するために、本考案では摺
動面と摺動体との間に発生する摺動抵抗を含む負
荷を送り機構と摺動体を連結する連結部すなわち
静圧カツプリングに装着した力検出器により検出
し、この力にほぼ等しい力で摺動体を送り方向に
押し出し、または引張り送り機構には摺動抵抗を
含む負荷がほとんど加わらない状態で摺動体を送
ることによつて、附着すべりの発生と送り機構の
弾性変形を防止し極めて低速の送り運動が高精密
に行ないうるようにしたものである。 The present invention was devised in view of the above, and the load acting on the feed mechanism is supported by another element, and the drive system is connected by static pressure to the connection between the nut that engages with the feed screw and the sliding body. The structure is such that the movement of the drive unit such as the feed screw can be efficiently transmitted only in the sliding direction, and by substantially reducing the load acting on the drive system, the elastic deformation occurring in the drive system is reduced. It is characterized in that it suppresses the occurrence of adhesion slippage and at the same time has a vibration absorbing effect due to sliding resistance. That is, when the load accompanying the sliding body feeding is L and the rigidity of the feeding mechanism in the feeding direction is Z, the deflection e generated in the feeding mechanism is expressed as e=L/Z. Here, in order to reduce the deflection e, instead of increasing the rigidity Z, which has been done so far, the load L is compensated for by another means to reduce the actual load applied to the feed mechanism. There are possible ways. In order to achieve this, in the present invention, the load including sliding resistance generated between the sliding surface and the sliding body is detected by a force detector attached to the coupling part that connects the feeding mechanism and the sliding body, that is, the static pressure coupling. By detecting this force and pushing the sliding body in the feeding direction with a force approximately equal to this force, or by feeding the sliding body with almost no load, including sliding resistance, applied to the tension feeding mechanism, it is possible to prevent the occurrence of adhesion slipping. This prevents elastic deformation of the feed mechanism and allows extremely low speed feed movement to be performed with high precision.
以下本考案を図面に基づき説明する。 The present invention will be explained below based on the drawings.
第1図は本考案の一実施例を示すものであり、
負荷補償式摺動体の力供給装置を摺動案内面に沿
つて摺動体が摺動する送り機構に装置した場合を
示しており、1は機械本体の摺動案内面で、2は
摺動体である。送り駆動機構は、モータ3、送り
ネジ4、送りナツト8及び摺動体2に固定された
送りスタツト85から構成された静圧結合部より
なつている。すなわち、機械本体に固定したブラ
ケツト6,7によつて送りネジ4および案内棒5
を保持し送りネジ4をモータ3によて回転駆動す
る。送りネジ4と噛合し、かつ案内棒5に沿つて
摺動する送りナツト8は、摺動体2に固定した送
りスタツド85とこれに設けた静圧支持のポケツ
ト81,82を介して対向する。静圧ポケツト8
1,82に装着した力検出器83,84は摺動体
の移動によつて生じる送りの負荷を検出し、電気
信号に変換する。差動増巾器91は力検出器8
3,84の電気信号を差動増巾し、負荷に比例し
た電気信号を出力する。直流増巾器92は、差動
増巾器91の出力信号を増巾して負荷に比例する
電流信号に変換増巾して負荷に比例する電流信号
に変換増巾し、サーボ弁10を駆動する。 FIG. 1 shows an embodiment of the present invention.
The figure shows a case in which a load compensation type force supply device for a sliding body is installed in a feed mechanism in which the sliding body slides along a sliding guide surface, where 1 is the sliding guide surface of the machine body, and 2 is the sliding body. be. The feed drive mechanism consists of a hydrostatic coupling consisting of a motor 3, a feed screw 4, a feed nut 8 and a feed stud 85 fixed to the slide 2. That is, the feed screw 4 and the guide rod 5 are connected by brackets 6 and 7 fixed to the machine body.
is held and the feed screw 4 is rotationally driven by the motor 3. A feed nut 8 that meshes with the feed screw 4 and slides along the guide rod 5 faces a feed stud 85 fixed to the sliding body 2 via hydrostatic support pockets 81 and 82 provided therein. Static pressure pocket 8
Force detectors 83 and 84 attached to the sliders 1 and 82 detect the feed load caused by the movement of the sliding body and convert it into an electrical signal. The differential amplifier 91 is the force detector 8
3 and 84 electrical signals are differentially amplified and an electrical signal proportional to the load is output. The DC amplifier 92 amplifies the output signal of the differential amplifier 91, converts it into a current signal proportional to the load, amplifies it, converts it into a current signal proportional to the load, and drives the servo valve 10. do.
摺動体の力供給装置本体11は、本実施例では
連結具14によりその先端を摺動体2に連結し、
かつロードセル13を中間に持つピストン12を
静圧支持して摩擦を減らした油圧アクチエータで
サーボ弁10により駆動され、負荷に比例した力
を摺動体2に加える。 In this embodiment, the force supply device main body 11 of the sliding body has its tip connected to the sliding body 2 by a connecting tool 14,
A hydraulic actuator statically supports a piston 12 with a load cell 13 in the middle to reduce friction, and is driven by a servo valve 10 to apply a force to the sliding body 2 in proportion to the load.
コードセル13の出力は直流増幅器によつて増
幅し、直流増幅器92に加えられ、送り力供給装
置の特性を補償する。 The output of the code cell 13 is amplified by a DC amplifier and applied to a DC amplifier 92 to compensate for the characteristics of the feed force supply device.
次に本考案の作用について説明する。 Next, the operation of the present invention will be explained.
モータ3によつて送りネジ4を回転駆動し、送
りナツト8を送ると、摺動体2に固着した送りス
タツド85とナツト送8の間に摺動体2の摺動力
に必要な負荷が加わり、対向する静圧ポケツト8
1,82の一方の圧力が増加し、他方が減少す
る。 When the feed screw 4 is rotationally driven by the motor 3 and the feed nut 8 is fed, a load necessary for the sliding force of the slide body 2 is applied between the feed stud 85 fixed to the slide body 2 and the nut feed 8, and the opposing Static pressure pocket 8
1,82, the pressure of one increases and the other decreases.
この圧力変化を力検出器83,84によりそれ
ぞれ検出し、これを電気信号として取り出し差動
増幅91によつて相互に減算を行なうこにより、
負荷に比例した電気信号が得られる。 This pressure change is detected by force detectors 83 and 84, respectively, and is extracted as an electric signal and subtracted from each other by differential amplifier 91.
An electrical signal proportional to the load can be obtained.
この信号を直流増幅器92でさらに増幅した
後、サーボ弁10により油圧アクチユエータ11
を駆動し、ピストン12の先端の連結具14に
て、摺動体2に送り方向の力を供給する。 After this signal is further amplified by the DC amplifier 92, the hydraulic actuator 11 is activated by the servo valve 10.
The connector 14 at the tip of the piston 12 supplies the sliding body 2 with a force in the feeding direction.
本考案では、摺動体2の摺動に伴う負荷が送り
ナツト8に装着した静圧ポケツト81,82の圧
力変化から電気信号に変換され、この電気信号に
よつてサーボ弁10を介して油圧アクチユエータ
11を駆動しているので、上記送り機構に加わつ
た負荷が補償されるまで油圧アクチユエータ11
が駆動される。 In the present invention, the load accompanying the sliding of the sliding body 2 is converted into an electric signal from pressure changes in the static pressure pockets 81 and 82 attached to the feed nut 8, and this electric signal is used to control the hydraulic actuator via the servo valve 10. 11, the hydraulic actuator 11 is driven until the load applied to the feed mechanism is compensated for.
is driven.
すなわち、油圧アクチユエータ11は、摺動体
2の送り力に比例した信号に従つて送りナツト8
とスタツド85の間に動く力がほぼ零となるまで
テーブル2に送り力を供給し、摺動体2の送り機
構に動く負荷を補償する。 That is, the hydraulic actuator 11 moves the feed nut 8 in accordance with a signal proportional to the feed force of the sliding body 2.
A feeding force is supplied to the table 2 until the force moving between the stud 85 and the stud 85 becomes almost zero, thereby compensating for the load moving on the feeding mechanism of the sliding body 2.
第2図は、本実施例の力および信号の流れを示
したブロツク線図である。 FIG. 2 is a block diagram showing the force and signal flows of this embodiment.
図中a,b,c,gは力の流れを示し、d,
e,fは電気信号の流れを示す。 In the figure, a, b, c, g indicate the flow of force, d,
e and f indicate the flow of electrical signals.
本考案の実施例は、水平面内における摺動体の
摺動面案内送り方式に関して述べているが、垂直
面あるいは傾斜面内にあるコラムの送りの場合の
ように、摺動体の自重あるいはその一部が駆動系
に負荷として加わる場合にも同様の負荷補償の効
果が得られ、摺動体の低速で附着すべりのない滑
らかな送り運動と、位置決め精度の向上が期待で
きる。 The embodiment of the present invention describes a sliding surface guided feeding method of a sliding body in a horizontal plane, but as in the case of column feeding in a vertical plane or an inclined plane, the self-weight of the sliding body or a part thereof A similar load compensation effect can be obtained even when a load is applied to the drive system, and it is expected that the sliding body will be able to move smoothly at low speed without sticking and slipping, and improve positioning accuracy.
以上のごとく、本考案を摺動体送り機構に採用
することにより、モータ−送りネジ−送りナツト
系には送り負荷−たとえば摺動抵抗および切削力
など−はほとんどかわらない状態となりモータ−
送りネジ−送りナツト系は、テーブルの位置を決
める機能のみを果すことになる。 As described above, by adopting the present invention in the sliding body feeding mechanism, the feeding loads such as sliding resistance and cutting force in the motor-feed screw-feed nut system remain almost unchanged, and the motor
The lead screw-lead nut system will only serve the function of determining the position of the table.
すなわち、従来の摺動体送り機構においては摺
動体の位置を決定する機能と、送りに伴う負荷を
支える機能と同時に有しているのに対して、これ
ら2つの機能が完全に分離されることになり、大
きな負荷の下でも高い精度で摺動体の位置を設定
することができる。 In other words, whereas conventional sliding body feeding mechanisms simultaneously have the function of determining the position of the sliding body and the function of supporting the load associated with feeding, these two functions are completely separated. Therefore, the position of the sliding body can be set with high accuracy even under heavy loads.
また従来、摺動抵抗の非線形特性に基因する滑
り案内機構に関するトラブルとしてあげられた技
術的問題の多くが解決できる。 Furthermore, many of the technical problems that have conventionally been raised as troubles related to sliding guide mechanisms caused by nonlinear characteristics of sliding resistance can be solved.
さらに、本考案によれば、駆動系とくに送りネ
ジに加わ力が零となるように制御する力制御系で
あるので、送りネジ、送りナツトなど駆動系に生
じるたわみは、補償されずに残存した負荷に対応
する量となり、摺動体駆動点における等価剛性は
著しく向上し、かつまた送りネジおよび送りナツ
トに加わる負荷は、補償されずに残留した微小な
負荷となるので、それらの負荷能力は従来のもの
に比べてはるかに小さいもので十分であり、した
がつて微細なピツチの送りネジの利用が可能で、
高精密微細送りができ、非常に有効である。 Furthermore, according to the present invention, since the force control system is controlled so that the force applied to the drive system, especially the feed screw, becomes zero, the deflection that occurs in the drive system such as the feed screw and feed nut remains uncompensated. The amount corresponds to the load, and the equivalent stiffness at the sliding body drive point is significantly improved.Also, the load applied to the feed screw and feed nut is a minute load that remains uncompensated, so their load capacity is lower than before. It is sufficient to use a lead screw that is much smaller than the conventional one, so it is possible to use a lead screw with a fine pitch.
It is capable of high-precision fine feeding and is extremely effective.
第1図は、摺動案内面に沿つて摺動体が摺動す
る送り機構に、本考案を取り付けた状態を示す
図。第2図は、第1図に示しした実施例において
力および電気信号の流れを示したブロツク線図で
ある。
8……送りナツト、81,82……静圧ポケツ
ト、83,84……力検出器、85……送りスタ
ツド。
FIG. 1 is a diagram showing the present invention attached to a feeding mechanism in which a sliding body slides along a sliding guide surface. FIG. 2 is a block diagram showing the flow of forces and electrical signals in the embodiment shown in FIG. 8... Feed nut, 81, 82... Static pressure pocket, 83, 84... Force detector, 85... Feed stud.
Claims (1)
前記摺動体とを連結する静圧結合部と、前記静圧
結合部に内装され前記送り機構と摺動体との間に
動く送り方向の力を前記静圧結合部の圧力変化と
して検出し電気信号に変換し検出信号を出力する
力検出器と、該送り機構とは独立し、前記検出信
号によつて動作し、前記摺動体を送り方向に押動
する力供給装置とを備え、該力供給装置は前記検
出信号に比例した押動力を前記摺動体に供給する
ことを特徴とする負荷補償式摺動体の力供給装
置。 a static pressure coupling part that connects a feeding mechanism that defines the position of the sliding body and the sliding body; A force detector that detects a pressure change in the static pressure joint, converts it into an electric signal, and outputs a detection signal, and the feed mechanism are independent of each other, and operate based on the detection signal to move the sliding body in the feeding direction. A force supply device for a load-compensated sliding body, characterized in that the force supply device supplies a pushing force proportional to the detection signal to the sliding body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5116085U JPS619228U (en) | 1985-04-04 | 1985-04-04 | Load compensation type sliding body force supply device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5116085U JPS619228U (en) | 1985-04-04 | 1985-04-04 | Load compensation type sliding body force supply device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS619228U JPS619228U (en) | 1986-01-20 |
JPS6131793Y2 true JPS6131793Y2 (en) | 1986-09-16 |
Family
ID=30569952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5116085U Granted JPS619228U (en) | 1985-04-04 | 1985-04-04 | Load compensation type sliding body force supply device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS619228U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9383045B2 (en) | 2007-07-16 | 2016-07-05 | Tenaris Connections Limited | Threaded joint with resilient seal ring |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60155756U (en) * | 1984-03-26 | 1985-10-17 | アイシン精機株式会社 | Burner cone of combustor for Stirling engine |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3244029A (en) * | 1964-02-28 | 1966-04-05 | Heald Machine Co | Machine tool |
-
1985
- 1985-04-04 JP JP5116085U patent/JPS619228U/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3244029A (en) * | 1964-02-28 | 1966-04-05 | Heald Machine Co | Machine tool |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9383045B2 (en) | 2007-07-16 | 2016-07-05 | Tenaris Connections Limited | Threaded joint with resilient seal ring |
Also Published As
Publication number | Publication date |
---|---|
JPS619228U (en) | 1986-01-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6295866B1 (en) | Surface-tracking measuring machine | |
US4669359A (en) | Positioning system | |
US4417843A (en) | Waysless machine tool table | |
US20150127133A1 (en) | Planar Positioning System And Method Of Using The Same | |
JPH06183561A (en) | Moving stage device | |
CN102435434A (en) | Device and method used for measuring axial and radial rigidity of magnetic suspension bearing | |
US5257461A (en) | Coordinate measuring machine construction | |
JPS58196970A (en) | Grinder | |
JP4600664B2 (en) | Roll gap adjustment device | |
JPS6131793Y2 (en) | ||
JP4913543B2 (en) | Pressurizing device | |
KR20040110244A (en) | apparatus for measuring of pushing force for a vehicle pedal | |
JPS62241629A (en) | Complex guide mechanism | |
JP2747254B2 (en) | Fluid bearing device | |
JPH0230212Y2 (en) | ||
JPS6357644B2 (en) | ||
JPH0618751Y2 (en) | Machine sliding surface load compensator | |
SU568500A1 (en) | Device for measuring movement of cutter relative to bed | |
JPH0639042B2 (en) | Table drive | |
JPS586162B2 (en) | Micro positioning device | |
JP2679015B2 (en) | XY stage | |
JPH09317767A (en) | Positioning device | |
CN112173165A (en) | Linear force loading system redundant force compensation control device and compensation control method | |
JPH09248742A (en) | Rigidity compensating device of structure | |
SU991671A1 (en) | Precision bed |