JPS61290407A - Formation of color filter - Google Patents

Formation of color filter

Info

Publication number
JPS61290407A
JPS61290407A JP60132350A JP13235085A JPS61290407A JP S61290407 A JPS61290407 A JP S61290407A JP 60132350 A JP60132350 A JP 60132350A JP 13235085 A JP13235085 A JP 13235085A JP S61290407 A JPS61290407 A JP S61290407A
Authority
JP
Japan
Prior art keywords
dyed
film
dyeing
parts
color filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60132350A
Other languages
Japanese (ja)
Inventor
Norihisa Mino
美濃 則央
Yoshimitsu Hiroshima
広島 義光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP60132350A priority Critical patent/JPS61290407A/en
Publication of JPS61290407A publication Critical patent/JPS61290407A/en
Pending legal-status Critical Current

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  • Optical Filters (AREA)

Abstract

PURPOSE:To obtain a color filter which is free from uneven film thickness and uneven dyeing by controlling the quantity of the light to be exposed to a photosensitive film formed by mixing a Cr compd. which accelerates crosslinking reaction by exposing to protein in which the crosslinking position and dye fixing seat are common thereby forming dyed and non-dyed regions. CONSTITUTION:A liquid of casein provided with photosensitivity is coated on a transparent substrate 10 and is dried to form the photosensitive film 11 having 1mum thickness. The film is subjected to full-surface exposing for several seconds along and is then selectively exposed for several tens second by using such a photomask 13 which does not expose the parts 12 necessary for dyeing to form the parts which are not dyed. The film is developed, washed and dried and is then dyed by using an acid dye. The dyed film is coated with a transparent intermediate layer 15. Parts 16 required for the 2nd color and unnecessary parts 17 are similarly formed and are dyed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、カラーフィルタの形成方法に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of forming a color filter.

従来の技術 従来のカラーフィルタの形成方法は、例えば特公昭62
−17375号公報に記載されるような形成方法が広く
採用されている。
2. Description of the Related Art Conventional methods for forming color filters are known, for example, from Japanese Patent Publication No. 62
A forming method such as that described in Japanese Patent No. 17375 is widely adopted.

以下に、図面を参照しながらこの従来のカラーフィルタ
の形成方法について説明する。第2図は従来の形成方法
により作成されたカラーフィルタの断面図である。ガラ
ス基板1上にカゼイン、ゼラチンなどに感光性を付与し
た感光液を均一に塗布乾燥させ染色性の感光膜を形成す
る。その後マスク露光法で染色しようとする部分2だけ
光硬化させ、現像により不必要な部分を除去する。次に
所定の第1色目の分光特性を有する染料で上記部分2を
染色する。染色の終えた後、透明な中間層3で被覆する
。次に、この中間層3の上に前記と同様に染色性感光膜
を形成し、前記と同じ方法により第2の色に染色された
部分4を形成する。そしてよシ多色が必要であれば上記
工程を繰り返す。
The conventional method for forming a color filter will be described below with reference to the drawings. FIG. 2 is a cross-sectional view of a color filter made by a conventional forming method. A photosensitive liquid made of casein, gelatin, etc. imparted with photosensitivity is uniformly applied onto a glass substrate 1 and dried to form a dyeable photosensitive film. Thereafter, only the portion 2 to be dyed is photocured using a mask exposure method, and unnecessary portions are removed by development. Next, the portion 2 is dyed with a dye having spectral characteristics of a predetermined first color. After dyeing is finished, it is covered with a transparent intermediate layer 3. Next, a dyeable photoresist film is formed on this intermediate layer 3 in the same manner as described above, and a portion 4 dyed in the second color is formed in the same manner as described above. If more colors are needed, repeat the above process.

そして、最後に透明な保護膜6を形成する。Finally, a transparent protective film 6 is formed.

発明が解決しようとする問題点 しかしながら、上記のような構成では、染色部分2とガ
ラス基板1との段差の影響により、上に形成する中間層
3、およびその上に形成する。染色性感光膜の膜厚が部
分的に変化することがあった。そしてとくに、感光膜の
膜厚の変化は、その後の染色の際に染色ムラを起こすと
いう問題点を有していた。
Problems to be Solved by the Invention However, in the above configuration, due to the influence of the difference in level between the dyed portion 2 and the glass substrate 1, the intermediate layer 3 formed thereon and the intermediate layer 3 formed thereon. The thickness of the dyeable photoresist film sometimes changed partially. In particular, changes in the thickness of the photoresist film have the problem of causing uneven dyeing during subsequent dyeing.

本発明はこれらの問題点を解決するためになされたもの
で、各感光膜層を平担に形成することにより、カラーフ
ィルタの染色ムラを完全に無くすことのできるカラーフ
ィルタの形成方法を提供するものである。
The present invention has been made to solve these problems, and provides a method for forming a color filter that can completely eliminate uneven dyeing of the color filter by forming each photoresist film layer flatly. It is something.

問題点を解決するだめの手段 上記目的を達成するために、本発明のカラーフィルタの
形成方法は、架橋部位と染料の染着座席とが共通である
タンパク質に、露光により架橋反応を促進させるクロム
化合物を混合してなる感光膜に、露光する光量を調節し
て染料により染色される領域と、染色されない領域とを
形成してなる。
Means for Solving the Problems In order to achieve the above object, the method for forming a color filter of the present invention involves adding chromium to a protein that has a common crosslinking site and a dye staining site by exposing it to chromium to promote the crosslinking reaction. A photoresist film made by mixing compounds is formed by controlling the amount of light to be exposed to form areas that are dyed with a dye and areas that are not dyed.

作用 カラーフィルタに用いる染色性を有する感光膜にはまた
とえばゼラチン、カゼインなどのタンパク質が用いられ
、光硬化性を付与するためにクロム化合物が用いられる
。クロム化合物中のクロムは、光照射により Dr (
Vl)がCraD)に還元されるとNH基、C0NH基
に配位結合し、架橋反応を促進する。また、染料の染着
座席はNH基又はC0NH基である。すなわち、架橋部
位と染色部位とが共通である。したがって、架橋剤のク
ロムとNH基又はC0NH基の割合を適切にし、光量を
適切にすることによって、架橋反応と染色反応とをコン
トロールすることができる。
Function: Proteins such as gelatin and casein are used as fillers in the dyeable photosensitive film used in color filters, and chromium compounds are used to impart photocurability. Chromium in a chromium compound becomes Dr (
When Vl) is reduced to CraD), it coordinates with the NH group and CONH group, promoting the crosslinking reaction. Moreover, the dyeing site of the dye is an NH group or a C0NH group. That is, the crosslinking site and the staining site are common. Therefore, the crosslinking reaction and the dyeing reaction can be controlled by making the ratio of chromium and NH group or CONH group of the crosslinking agent appropriate and by making the amount of light appropriate.

実施例 以下に本発明の一実施例について図面を参照しながら説
明する。
EXAMPLE An example of the present invention will be described below with reference to the drawings.

第1図は、本発明の一実施例のカラーフィルタの形成方
法を段階的に示すものである。透明基板10上に、カゼ
イン2rsgに20 wt%重クロム酸アンモニウム水
溶液を6cc添加したものを塗布、乾燥し、膜厚1μm
の感光膜11を形成する。
FIG. 1 shows step-by-step a method for forming a color filter according to an embodiment of the present invention. A mixture of 2rsg of casein and 6cc of 20 wt% ammonium dichromate aqueous solution was applied onto the transparent substrate 10 and dried to form a film with a thickness of 1 μm.
A photoresist film 11 is formed.

これを露光装置を用いて数秒間、全面にわたり露光を施
す。(第1図(&) ) 次に、染色の必要な部分12を露光しないようなフォト
マスク13を用いて、数十秒間、選択露光し、染色され
ない部分14を作る。(第1図(b))上記の処理を施
した感光膜を現像、洗浄し、乾燥させて成膜する。その
のち、酸性染料を用いて染色を施す。シアンを染色した
場合、図中12に示す部分が、所定の分光特性を示すが
、14に示す部分では染色は行わず、入射光の全波長域
において透過率86%以上であシ、はとんどシアンの吸
収を示さない。(第1図(C)) 染色後、透明な中間層15で被覆し、同様の処理によっ
て第2色目の必要な部分16、必要でない部分17を形
成し、染色を施す。(第1図(d))なお、本発明はカ
ゼインを用いたが、他のタンパク質たとえばゼラチンで
あってもよい。また透明な中間層も染色がなされない露
光条件で形成されたカゼイン等であってもよい。
This is exposed over the entire surface for several seconds using an exposure device. (FIG. 1(&)) Next, using a photomask 13 that does not expose the portion 12 that requires dyeing, selective exposure is performed for several tens of seconds to create a portion 14 that will not be dyed. (FIG. 1(b)) The photoresist film subjected to the above treatment is developed, washed, and dried to form a film. After that, dyeing is performed using an acid dye. When cyan is dyed, the part shown at 12 in the figure shows predetermined spectral characteristics, but the part shown at 14 is not dyed and has a transmittance of 86% or more in the entire wavelength range of the incident light. Does not exhibit cyan absorption. (FIG. 1(C)) After dyeing, it is covered with a transparent intermediate layer 15, and the necessary portions 16 and unnecessary portions 17 of the second color are formed by the same process, and dyeing is applied. (FIG. 1(d)) Although casein is used in the present invention, other proteins such as gelatin may be used. Further, the transparent intermediate layer may also be made of casein or the like formed under exposure conditions that do not cause dyeing.

また、本実施例においては、感光膜を露光する光量の調
節を2回の露光に分けることにより行っているが、光量
の調節はこれに限られるものではなく、たとえば透過光
量に部分的に差のあるマスクを用いることにより一度の
露光によって染色される領域とされない領域とを形成す
ることが可能であることはいうまでもない。
Furthermore, in this embodiment, the amount of light that exposes the photoresist film is adjusted by dividing the exposure into two exposures, but the adjustment of the amount of light is not limited to this. For example, there may be a partial difference in the amount of transmitted light. It goes without saying that by using a certain mask, it is possible to form regions that will be dyed and regions that will not be dyed in a single exposure.

発明の効果 以上のように、本発明の方法により膜厚ムラの全くない
、また染色ムラの全くないカラーフィルタが形成でき、
その効果は大なるものがある。
Effects of the Invention As described above, the method of the present invention makes it possible to form color filters with no uneven film thickness and no uneven dyeing.
The effect is great.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例におけるカラーフィルタの形
成方法を段階的に示した断面図、第2図は従来のカラー
フィルタの断面図である。 10・・・・・・透明基板、11・・・・・・感光膜、
12゜16・・・・・・染色の必要な部分、13・・・
・・・フォトマスク、14.17・・・・・・染色の必
要でない部分、16・・・・・・中間層。
FIG. 1 is a sectional view showing step-by-step a method of forming a color filter according to an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional color filter. 10...Transparent substrate, 11...Photoresist film,
12゜16... Parts that require dyeing, 13...
... Photomask, 14.17 ... Part that does not require dyeing, 16 ... Intermediate layer.

Claims (2)

【特許請求の範囲】[Claims] (1)架橋部位と染料の染着座席とが共通であるタンパ
ク質に、露光により架橋反応を促進させるクロム化合物
を混合してなる感光膜に露光する光量を調節することに
より染料により染色される領域と、染色されない領域と
を形成する工程を含むカラーフィルタの形成方法。
(1) Areas that are dyed with a dye by adjusting the amount of light exposed to a photosensitive film made by mixing a protein with a common crosslinking site and a dye dyeing site and a chromium compound that accelerates the crosslinking reaction upon exposure to light. and a non-dyed area.
(2)露光する光量の調節は、染色性を有しつつ、光硬
化させる全面露光と、染色性を喪失させる局部露光とで
行う特許請求の範囲第1項記載のカラーフィルタの形成
方法。
(2) The method for forming a color filter according to claim 1, in which the amount of light to be exposed is adjusted by full-surface exposure that causes photocuring while retaining dyeing properties, and local exposure that causes loss of dyeing properties.
JP60132350A 1985-06-18 1985-06-18 Formation of color filter Pending JPS61290407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60132350A JPS61290407A (en) 1985-06-18 1985-06-18 Formation of color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60132350A JPS61290407A (en) 1985-06-18 1985-06-18 Formation of color filter

Publications (1)

Publication Number Publication Date
JPS61290407A true JPS61290407A (en) 1986-12-20

Family

ID=15079299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60132350A Pending JPS61290407A (en) 1985-06-18 1985-06-18 Formation of color filter

Country Status (1)

Country Link
JP (1) JPS61290407A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01210902A (en) * 1988-02-18 1989-08-24 Toppan Printing Co Ltd Color filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01210902A (en) * 1988-02-18 1989-08-24 Toppan Printing Co Ltd Color filter

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