JPS6127862Y2 - - Google Patents
Info
- Publication number
- JPS6127862Y2 JPS6127862Y2 JP10309582U JP10309582U JPS6127862Y2 JP S6127862 Y2 JPS6127862 Y2 JP S6127862Y2 JP 10309582 U JP10309582 U JP 10309582U JP 10309582 U JP10309582 U JP 10309582U JP S6127862 Y2 JPS6127862 Y2 JP S6127862Y2
- Authority
- JP
- Japan
- Prior art keywords
- holes
- pneumatic conveyor
- air outlet
- air
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Advancing Webs (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Description
【考案の詳細な説明】
(1) 考案の技術分野
本考案は半導体ウエハ等を搬送する空気圧コン
ベアに関するものである。[Detailed description of the invention] (1) Technical field of the invention The present invention relates to a pneumatic conveyor for conveying semiconductor wafers and the like.
(2) 従来技術と問題点
第１図は従来の空気圧コンベアの構造を説明す
るための図であり、ａは上面図、ｂはａ図のｂ−
ｂ線における断面図、ｃはａ図のｃ−ｃ線におけ
る断面図をそれぞれ示す。同図において、１はコ
ンベア本体、２は搬送面１′に対し斜に穿設され
た空気吹出し口、３は圧縮空気送入管をそれぞれ
示している。(2) Prior art and problems Figure 1 is a diagram for explaining the structure of a conventional pneumatic conveyor, where a is a top view and b is a diagram showing b-
A cross-sectional view taken along the line b, and c a cross-sectional view taken along the line c-c of the figure a, respectively. In the figure, 1 indicates the main body of the conveyor, 2 indicates an air outlet provided obliquely to the conveying surface 1', and 3 indicates a compressed air supply pipe.
この空気圧コンベアは圧縮空気送入管３より圧
縮空気を供給することにより空気吹出し口２より
搬送面１′に対して斜に空気を吹き出させ、その
垂直分力ＦAにより被搬送物を浮上させ、同時に
水平分力Ｆbにより被搬送物を搬送することがで
きるようになつている。 This pneumatic conveyor supplies compressed air from a compressed air inlet pipe 3, blows out air obliquely to the conveyance surface 1' from an air outlet 2, and levitates the conveyed object by its vertical component F A. At the same time, the object to be transported can be transported by the horizontal component force Fb .
ところがこのような空気圧コンベアはその空気
吹出し口２が搬送面１′に対して斜に穿設する必
要があるため、その加工は機械加工となること、
またその孔を搬送面に斜に穿孔する作業は非常に
困難であること等の理由により高価となるという
欠点があつた。 However, in such a pneumatic conveyor, the air outlet 2 needs to be bored obliquely to the conveying surface 1', so the machining is required.
Another disadvantage is that it is very difficult to drill the holes obliquely on the conveying surface, resulting in high costs.
(3) 考案の目的
本考案の目的は上記従来の欠点に鑑み、製作が
容易で安価な空気圧コンベアを提供することを目
的とするものである。(3) Purpose of the invention The purpose of the present invention is to provide a pneumatic conveyor that is easy to manufacture and inexpensive, in view of the above-mentioned conventional drawbacks.
(4) 考案の構成
そしてこの目的は本考案によれば、複数枚のパ
ンチメタルを積み重ね、同一位置にある各層の孔
の中心を結ぶ線が板面に対して傾斜するように各
層を相対的にずらせ、該孔を空気吹出し口として
使用したことを特徴とする空気圧コンベアを提供
することによつて達成される。(4) Structure of the invention According to the invention, the purpose is to stack multiple sheets of punched metal and stack each layer relative to each other so that the line connecting the centers of holes in each layer at the same position is inclined with respect to the plate surface. This is achieved by providing a pneumatic conveyor characterized in that the holes are offset to the air and the holes are used as air outlets.
(5) 考案の実施例 以下考案実施例を図面によつて詳述する。(5) Example of implementation of the idea Embodiments of the invention will be described in detail below with reference to the drawings.
第２図は本考案による空気コンベアの要部を示
す図である。 FIG. 2 is a diagram showing the main parts of the air conveyor according to the present invention.
本実施例は図に示す如く複数枚のパンチメタル
５-1〜５-oを積み重ね、その孔６を、その中心を
結ぶ線が板面（搬送面）５′に対して傾斜する
ように各層５-1〜５-oを相対的にずらせている。
そしてこの孔６を空気吹出し口として利用してい
る。なお圧縮空気送入管等は第１図に示したもの
と同様である。またパンチメタルは薄板に一定の
配列で孔をあけたものであり市販品を利用するこ
とができ、各層５-1〜５-o間は接着又は半田付け
等の接合手段を用いて結合しても良い。 In this embodiment, as shown in the figure, a plurality of punch metals 5 -1 to 5 -o are stacked, and the holes 6 are formed in each layer so that the line connecting the centers is inclined with respect to the plate surface (conveying surface) 5'. 5 -1 to 5 -o are relatively shifted.
This hole 6 is used as an air outlet. Note that the compressed air supply pipe and the like are the same as those shown in FIG. In addition, punch metal is a thin plate with holes drilled in a certain arrangement, and commercially available products can be used. Each layer 5 -1 to 5 -o is connected using bonding means such as adhesive or soldering. Also good.
このように構成された本実施例は空気吹出し口
７から吹出される空気が搬送面５′に対して斜に
吹き出すため、従来と同様、被搬送物を浮上させ
ながら搬送することができる。 In this embodiment configured as described above, the air blown out from the air outlet 7 is blown out obliquely to the conveyance surface 5', so that the object to be conveyed can be conveyed while being floated, as in the conventional case.
(6) 考案の効果
以上、詳細に説明したように本考案の空気圧コ
ンベアはパンチメタルを利用して構成する簡単な
構造であるため、空気吹出し口の機械加工が不要
となり安価に製造することができるといつた効果
大なるものである。(6) Effects of the invention As explained above in detail, the pneumatic conveyor of the invention has a simple structure using punched metal, so machining of the air outlet is not required and it can be manufactured at low cost. It is said that it is possible to have a great effect.
第１図は従来の空気圧コンベアの構造を説明す
るための図、第２図は本考案による空気圧コンベ
アの要部の構造を示す図である。
図面において、５-1〜５-oはパンチメタル、
５′は搬送面、６は孔、７は空気吹出し口をそれ
ぞれ示す。
FIG. 1 is a diagram for explaining the structure of a conventional pneumatic conveyor, and FIG. 2 is a diagram showing the structure of the main part of the pneumatic conveyor according to the present invention. In the drawings, 5-1 to 5 -o are punch metal,
5' is a conveying surface, 6 is a hole, and 7 is an air outlet.
Claims (1)
ある各層の孔の中心を結ぶ線が板面に対して傾斜
するように各層を相対的にずらせ、該孔を空気吹
出し口として使用したことを特徴とする空気圧コ
ンベア。 It is characterized by stacking multiple sheets of punched metal, shifting each layer relative to each other so that the line connecting the centers of the holes in each layer at the same position is inclined to the plate surface, and using the holes as air outlets. pneumatic conveyor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10309582U JPS598923U (en) | 1982-07-09 | 1982-07-09 | pneumatic conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10309582U JPS598923U (en) | 1982-07-09 | 1982-07-09 | pneumatic conveyor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS598923U JPS598923U (en) | 1984-01-20 |
| JPS6127862Y2 true JPS6127862Y2 (en) | 1986-08-19 |
Family
ID=30242695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10309582U Granted JPS598923U (en) | 1982-07-09 | 1982-07-09 | pneumatic conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS598923U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117154U (en) * | 1986-01-20 | 1987-07-25 | ||
| JP2011198778A (en) * | 2008-07-15 | 2011-10-06 | Panasonic Corp | Method for manufacturing thermoelectric device |
-
1982
- 1982-07-09 JP JP10309582U patent/JPS598923U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS598923U (en) | 1984-01-20 |
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