JPS6129469Y2 - - Google Patents
Info
- Publication number
- JPS6129469Y2 JPS6129469Y2 JP1981128670U JP12867081U JPS6129469Y2 JP S6129469 Y2 JPS6129469 Y2 JP S6129469Y2 JP 1981128670 U JP1981128670 U JP 1981128670U JP 12867081 U JP12867081 U JP 12867081U JP S6129469 Y2 JPS6129469 Y2 JP S6129469Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- ammonia
- solution
- container
- volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 19
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 14
- 239000007789 gas Substances 0.000 description 13
- 239000000243 solution Substances 0.000 description 12
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 9
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 9
- 235000011114 ammonium hydroxide Nutrition 0.000 description 9
- 229910021529 ammonia Inorganic materials 0.000 description 6
- 235000019645 odor Nutrition 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000013329 compounding Methods 0.000 description 3
- 230000005587 bubbling Effects 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002912 waste gas Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Accessories For Mixers (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Mixers With Rotating Receptacles And Mixers With Vibration Mechanisms (AREA)
Description
【考案の詳細な説明】
本考案は薬品溶液の簡便な調合装置に関する。
周知のように、化学反応用劇薬例えば塩酸・アン
モニアなどの薬品溶液は刺激臭が強く、これらの
試薬瓶を室内に搬入する際や所望濃度の薬品溶液
を調合する際に、臭気を周囲にまきちらして甚だ
取り扱いが難儀であり、人体への悪影響も大き
い。例えば、微細な半導体製品などの電子部品を
製造する場合に、洗浄処理などのためこれらの薬
品溶液を稀釈して使用することがあるが、その
際、化学処理フードまでの試薬瓶の搬入、フード
内での調合で周囲に著しく臭気を発散する。この
ような臭気の発散は即ち室内空気の汚染であり、
これは人体に害を与えるだけでなく、製品を傷つ
けることにもなる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a simple preparation device for drug solutions.
As is well known, chemical solutions such as powerful chemicals for chemical reactions, such as hydrochloric acid and ammonia, have strong irritating odors, and when transporting these reagent bottles into a room or preparing a chemical solution with a desired concentration, it is necessary to spread the odor into the surrounding area. It is extremely difficult to handle and has a great negative impact on the human body. For example, when manufacturing microscopic electronic components such as semiconductor products, these chemical solutions may be diluted for cleaning purposes. When mixed inside, it emits a significant odor to the surrounding area. The emission of such odors is the contamination of indoor air.
This not only harms the human body, but also damages the product.
本考案はかような問題点を解消し、できる限り
有害なガスの発散を抑制することを目的として、
その特徴は内容積を表示した透明容器内に、化学
反応ガスをバブルさせる構造として、体積増加量
を基準にした所望濃度の薬品溶液を作成する調合
装置を提案するものである。 This invention aims to solve these problems and suppress the emission of harmful gases as much as possible.
Its feature is that it proposes a compounding device that creates a chemical solution with a desired concentration based on the amount of increase in volume by bubbling chemically reactive gas in a transparent container whose internal volume is displayed.
以下、実施例を参照して詳細に説明すると、例
えばアンモニア溶液は屋外より室内の化学処理フ
ードまでアンモニアガスの配管を引き込み、フー
ド内で水にバブルさせ、バブルしたガスは再び配
管により廃ガス処理塔に送る。このようにする
と、室内でのアンモニアガスの発散は殆んどなく
なる。そのために、実験により確認した20℃にお
ける溶液の体積とアンモニア濃度との関係図表を
第1図に示す。このように、規定(N)濃度と体
積とは比例するから、透明容器に目盛を入れて、
それを濃度の目安とするもので、第2図に調合装
置の一実施例を示す。 Hereinafter, a detailed explanation will be given with reference to an example. For example, an ammonia solution is prepared by leading ammonia gas piping from outdoors to an indoor chemical processing hood, making it bubble in water in the hood, and then returning the bubbled gas to the piping for waste gas treatment. Send to the tower. In this way, the emission of ammonia gas inside the room is almost eliminated. For this purpose, a diagram showing the relationship between the volume of the solution and the ammonia concentration at 20°C, which was confirmed through experiments, is shown in Figure 1. In this way, since the specified (N) concentration and volume are proportional, put a scale on the transparent container,
This is used as a standard for the concentration, and FIG. 2 shows an embodiment of the blending device.
図は内容積3程度の透明石英容器1に目盛を
入れ、アンモニア(NH3)ガスは電磁弁2、ガス
フイルタ3、流量計4、ニードル調整弁5を設け
たガス供給管を通して、石英容器1内の水(例え
ば純水)にバブルさせる。水に吸収されなかつた
ガスはガス放出管7より屋外の廃ガス処理塔に放
出され、又石英容器1全体はアンモニアの吸収反
応熱を冷却させるため、二重管8構造として容器
を絶えず冷却している。バブルさせるアンモニア
ガスは屋外のボンベ又はタンクから配管して電磁
弁と連結しており、又石英容器1より所望濃度の
アンモニア溶液を取り出す場合は電磁弁9を開い
て取り出す。10は水注入用電磁弁で、アンモニ
アガスをバブルさせる前に、容器1内に一定量を
流入させる。そして、例えば3Nのアンモニア溶
液を作成するには、流入させた水にアンモニアガ
スをバブルして、約110%の体積に増加すればバ
ブルを中止し、そのまゝ3Nのアンモニア溶液を
石英容器1内に保有する。容器内のアンモニア溶
液をすべて使用し終えると再び水を流入して、同
様にして所望濃度のアンモニア溶液の作成を繰り
返えす。 The figure shows a transparent quartz container 1 with an internal volume of about 3. Ammonia (NH 3 ) gas is fed into the quartz container 1 through a gas supply pipe equipped with a solenoid valve 2, a gas filter 3, a flow meter 4, and a needle adjustment valve 5. bubbles in water (e.g. pure water). The gas that is not absorbed by the water is discharged from the gas discharge pipe 7 to the outdoor waste gas treatment tower, and the entire quartz container 1 has a double-pipe structure 8 to cool the ammonia absorption reaction heat, so that the container is constantly cooled. ing. The ammonia gas to be bubbled is piped from an outdoor cylinder or tank and connected to a solenoid valve, and when an ammonia solution of a desired concentration is taken out from the quartz container 1, the solenoid valve 9 is opened and taken out. Reference numeral 10 denotes a solenoid valve for water injection, which allows a certain amount of ammonia gas to flow into the container 1 before it is bubbled. For example, to create a 3N ammonia solution, bubble ammonia gas into the inflowing water, stop the bubbling when the volume increases to about 110%, and pour the 3N ammonia solution into a quartz container. to be held within. When all the ammonia solution in the container is used up, water is poured in again and the ammonia solution of the desired concentration can be prepared in the same way.
このようにすれば、流入するアンモニアガスも
放出ガスも共に、室内に発散することがなくな
り、使用するアンモニア溶液が3N程度と稀薄で
あればたとえフード内に取り出してもアンモニア
ガスの揮散量は少ない。従来、15Nのアンモニア
試薬瓶の蓋を開いて、強烈な臭気を発散させ、調
合していた状態に比べ、著しく改善される。 In this way, neither the inflowing ammonia gas nor the emitted gas will escape into the room, and if the ammonia solution used is as dilute as 3N, the amount of ammonia gas volatilized will be small even if taken out in the hood. . This is a significant improvement over the conventional method of dispensing a 15N ammonia reagent bottle by opening its lid and emitting a strong odor.
以上はアンモニア溶液の作成を説明したが、塩
酸溶液も同様の調合装置によつて作成することが
できる。塩酸溶液から発散する塩化水素も刺激臭
でしかも有害であるが、これを稀釈して酸洗い用
として良く用いられる。第3図は実験により確認
した20℃における溶液の体積と塩酸濃度との関係
図表で、図のように規定(N)濃度と体積とは比
例するから、アンモニア溶液と同様に第2図に示
す調合装置に目盛を入れ、稀釈した2〜3Nの塩
酸溶液を室内に塩化水素を多量に発散することな
く、作成することができる。又、第2図に示す調
合装置は液面センサを設け、水やガスの流入・停
止を自動的に電磁弁で行うことができるので、そ
うすれば省力化された装置となり一層好都合であ
る。 Although the preparation of an ammonia solution has been described above, a hydrochloric acid solution can also be prepared using a similar mixing device. Hydrogen chloride emitted from a hydrochloric acid solution has a pungent odor and is also harmful, but it is often diluted and used for pickling. Figure 3 is a diagram of the relationship between the volume of the solution and the concentration of hydrochloric acid at 20°C, which was confirmed through experiments.As shown in the figure, the specified (N) concentration and volume are proportional, so the diagram is shown in Figure 2 in the same way as for the ammonia solution. By setting a scale on the compounding device, a diluted 2-3N hydrochloric acid solution can be prepared without emitting a large amount of hydrogen chloride into the room. Furthermore, the blending device shown in FIG. 2 is equipped with a liquid level sensor, and the inflow and stop of water and gas can be automatically performed using a solenoid valve, which makes the device more convenient and labor-saving.
こにように、本考案は化学処理室内の空気を清
浄に保てる極めて有効な調合装置で、その効果は
著しい。 As described above, the present invention is an extremely effective compounding device that can keep the air in the chemical processing chamber clean, and its effects are remarkable.
第1図は溶液の体積とアンモニア濃度との関係
図表、第2図は本考案にかゝる調合装置の一実施
例、第3図は溶液の体積と塩酸濃度との関係図表
である。図中、1は透明石英容器、2は電磁弁、
3はガスフイルタ、4は流量計、5はニードル調
整弁、6はガス供給管、7はガス放出管、8は水
冷用二重管、9は電磁弁、10は注水用電磁弁を
示す。
FIG. 1 is a diagram showing the relationship between the volume of the solution and the concentration of ammonia, FIG. 2 is a diagram showing the relationship between the volume of the solution and the concentration of hydrochloric acid. In the figure, 1 is a transparent quartz container, 2 is a solenoid valve,
3 is a gas filter, 4 is a flow meter, 5 is a needle adjustment valve, 6 is a gas supply pipe, 7 is a gas discharge pipe, 8 is a double pipe for water cooling, 9 is a solenoid valve, and 10 is a water injection solenoid valve.
Claims (1)
をバブルさせる構造とし、透明容器内に水を注入
し、ガス供給管から化学反応ガスを噴射して、該
容器内の体積増加量を基準とした所望濃度の薬品
溶液を作成することを特徴とする薬品溶液の調合
装置。 A chemically reactive gas is bubbled inside a transparent container whose internal volume is displayed, water is injected into the transparent container, and a chemically reactive gas is injected from a gas supply pipe, and the volume increase inside the container is measured as a standard. A chemical solution mixing device characterized in that it creates a chemical solution with a desired concentration.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981128670U JPS5835923U (en) | 1981-08-28 | 1981-08-28 | Chemical solution mixing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981128670U JPS5835923U (en) | 1981-08-28 | 1981-08-28 | Chemical solution mixing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5835923U JPS5835923U (en) | 1983-03-09 |
JPS6129469Y2 true JPS6129469Y2 (en) | 1986-08-30 |
Family
ID=29922358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1981128670U Granted JPS5835923U (en) | 1981-08-28 | 1981-08-28 | Chemical solution mixing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5835923U (en) |
-
1981
- 1981-08-28 JP JP1981128670U patent/JPS5835923U/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5835923U (en) | 1983-03-09 |
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