JPS61283018A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To make gap depth highly accurate and to prevent the magnetic characteristic of a magnetic film from deteriorating by removing some parts of a magnetic thin film and a nonmagnetic spacer so as to form a recessed part including a coil window and forming a ridge line at the sliding surface side of the recessed part in parallel with a tape sliding surface. CONSTITUTION:The magnetic thin films 2a and 2b are installed on a nonmagnetic substrate 1 trough the nonmagnetic spacer 3, and some parts of the thin film 2 and the spacer 3 are removed in a recessed shape 6 by means of etching to form the coil window 4. The ridge line at the side of the tape sliding surface of the recessed part 6 is machined so that said line can be approximately in parallel with the tape sliding surface and can cut the spacer 3. As a result, the recessed part is removed and formed by etching, and therefore the gap depth can be extremely accurate. Moreover, since a thermomechanical load is not applied to the thin film 2, the magnetic characteristic will not deteriorate.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a magnetic head substrate suitable for obtaining a thin-film wire-wound magnetic head in which a magnetic core is formed of a magnetic thin film and winding is performed.

[Background of the invention]

In recent years, in order to improve recording density, it has become necessary to further improve the mechanical precision of magnetic heads, and for this reason, magnetic heads whose magnetic cores are composed of magnetic thin films have attracted much attention.

Conventionally, such a magnetic head is formed by laminating a predetermined layer of magnetic thin films on a non-magnetic substrate to obtain a magnetic core half, and then butt-bonding two such magnetic core halves with a non-magnetic spacer interposed therebetween. This nonmagnetic spacer constitutes a magnetic gap. However, these magnetic heads cannot be produced in large numbers at one time, and mechanical bonding is required, making it extremely difficult to perform butt bonding with high precision.

It was difficult to improve the dimensional accuracy of the gap length and track width of one magnetic gap, which caused problems in terms of mass production and yield.

On the other hand, as shown in FIG. 4, on the nonmagnetic substrate 1,
Magnetic thin films 2a, 24 are provided on a plane with a non-magnetic spacer 3 forming a magnetic gap interposed therebetween, and a winding window 4 is provided straddling these magnetic thin films 2a, 2.1).
A magnetic head in which the winding 5 is applied through the winding window 4 has been proposed.

In such a magnetic head, the track width is defined by the thickness of the magnetic thin films 2a, 26.

Furthermore, since the gap length is also defined by the thickness of the nonmagnetic spacer 3, by controlling these thicknesses, the track width and gap length can be set with very high precision.

Incidentally, such a magnetic head requires a winding window 4 for winding the magnetic thin film 5, and for this purpose a hole surrounded by the magnetic thin films 2α and 2J is formed. A through hole is formed in the non-magnetic substrate 1 so as to be continuous with the hole. Various methods are conventionally known for forming the winding window 4, but Japanese Patent Publication No. 58-5061
As shown in Publication No. 9, etc., an effective method is to form a magnetic thin film on a flat non-magnetic substrate and then use machining such as ultrasonic processing to penetrate the magnetic thin film and the non-magnetic substrate. It is known as a processing method.

However, since the winding window is formed by machining, this method has the disadvantage that the gap depth accuracy is poor and the magnetic properties of the magnetic thin film are inevitably deteriorated. In other words, one method of making holes in a magnetic thin film is by ultrasonic machining.This method uses abrasive grains of several tens of micrometers and an ultrasonic horn to destroy the magnetic thin film while making the hole, which is essentially will deteriorate the magnetic properties of the magnetic thin film, and
Chipping occurs, making it impossible to obtain well-shaped holes and reducing gap depth accuracy.On the other hand, there are other methods such as laser beam machining and ion beam machining, but these methods do not drill holes by heating. As a result, the magnetic properties of the magnetic thin film in the most important magnetic gap portion of the magnetic head deteriorate due to heating. In particular, when an amorphous magnetic material is used as the magnetic thin film, the magnetic properties deteriorate significantly due to this heating, and this method cannot be used at all.

As mentioned above, the conventional method for forming a winding window is
This adversely affected the manufacturing and characteristics of the magnetic head, making it impractical.

[Purpose of the invention]

An object of the present invention is to provide a thin film magnetic film that can improve gap depth accuracy and easily form a winding window without deteriorating the magnetic properties of the magnetic thin film, while eliminating the drawbacks of the prior art described above. It is in providing the head.

[Summary of the invention]

In order to achieve this object, the present invention removes the magnetic thin film and non-magnetic spacer around the part where the winding window is formed to form a recess, and the ridgeline on the tape sliding surface side of the four surroundings is The feature is that it is made to be approximately parallel to the sliding surface.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of a thin film magnetic head according to the present invention, where 6 is a recessed portion, and parts corresponding to those in FIG. 4 are given the same reference numerals. As shown in FIG. 1, a helical-shaped recess 6 is formed around the winding window 4 from which the magnetic thin films 2α, 24 and the nonmagnetic spacer 3 have been removed.

As will be described later, the recess 6 is formed by forming the magnetic thin films 2CL, 24 and the nonmagnetic spacer 3 on the nonmagnetic substrate 1, and then etching these magnetic films M2a, 2b and the nonmagnetic spacer 3 by photolithography or the like. The ridgeline of the recess 6 on the tape sliding surface side is processed into a shape that cuts the nonmagnetic spacer 32 at an in-line that is substantially parallel to the tape sliding surface.

Next, the manufacturing method of this embodiment of the dirty lever shown in FIG. 2 will be explained. Note that this figure is shown as a sectional view along A-All in FIG. 1, and parts corresponding to those in FIG. 1 are given the same reference numerals.

First, as shown in Fig. 2 (cL), there is a non-through hole 1 on the back side.
A magnetic film 2 is formed on the entire surface of the non-magnetic substrate 1 on which α has been formed by vapor deposition 1 sputtering or the like.

The non-through hole 1a is formed in the volume I! which will be processed later. It is formed by etching etc. on the part corresponding to the window.

Next, as shown in No. 21N (4), one of the magnetic thin films 2cL is formed by removing unnecessary portions of the magnetic film 2 by photolithography (etching) or machining using a dicer, cutting tool, or the like.

Furthermore, a non-magnetic spacer 3 is formed thereon by vapor deposition or sputtering (see FIG. 2(Q)), and furthermore,
A magnetic film is formed thereon in the same manner as the magnetic film 2 described above (FIG. 2(, t)').゛Next, the non-magnetic spacer 6 is removed from unnecessary parts of the magnetic thin film 2a by etching, machining, lapping, dicing, cutting, etc. until at least the magnetic thin film 2a is exposed, and the other magnetic thin film 24 is formed (21N (21N)). ,)). After that, the non-magnetic substrate 1.
) Remove a portion of the magnetic thin films 2a, 24 and the non-magnetic spacer 3 by etching or the like to such an extent that the surfaces are exposed, and as shown in FIG. A recess 6 is formed that is thicker than the through hole 1α.

Then, each chip is cut with a dicer, etc., and a hole is made in the non-magnetic substrate 1 at the bottom of the concave part 6 with a diameter smaller than that of the four parts 6 by ion etching, laser beam processing, chemical etching, etc., and the previous non-through hole 1α is passed through. A winding window 4 is formed as a hole (FIG. 2(d)).

In this embodiment, the ridges of the four parts 6 that determine the gap depth cut the non-magnetic spacer 3 at an in-line parallel to the tape sliding surface, and the recesses 6 are made magnetic by etching or the like. Since it is formed by removing a portion of the thin films 2cL and 24 and the nonmagnetic spacer 3, the accuracy of the gap depth can be made extremely high. Furthermore, since the recess 6 can be wound and the S window 4 formed without applying mechanical or thermal loads to the magnetic thin films 2α, 2, the magnetic properties of the magnetic thin films 2eL, 24 will not deteriorate. Since the hole diameter of the winding chamber 4 can be made smaller than in the conventional method, it is possible to shorten the magnetic path and reduce the chip size.

FIG. 3 is a plan view showing another embodiment of the thin film magnetic head according to the present invention, and parts corresponding to those in FIG. 1 are given the same reference numerals.

FIG. 3 shows an embodiment in which the present invention is applied to a double-gap magnetic head having two magnetic gaps. On a non-magnetic substrate (not shown), there are non-magnetic spacers 3 on both sides of a magnetic thin film 2c serving as a common core. Magnetic thin films 2a and 24 are respectively formed through the winding windows 4.4, and recesses 6' and 6' are formed around both winding windows 4.4. The recesses 6', 6' are formed by connecting the non-magnetic spacer 3 to the tape sliding surface at the portions indicated by broken lines in the figure. The cuts are made almost in parallel, thereby improving the accuracy of the gap depth.In this embodiment, the recesses 6',
Since 6' is patterned, a magnetic flux constriction effect can be obtained.

In each of the above embodiments, the non-through hole 1e- was formed in advance on the back surface of the non-magnetic substrate 1, and the winding window 42 communicating with the non-through hole 1cL was bored after the recesses 6.6' and 6' were formed. However, instead of this, a non-penetrating hole is formed on the surface of the non-magnetic substrate 1, and after the non-penetrating hole is closed with a 7-photoresist film or the like, a magnetic thin film is formed by the same process as shown in FIG. Finally, the photoresist film 7 may be removed to form an @-line window.In addition, a base magnetic substrate with non-through holes formed on both the front and back sides, a non-magnetic substrate with through holes formed, or a through-hole It is also possible to use a flat nonmagnetic substrate without holes or non-through holes.

Further, in the above embodiment, the recess 6 is thicker than the winding window 4.
We have explained the case where ', 6', 6' are formed, but this (!!)W)6. i, 6' may have the same shape as the winding window 4, and the shape is not limited to the above embodiment.

〔Effect of the invention〕

As explained above, according to the present invention, it is possible not only to improve the accuracy of the gap depth, but also to avoid deterioration of the magnetic properties of the magnetic thin film when forming the winding window after forming one magnetic core. Therefore, it is possible to provide a thin film magnetic head which has excellent functions except for the drawbacks of the above-mentioned prior art.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing an embodiment of a thin film magnetic head according to the present invention, FIGS. 4 is a plan view showing another embodiment of the magnetic head, and FIG. 4 is a perspective view showing an example of a conventional thin film magnetic head. 1...Nonmagnetic substrate 1a...Non-through holes 2a, 2, 2c ...Magnetic thin film 3...Non-magnetic spacer 4...Window window 6, 6', 6'...Katsuo Ogawa, Patent Attorney, Patent Attorney No. 1 Fig. 2t2I Fig. 3 Fig. 4- Hakogyu, 5

Claims (1)

[Claims] In a thin film magnetic head in which magnetic thin films facing each other via a nonmagnetic spacer are provided on a nonmagnetic substrate, and a winding window is provided passing through these magnetic thin films and the nonmagnetic substrate, the magnetic thin film and the nonmagnetic spacer are provided. A thin film magnetic material, characterized in that a recessed portion is formed that includes the winding window by removing a portion of the winding window, and the ridgeline of the recessed portion on the tape sliding surface side is substantially parallel to the tape sliding surface. head.