JPS6128905A - Production of optical circuit - Google Patents

Abstract

PURPOSE:To produce inexpensively an optical circuit with good mass productivity by bringing a metallic alcoholate soln. for forming a base part into contact with a medium, irradiating light thereto to form projecting parts into a pattern shape to the medium, gelling the metallic alcohol soln. and irradiating light energy to the medium to form a gel layer then pouring the metallic alcoholate soln. for forming optical waveguides into the gaps of the gel layer and drying the same by heating after gelation. CONSTITUTION:The medium 2 is laminated on the quartz substrate 1 and the metallic alcoholate soln. 3 for forming the base part is brought into contact with the medium 2. UV rays 5 are then irradiated in the waveguide pattern shape via a mask 4 to form the parts 20 where the medium 2 builds up partially. The soln. 3 is then gelled to form a gel 8 and visible light 6 is irradiated to the medium 2 to flatten the projecting parts 20 of the medium 2 thereby forming the gaps 80 to the gel 8. The metallic alcoholate soln. 7 for forming the waveguides is poured into the gaps 80 formed in such a manner and after the gelation of the soln. 7, the entire part of the gel is dried and is sintered by heating. The optical circuit having the desired waveguide pattern is thus produced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a method of manufacturing a patterned optical circuit constituted by a glass optical waveguide including laser glass and magneto-optic glass.

[Background of the invention]

Conventionally, optical circuits using various materials such as glass, semiconductors, dielectric crystals, and polymers have been proposed. Of these, optical circuits using polymers are long and reliable. I glass,
Optical circuits using semiconductors and dielectric materials are currently manufactured using microfabrication technology using resist and dry etching processes, but there are problems in that manufacturing equipment is expensive and process control is difficult.

In particular, glass optical circuits have the advantage of having low optical waveguide loss inherent to the material and being able to be highly reliable fusion spliced to optical fibers. However, this method has a disadvantage in that it takes several tens of hours to fabricate a multimode optical waveguide under highly controlled conditions in a dry etching process, which results in poor mass productivity.

Regarding such optical circuits, a simple manufacturing method combining the sol-gel method and molding technology has been proposed in recent years (Japanese Patent Application No. 142578/1983), but when manufacturing optical circuits consisting of fine patterns, high precision is required. There were problems such as the need for a mold, which made the mold expensive, and the need for an expensive control system for positioning the mold in order to align the mold with the molded product with high precision.

[Summary of the invention]

The present invention has been made in view of the above-mentioned points, and is suitable for mass production and does not require a high-precision mold or a control system for positioning the mold, and therefore can easily manufacture a glass optical circuit at low cost. The purpose is to propose a method.

Therefore, the method for manufacturing an optical circuit according to the present invention includes +a)
(b) irradiating the medium with light energy in a desired pattern shape to bring the base forming metal alcoholate solution into contact with a medium that reversibly forms irregularities by applying light energy; a step of forming convex portions in the pattern shape in the direction of the metal alcoholate solution, (C1 step of gelling the base forming metal alkolate solution, Td) irradiating the medium with light energy to form convex portions on the medium; a step of eliminating the convex portion and forming a void in the gel layer; fe) a step of pouring a metal alcoholate solution for forming an optical waveguide into the void, gelling it, and then drying and heating it. .

According to the present invention, there is an advantage that optical circuits can be manufactured at low cost and with good mass productivity.

[Detailed description of the invention]

The present invention will be explained in more detail.

As described above, the method for manufacturing an optical circuit according to the present invention includes [a
1, mountain), (C1, (d), (81 steps).

Hereinafter, the present invention will be explained separately for each step.

(a) A step of bringing the base-forming metal alcoholate solution into contact with a medium that reversibly forms irregularities by applying light energy.

The medium used in the present invention is not fundamentally limited, and any medium may be used as long as it can reversibly form unevenness by light energy. For example, it can be a vacuum-deposited film containing a spiropyran derivative shown as general formula I below. A vacuum-deposited film containing such a spiropyran derivative can vary in film thickness by more than 100%, and is a preferred medium in the method according to the invention.

Furthermore, the metal alcoholate solution for base formation that is contacted with this medium contains at least one metal alcoholate,
The main components are water and an organic solvent. As such a metal alcoholate, for example, tetramethoxysilane, tetramethoxysilane, etc. can be mainly used.

However, the present invention is not limited to this, and basically any material may be used as long as it gels.

As the organic solvent for dissolving the conometal alcoholate, alcoholic solvents such as methanol, ethanol, and isopropanol can be used, but it is clear that the organic solvent is not limited thereto.

Furthermore, an acid or a base can be added to such a metal alcoholate solution as a catalyst for metal alcoholate hydrolysis, and a metal alcoholate such as Ti, Ge, or Zr can be added to the metal alcoholate solution to control the refractive index or expansion coefficient. Rates may be combined. That is, it is clear that various additives can be added to the metal alcoholate solution as subcomponents.

(Space below) Narukami H3 (In the above formula, n is a positive integer, R1, RR, R3 are hydrogen atoms, alkoxy groups having 1 to 5 carbon atoms, alkoxycarbonyl groups having 2 to 6 carbon atoms, nitro group, halogen ) (b) A step of irradiating the medium with light energy in a desired pattern shape to form convex portions in the pattern shape in the direction of the base forming metal alcoholate solution.

As described above, while the medium is in contact with the metal alcoholate solution for forming the base, light energy is irradiated onto the medium through a mask having a desired pattern formed thereon to form convex portions on the medium. As such light energy, for example, ultraviolet rays are used.

By forming the convex portions on the medium in this manner, the convex portions protrude into the metal alcoholate solution in a desired pattern.

(C1 Step of gelatinizing the metal alcoholate solution for base formation to form a base.

By gelatinizing the metal alcoholate solution in this manner, a base (gel layer) is formed that has recesses corresponding to the projections formed in the medium.

+d> A step of irradiating the medium with light energy to eliminate the convex portions formed on the medium and form voids in the gel layer (base).

After gelling the metal alcoholate solution as described above,
The protrusions formed on the medium are flattened each time they are irradiated with light energy. This creates voids in the gel in the recesses.

Examples of such light energy include visible light.

tel A step in which a metal alcoholate solution for forming an optical waveguide is poured into this gap, gelled, and then dried and heated.

Although the metal alcoholate solution for forming an optical waveguide is poured into such a gap, the metal alcoholate for forming an optical waveguide is not fundamentally limited in the present invention. Rather than the metal alcoholate for base formation mentioned above,
Any metal alcoholate solution that can be made to have a high refractive index after vitrification may be used. For example, using the same metal alcoholate and organic solvent as those exemplified in the case of the above-mentioned gelling metal alcoholate solution, Ge, AI, Ti
The solution can be a mixture of metal alcoholates such as.

Substances that impart magneto-optical effects to such metal alcoholate solutions, such as elements of group I, group V, or lanthanum series (e.g., lead, bismuth, antimony, cerium)
It is also possible to form a waveguide of Faraday rotation glass or laser glass by adding a laser emitting substance such as neodymium or the like.

After pouring the metal alcoholate solution for forming an optical waveguide in this way, it is gelled, and then the whole is dried and heated and sintered to obtain an optical circuit with a desired pattern.

Next, the method for manufacturing an optical circuit according to the present invention will be explained in more detail with reference to FIG.

FIG. 1 is an explanatory diagram for explaining the present invention in detail, and as is clear from FIG. 1, the optical circuit manufacturing method of the present invention includes laminating a medium 2 on a quartz substrate 1; This medium 2
Contact with metal alcoholate solution 3 for base formation (
Figure 1(a)).

Next, ultraviolet rays 5 are irradiated in a waveguide pattern through a mask 4 to form partially raised portions 20 (convex portions) in the medium 2 (see FIG. 1).

Next, the metal alcoholate solution 3 is gelled to form a gel 8, and the medium 2 is irradiated with visible light 6.
The convex portions 20 of the medium 2 are flattened to form voids 80 in the gel 8 (FIG. 1(C)).

A metal alcoholate solution 7 for waveguide formation is poured into the void 80 thus formed (FIG. 1(d)), and this solution 7
After gelling, the entire gel is dried and heated and sintered to produce an optical circuit having a desired waveguide pattern.

The present invention will be explained in detail below.

Example 1 6'-nitro-1-hebutyl-3',3-dimethylspiro[indoline-2,2'-benzopyran] was vacuum-deposited to a thickness of 5 μm on a quartz substrate to provide a medium with reversible volume change.

Tetramethoxysilane as a metal alcoholate solution,
A solution containing water and methanol mixed at a molar ratio of 1:4:4 was used.

When ultraviolet rays were irradiated using a long high-pressure mercury lamp and irradiated onto the spiropyran film (medium) through a mask in a branched pattern, the thickness of the irradiated area had increased by 270% from before irradiation. After gelatinizing the metal alcoholate solution for forming the base, visible light is irradiated with a xenon lamp to eliminate the protuberances, and tetrabutquine germanium, tetramethoxysilane, water and methyl are added to the voids of the gel. Alcohol molar ratio 0.2:0.8
: A metal alcoholate solution for forming an optical waveguide adjusted to have a ratio of 4:3 is poured in, and after this metal alcoholate solution turns into a gel, the entire gel is dried, and further 10
By heating and sintering to 00° C., a branched optical waveguide 10 was fabricated on a glass substrate 9 as shown in FIG. 2 fa).

Example 2 Same as Example 1, 6″-nitro-1-heptyl-3″,
A vacuum-deposited film of 3-dimethylspiro[indoline-2,2'-benzopyran] was used as a medium for reversibly changing volume, and tetraethoxysilane, water, ethyl alcohol, and hydrochloric acid were mixed in a molar ratio of 1:2.5:30. : 0
．． 03 was brought into contact with the above medium, and the deposited film was irradiated with ultraviolet rays directly onto the waveguide through a mask using an ultra-high pressure mercury lamp.

While the film thickness of the irradiated portion increased by 170%, the metal alcoholate solution was gelled, and the deposited film was irradiated with visible light to eliminate the raised pattern.

An optical waveguide was formed by replacing 10 mol% of the tetrabutoxysilane in the metal alcoholate solution for forming the base with tetrabutoxygermanium and adding a small amount of tributoxycerium into the voids created in the gel part due to the disappearance of this raised pattern. Pour the metal solution into the gate.
The entire gel was thoroughly dried, then heated to 950°C, and the second
A Faraday rotary glass waveguide 11 having a height of 8 μm was obtained on a glass substrate 9 as shown in (in the figure).

When this Verdet constant was measured, it was found that -0.09 min 10e
-cm (6328 people).

Example 3 Same as Example 1, 6°-nitro-1-heptyl-3'',
3-dimethylspiro [indoline-2,2゛-benzopyran] was vacuum-deposited to a thickness of 5 μm on a quartz substrate as a medium.
A base-forming metal alcoholate solution prepared by adjusting the molar ratio of tetramethoxysilane, water, and methanol to 1:5:5 was brought into contact with the above medium, and an ultra-high pressure mercury lamp was used to irradiate ultraviolet rays with a line width of 10 μm. , irradiation was performed in a band shape with a 50 μm pinch, and the irradiated area was raised. In this state, the metal alcoholate solution was gelled, and then the medium (deposition 11ii) was irradiated with visible light to eliminate the convex portions.

Next, tetramethoxysilane, tributoxyaluminum, triptoxyneodymium, water and methanol were added in a molar ratio of 0.9:o, t:0.014:6.
: 6.5, a metal alcoholate solution for forming an optical waveguide was poured into the gap formed by the disappearance of the convex portion.

After gelation, it is thoroughly dried, heated to 1000°C, and the end face of the neodymium-containing part is polished to a mirror finish.
2 and attach the glass substrate 9 as shown in FIG. 2 (C1).
A waveguide glass laser array 13 was obtained on top.

Example 4 6゛-nitro-1-octyl 3,3゛-dimethylspiro [indoline-2,2゛-benzopyran] was vacuum-deposited to a thickness of 8 μm on a quartz substrate, and tetraethoxysilane, water, and methanol were added to it in molar ratios. A base-forming metal alcoholate solution mixed at a ratio of 1:4:4 is brought into contact with the branch pattern, and ultraviolet rays are irradiated onto the branch pattern, leaving the irradiated area at 170°C.
% film thickness was increased, and the metal alcohol-Hg solution was gelled. After that, visible light is irradiated to a part of the branch pattern,
Part of the pattern is eliminated, and the resulting void is filled with 10% of tetramethoxysilane in the base forming metal alcoholate solution.
A metal alcoholate solution for forming a waveguide, in which the mole percent was replaced with tetrabutoxygermanium and a small amount of tributoxycerium was added, was poured into the solution to form a gel.

Thereafter, the remaining branch pattern was irradiated with visible light, and 10 mol% of the tetramethoxysilane in the metal alcoholate solution for base formation was replaced with tetrabutoxygermanium in the void where the pattern disappeared. A metal alcoholate solution was poured into the solution to form a gel.

Next, after thoroughly drying the whole, by heating it to 950°C, an optical circuit in which the Faraday rotating glass waveguide 11 and the branching optical waveguide 10 are integrated as shown in FIG. 2 Td) is formed on the glass substrate 9. Created.

〔Effect of the invention〕

As explained above, according to the method for manufacturing an optical circuit according to the present invention, not only a simple optical waveguide but also a waveguide structure having features such as electro-optic effect and laser oscillation can be easily manufactured using a simple device from a highly pure material. It has the great advantage of being easily manufacturable.

Furthermore, waveguides of various shapes can be easily produced by simply changing the mask from a single mold, and while there was previously no economical method for manufacturing fine molds, it is now possible to mass-produce a wide variety of optical waveguides. It also has the advantage of being easily fabricated.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram for explaining a method of manufacturing an optical circuit according to the present invention, and FIG. 2 is a schematic diagram of an optical circuit manufactured by the method according to the present invention. 2...Medium, 20...Convex portion, 3...Metal alcoholate solution for base formation, 7...Metal alcoholate solution for waveguide formation, 8...Gel, 80...Gap. Applicant's agent Masaki Amemiya
1(A) (D) Procedural amendment (Showa 59$ November 26th 1, 11 Cow's conversion 1982 Patent Application No. 150654 2 Name of invention Address 1-1-6 Uchisaiwai-cho, Chiyoda-ku, Tokyo Name Name (422) Nippon Telegraph and Telephone Public Corporation 4, Agent Address: 102 Utsubo 03-264-3566 5, Subject of amendment 6, Contents (1) The formula on page 10 of the specification has been changed as follows: Correct. "Formula I C'F13 (In the above formula, n is a positive integer, R1, R2, R3 are hydrogen atoms, an alkoxy group having 1 to 5 carbon atoms, an alkoxycarbonyl group having 2 to 6 carbon atoms, a nitro group. , indicating halogen).

Claims (4)

[Claims] (1) (a) A step of bringing a metal alcoholate solution for base formation into contact with a medium that reversibly forms irregularities by applying light energy; (b) irradiating the medium with light energy in a desired pattern shape; a step of forming convex portions in the pattern shape in the direction of the base forming metal alcoholate solution in the medium; (c) a step of gelling the base forming metal alcoholate solution to form a base; (d) a step of forming a base in the medium. A step of irradiating light energy to eliminate the convex portions formed in the medium and forming a void at the base; (e) pouring a metal alcoholate solution for forming an optical waveguide into the void, gelling it, and then drying and heating it; A method for manufacturing an optical circuit, comprising the steps of: (2) The method for manufacturing an optical circuit according to claim 1, wherein the medium uses a compound represented by the following general formula I as at least one of its constituent components. ¥Formula I ¥ ▲There are mathematical formulas, chemical formulas, tables, etc.▼ (In the above formula, n is a positive integer, R_1, R_2, R_3 are hydrogen atoms, alkoxy groups with 1 to 5 carbon atoms, and 2 to 6 carbon atoms.
represents an alkoxycarbonyl group, a nitro group, and a halogen. ) (3) The optical circuit according to claims 1 and 2, characterized in that a substance containing a group IV, group V, or lanthanum series element is added to the metal alcoholate solution for forming an optical waveguide. manufacturing method. (4) The method for manufacturing an optical circuit according to any one of claims 1 to 3, characterized in that a laser-emitting substance is added to the metal alcoholate solution for forming an optical waveguide.