JPS6130070U - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPS6130070U JPS6130070U JP11114384U JP11114384U JPS6130070U JP S6130070 U JPS6130070 U JP S6130070U JP 11114384 U JP11114384 U JP 11114384U JP 11114384 U JP11114384 U JP 11114384U JP S6130070 U JPS6130070 U JP S6130070U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- vapor deposition
- vacuum deposition
- storage part
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title 1
- 239000000463 material Substances 0.000 claims description 8
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11114384U JPS6130070U (ja) | 1984-07-24 | 1984-07-24 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11114384U JPS6130070U (ja) | 1984-07-24 | 1984-07-24 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6130070U true JPS6130070U (ja) | 1986-02-22 |
| JPH0241165Y2 JPH0241165Y2 (OSRAM) | 1990-11-01 |
Family
ID=30670252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11114384U Granted JPS6130070U (ja) | 1984-07-24 | 1984-07-24 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130070U (OSRAM) |
-
1984
- 1984-07-24 JP JP11114384U patent/JPS6130070U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241165Y2 (OSRAM) | 1990-11-01 |
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