JPS61276283A - Gas laser device - Google Patents

Gas laser device

Info

Publication number
JPS61276283A
JPS61276283A JP11711085A JP11711085A JPS61276283A JP S61276283 A JPS61276283 A JP S61276283A JP 11711085 A JP11711085 A JP 11711085A JP 11711085 A JP11711085 A JP 11711085A JP S61276283 A JPS61276283 A JP S61276283A
Authority
JP
Japan
Prior art keywords
circuit
voltage
input
switching circuit
high voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11711085A
Other languages
Japanese (ja)
Inventor
Norio Takahashi
鷹觜　紀雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP11711085A priority Critical patent/JPS61276283A/en
Publication of JPS61276283A publication Critical patent/JPS61276283A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To prevent the insulation deterioration, burning and damage of the periphery of an anode and a ballast even when high-voltage pulses are applied and the deterioration or damage of each circuit by mounting an input interrupting circuit for a switching circuit operated by output voltage from a comparison amplifier. CONSTITUTION:When high-voltage pulses are applied to input terminals 16, 16', high-voltage pulses are detected by capacitors 19, 19' and resistors 20, 20', and high-voltage pulses generated in the resistors 20, 20' are voltage-divided by resistors 21, 21' and rectified by rectification circuits 15, 15'. Rectified output voltage and the voltage of reference power supplies 13, 13' are compared and amplified by comparison amplifiers 12, 13', an input interrupting circuit 11 is operated through diodes 14, 14', and a contact 10' for an input interrupting relay 10 is opened. Accordingly, input voltage is not applied to a switching circuit 1, and high-voltage pulses are not also applied to the switching circuit.

Description

【発明の詳細な説明】 本発明は、レーザ電源を改良したガスレーザ装置に関し
、特に入力端子間に加わる高電圧パルスに対し、レーザ
電源全保護する回路を付加し九ガスレーザ装置に関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas laser device with an improved laser power source, and more particularly to a nine-gas laser device with an additional circuit for fully protecting the laser power source against high voltage pulses applied between input terminals.

〔従来の技術〕[Conventional technology]

従来この種のガスレーザ装置は第２図に示すようにスイ
ッチング回路１の出力側に高圧トランス２を接続し、高
圧トランス２の出力側を高圧整流回路３に接続する。そ
して高圧整流回路３の一つの出力端は安定抵抗４全通し
てレーザ管５のアノード６に接続され、他の出力端はレ
ーザ管５のカソード７に接続される。このような構成に
おいて、入力端子１６　、１６’に入力電圧全印加する
と、スイッチング回路１の出力は高圧トランス２によっ
て昇圧され、高圧整流回路３により整流されてレーザ管
５のアノード６およびカソード７に加えられる。その結
果レーザ管５は放電し、ミラー８．８′によυ構成され
る光共振器によってレーザ発振する。Conventionally, this type of gas laser device has a high voltage transformer 2 connected to the output side of a switching circuit 1, and the output side of the high voltage transformer 2 is connected to a high voltage rectifier circuit 3, as shown in FIG. One output end of the high voltage rectifier circuit 3 is connected to the anode 6 of the laser tube 5 through the entire stabilizer resistor 4, and the other output end is connected to the cathode 7 of the laser tube 5. In such a configuration, when the full input voltage is applied to the input terminals 16 and 16', the output of the switching circuit 1 is boosted by the high voltage transformer 2, rectified by the high voltage rectifier circuit 3, and sent to the anode 6 and cathode 7 of the laser tube 5. Added. As a result, the laser tube 5 is discharged, and the optical resonator constituted by the mirror 8.8' oscillates a laser beam.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかるに従来のガスレーザ装置では、入力端子１６　、
１６’に高電圧パルスが印加された場合、スイッチング
回路１全通してトランス２．高圧整流回路３に印加され
、高圧整流回路３に異常な高圧ｔ−発生させ、レーザ管
５のアノード６や安定抵抗４の周囲の絶縁劣化や焼損、
破損の事故につながるという問題がある。また、スイッ
チング回路１゜トランス２．高圧整流回路３も劣化した
り、あるいは破損するという欠点がある。However, in the conventional gas laser device, the input terminal 16,
When a high voltage pulse is applied to 16', the entire switching circuit 1 is passed through the transformer 2. It is applied to the high voltage rectifier circuit 3, causing abnormal high voltage t- to be generated in the high voltage rectifier circuit 3, causing insulation deterioration and burnout around the anode 6 of the laser tube 5 and the stabilizing resistor 4.
There is a problem in that it may lead to damage accidents. In addition, the switching circuit 1° transformer 2. There is a drawback that the high voltage rectifier circuit 3 also deteriorates or is damaged.

本発明の目的は、前記欠点を除去し、入力端子に高圧パ
ルスが印加された場合にもレーザ管のアノードや安定抵
抗の周囲の絶縁劣化や焼損、破損を防ぎ、またスイッチ
ング回路、トランス、高圧整流回路等の劣化あるいは破
損を防止しうる安全なガスレーザ装置を提供することに
ある。It is an object of the present invention to eliminate the above-mentioned drawbacks, prevent insulation deterioration, burnout, and damage around the anode of the laser tube and the stabilizer resistor even when a high voltage pulse is applied to the input terminal. An object of the present invention is to provide a safe gas laser device that can prevent deterioration or damage to a rectifier circuit, etc.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、レーザ管と、レーザ管へ高圧を供給する高圧
整流回路、高圧トランスおよびスイッチング回路とより
成るレーザ電源とを具備するガスレーザ装置において、
スイッチング回路の入力側にコンデンサと抵抗を直列に
接続した高電圧パルス検出回路と、高電圧パルスを分圧
整流する整流回路と、整流回路の出力電圧と基準電源の
出力電圧とを比較増幅する比較増幅器と、比較増幅器の
出力電圧により動作するスイッチング回路の入力し中断
回路とを設けたことに％徴とする。The present invention provides a gas laser device comprising a laser tube, a laser power source consisting of a high-voltage rectifier circuit, a high-voltage transformer, and a switching circuit that supplies high voltage to the laser tube.
A high voltage pulse detection circuit with a capacitor and a resistor connected in series on the input side of the switching circuit, a rectifier circuit that divides and rectifies the high voltage pulse, and a comparison that compares and amplifies the output voltage of the rectifier circuit and the output voltage of the reference power supply. The advantage is that an amplifier and an input and interrupt circuit for the switching circuit operated by the output voltage of the comparator amplifier are provided.

、〔実施例〕 次に、本発明について第１図を参照して説明する。入力
端子１６　、１６’とスイッチング回路１０間にチョー
クコイル１７，１τ、入力しゃ断リレー１０．１０’が
接続される。スイッチング回路１の出力側は高圧トラン
ス２ｔ−通して高圧整流回路３に接続され、高圧整流回
路３の一つの出力端は安定抵抗１通してレーザ管５のア
ノード６に接続され、他の一つの出力端はカソード７に
接続される。ま次入力端子１６　、１６’の両端にコン
デンサ１９　、１９’と抵抗２０．２０’が直列に接続
され、抵抗２０．２０’の両端に分圧抵抗２１，２ｒと
整流回路１５　、１５’が接続される。整流回路１５゜
１５′の出力と、基準電源１３　、１３’との出力が比
較増幅器１２，１τに接続され、比較増幅器１ス１２′
の出力はダイオード１４　、１４’　、入力し中断回路
１ｉｔ−通して入力しゃ断リレー１０．１０’に接続さ
れる。, [Example] Next, the present invention will be explained with reference to FIG. Choke coils 17, 1τ and input cutoff relays 10, 10' are connected between the input terminals 16, 16' and the switching circuit 10. The output side of the switching circuit 1 is connected to a high voltage rectifier circuit 3 through a high voltage transformer 2t, one output end of the high voltage rectifier circuit 3 is connected to an anode 6 of a laser tube 5 through a stabilizing resistor 1, and the other output end is connected to an anode 6 of a laser tube 5 through a stabilizer resistor 1. The output end is connected to the cathode 7. Capacitors 19, 19' and resistors 20, 20' are connected in series across the secondary input terminals 16, 16', and voltage dividing resistors 21, 2r and rectifier circuits 15, 15' are connected across the resistors 20, 20'. Connected. The output of the rectifier circuit 15°15' and the output of the reference power supplies 13, 13' are connected to comparison amplifiers 12, 1τ,
The output of is connected to the input cutoff relay 10.10' through the input cutoff circuit 1it- through the diodes 14, 14'.

次に動作について説明する。入力端子１６　、１６’に
入力電圧が印加されると、入力し中断リレー１０の１０
’接点は閉じ、スイッチング回路１に入力電圧が印加さ
れ、スイッチング回路１は動作する。Next, the operation will be explained. When input voltage is applied to input terminals 16 and 16', 10 of input interrupt relays 10
'The contact is closed, the input voltage is applied to the switching circuit 1, and the switching circuit 1 operates.

スイッチング回路１の出力はトランス２より昇圧され整
流回路３によって整流され、その出力電圧はレーザ管５
のアノード６およびカソード７間に印加される。この電
圧印加によりレーザ管５は放電し、ミラー８．８′より
なる光共振器によ）レーザ発振し、レーザ出力９が得ら
れる。さて入力端子１６　、１６’に高圧パルスが印加
されると、コンデンサ１９　、１９’と抵抗２０．２０
’によシ高圧パルスは検出され、抵抗２０．２０’に発
生した高圧パルスは抵抗ｚｘ、ｚｆによ多分圧され整流
回路１５゜１５′で整流される。整流された出力電圧と
基準電源１３　、１３’の電圧が比較増幅器１２　、１
２’で比較増幅されダイオード１４，１４′を通して入
力し中断回路１１を動作させ入力し中断リレー１０の接
点１０′ヲ開く。従って入力電圧はスイッチング回路１
に印加されなくなり、高圧パルスもスイッチング回路に
印加されない。The output of the switching circuit 1 is boosted by the transformer 2 and rectified by the rectifier circuit 3, and the output voltage is applied to the laser tube 5.
is applied between the anode 6 and cathode 7 of. By applying this voltage, the laser tube 5 is discharged and oscillates (by the optical resonator formed by the mirror 8, 8'), so that a laser output 9 is obtained. Now, when a high voltage pulse is applied to input terminals 16 and 16', capacitors 19 and 19' and resistors 20 and 20
A high voltage pulse is detected, and the high voltage pulse generated at the resistors 20 and 20' is multiplied by the resistors zx and zf and rectified by the rectifier circuit 15 and 15'. The rectified output voltage and the voltage of the reference power supply 13, 13' are connected to the comparator amplifier 12, 1
The signal is compared and amplified at 2' and inputted through diodes 14 and 14' to operate the interruption circuit 11, thereby opening the contact 10' of the interruption relay 10. Therefore, the input voltage is switching circuit 1
is no longer applied to the switching circuit, and no high voltage pulse is applied to the switching circuit.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明のガスレーザ装置では、入力
端子１６　、１６’に高電圧パルスが印加されても入力
し中断回路１１．入力し中断リレー１０゜１０′により
、スイッチング回路１には高電圧パルスはしゃ断され、
レーザ管５のアノード６や安定抵抗４の周囲の絶縁劣化
や焼損、破損を防ぎ、またスイッチング回路１．トラン
ス２．高圧整流回路３等の劣化あるいは破損を防止する
ことができる。As explained above, in the gas laser apparatus of the present invention, even if a high voltage pulse is applied to the input terminals 16 and 16', the interruption circuit 11. The input interrupt relay 10°10' cuts off the high voltage pulse to the switching circuit 1.
It prevents insulation deterioration, burnout, and damage around the anode 6 of the laser tube 5 and the stabilizing resistor 4, and also prevents the switching circuit 1. Trance 2. Deterioration or damage to the high voltage rectifier circuit 3 etc. can be prevented.

【図面の簡単な説明】 第１図は本発明のガスレーザ装置を示すブロック図、第
２図は従来のガスレーザ装置を示すブロック図である。 １・・・・・・スイッチング回路、２・・・・・・高圧
トランス。 ３・・・・・・高圧整流回路％４・・・・・・安定抵抗
、５・・・・・・レーザ管、６・・・・・・アノード、
７・・・・・・カソード、８．８’・・・・・・ミラー
、９・・・・・・レーザ出力、１０．１０’・・・・・
・入力し中断リレー、１１・・・・・・入力し中断回路
、１２゜１τ・・・・・・比較増幅器、１３．１３’・
・・・・・基準電源。 １４．１４’・・・・・・ダイオード、１５．１５’・
・・・・・整流回路、１６　、１６’・・・・・・入力
端子、１７　、１７’・・・・・・チョークコイル％　
１８．１８．’　　１９．１９’・・・・・・コンデン
サ、２ｏ、ｚｏ′、ｚｘ、ｒ・・・・・・抵抗。 代理人　弁理士　　内　原　　　晋 峯２面BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a gas laser device of the present invention, and FIG. 2 is a block diagram showing a conventional gas laser device. 1...Switching circuit, 2...High voltage transformer. 3... High voltage rectifier circuit %4... Stabilizing resistor, 5... Laser tube, 6... Anode,
7...Cathode, 8.8'...Mirror, 9...Laser output, 10.10'...
・Input and interruption relay, 11...Input and interruption circuit, 12゜1τ...comparison amplifier, 13.13'.
...Reference power supply. 14.14'...Diode, 15.15'.
... Rectifier circuit, 16, 16'... Input terminal, 17, 17'... Choke coil %
18.18. '19.19'... Capacitor, 2o, zo', zx, r... Resistor. Agent Patent Attorney Shinho Uchihara 2nd page

Claims (1)

【特許請求の範囲】[Claims] レーザ管と、レーザ管へ高圧を供給する高圧整流回路、
高圧トランスおよびスイッチング回路とより成るレーザ
電源とを具備するガスレーザ装置において、前記スイッ
チング回路の入力側にコンデンサと抵抗を直列に接続し
た高電圧パルス検出回路と、該高電圧パルスを分圧整流
する整流回路と、整流回路の出力電圧と基準電源の出力
電圧とを比較増幅する比較増幅器と、該比較増幅器の出
力電圧により動作する前記スイッチング回路の入力しゃ
断回路とを具備したことを特徴とするガスレーザ装置。A laser tube and a high-voltage rectifier circuit that supplies high pressure to the laser tube.
A gas laser device equipped with a laser power source consisting of a high-voltage transformer and a switching circuit, including a high-voltage pulse detection circuit in which a capacitor and a resistor are connected in series on the input side of the switching circuit, and a rectifier that divides and rectifies the high-voltage pulse. A gas laser device comprising: a circuit, a comparison amplifier that compares and amplifies the output voltage of a rectifier circuit and an output voltage of a reference power supply, and an input cutoff circuit for the switching circuit that operates based on the output voltage of the comparison amplifier. .
JP11711085A 1985-05-30 1985-05-30 Gas laser device Pending JPS61276283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11711085A JPS61276283A (en) 1985-05-30 1985-05-30 Gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11711085A JPS61276283A (en) 1985-05-30 1985-05-30 Gas laser device

Publications (1)

Publication Number Publication Date
JPS61276283A true JPS61276283A (en) 1986-12-06

Family

ID=14703658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11711085A Pending JPS61276283A (en) 1985-05-30 1985-05-30 Gas laser device

Country Status (1)

Country Link
JP (1) JPS61276283A (en)

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