JPS61290374A - 試験装置 - Google Patents

試験装置

Info

Publication number
JPS61290374A
JPS61290374A JP13257185A JP13257185A JPS61290374A JP S61290374 A JPS61290374 A JP S61290374A JP 13257185 A JP13257185 A JP 13257185A JP 13257185 A JP13257185 A JP 13257185A JP S61290374 A JPS61290374 A JP S61290374A
Authority
JP
Japan
Prior art keywords
test
chamber
board
seal
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13257185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334830B2 (cg-RX-API-DMAC7.html
Inventor
Seiji Onozawa
小野沢　誠治
Hitoshi Ito
伊藤　仁之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP13257185A priority Critical patent/JPS61290374A/ja
Publication of JPS61290374A publication Critical patent/JPS61290374A/ja
Publication of JPH0334830B2 publication Critical patent/JPH0334830B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13257185A 1985-06-18 1985-06-18 試験装置 Granted JPS61290374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13257185A JPS61290374A (ja) 1985-06-18 1985-06-18 試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13257185A JPS61290374A (ja) 1985-06-18 1985-06-18 試験装置

Publications (2)

Publication Number Publication Date
JPS61290374A true JPS61290374A (ja) 1986-12-20
JPH0334830B2 JPH0334830B2 (cg-RX-API-DMAC7.html) 1991-05-24

Family

ID=15084420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13257185A Granted JPS61290374A (ja) 1985-06-18 1985-06-18 試験装置

Country Status (1)

Country Link
JP (1) JPS61290374A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0628830A3 (en) * 1993-06-11 1995-11-22 Sumitomo Electric Industries Device for reliability testing of semiconductor lasers.
JP2011059118A (ja) * 2009-09-14 2011-03-24 Star Technologies Inc 発光素子用検知モジュール及びこれを用いる試験装置
JP2013019718A (ja) * 2011-07-08 2013-01-31 Fujitsu Semiconductor Ltd 試験装置、試験方法および試験ボード

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0628830A3 (en) * 1993-06-11 1995-11-22 Sumitomo Electric Industries Device for reliability testing of semiconductor lasers.
JP2011059118A (ja) * 2009-09-14 2011-03-24 Star Technologies Inc 発光素子用検知モジュール及びこれを用いる試験装置
JP2013019718A (ja) * 2011-07-08 2013-01-31 Fujitsu Semiconductor Ltd 試験装置、試験方法および試験ボード

Also Published As

Publication number Publication date
JPH0334830B2 (cg-RX-API-DMAC7.html) 1991-05-24

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