JPS61228689A - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JPS61228689A JPS61228689A JP6931685A JP6931685A JPS61228689A JP S61228689 A JPS61228689 A JP S61228689A JP 6931685 A JP6931685 A JP 6931685A JP 6931685 A JP6931685 A JP 6931685A JP S61228689 A JPS61228689 A JP S61228689A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- circuit
- output voltage
- laser tube
- rectifier circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、ガスレーザ装置、特にガスレーザ装置の電源
の改良に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a gas laser device, and particularly to an improvement in a power source for a gas laser device.
（従来の技術およびその問題点）
従来、この種のガスレーザ装置は第２図に示すように、
レーザ管５と、スイッチング回路１、トランス２および
整ｆＩＬ回路３゛を備えたレーザ電源とを有し、レーザ
電源の高圧なレーザ管５のアノード７間に供給するよう
に構成されている。(Prior art and its problems) Conventionally, this type of gas laser device, as shown in Fig. 2,
It has a laser tube 5 and a laser power source including a switching circuit 1, a transformer 2, and an adjustable fIL circuit 3', and is configured to supply the high voltage of the laser power between the anodes 7 of the laser tube 5.
すなわち、入力端子１６．１６’に入力電圧を印加する
と、スイッチング回路１と高圧トランス２により高圧交
流とされ、この交流は高圧整流回路３によって直流高電
圧に変換される。この直流高電圧はレーザ管５のアノー
ド６とカソード７間に印加され、レーザ管５のアノード
６とカソード７間で放電な生ぜしめる。そしてミラー８
．８′によって構成されるレーザ共振器によりレーザ出
力９が得られる。しかし、このような構成においてレー
ザ管５が寿奇となった場合や、レーザ管５が破損等によ
って正常にアノード６とカソード７間が放電維持できな
くなると、高圧整流回路３の負荷は無限大となるためス
タート電圧（約１０ＫＶ）が連続的に発生し、レーザ管
５のアノード６や安定抵抗４の周囲の絶縁劣化や焼損等
の事故につながるという問題がある。That is, when an input voltage is applied to the input terminals 16 and 16', the switching circuit 1 and the high voltage transformer 2 convert the input voltage into a high voltage alternating current, and the high voltage rectifier circuit 3 converts this alternating current into a direct current high voltage. This DC high voltage is applied between the anode 6 and cathode 7 of the laser tube 5, causing a discharge between the anode 6 and cathode 7 of the laser tube 5. and mirror 8
．． A laser output 9 is obtained by a laser resonator constituted by 8'. However, in such a configuration, if the laser tube 5 malfunctions or if the laser tube 5 is damaged and cannot maintain normal discharge between the anode 6 and cathode 7, the load on the high voltage rectifier circuit 3 becomes infinite. Therefore, a starting voltage (approximately 10 KV) is generated continuously, leading to problems such as insulation deterioration and burnout around the anode 6 of the laser tube 5 and the stabilizing resistor 4.
本発明の目的は、上記欠点を除去し、レーザ管のアノー
ドや安定抵抗の周囲の絶縁劣化や焼損等の事故発生の無
い安全なガスレーザ装置を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide a safe gas laser device that does not cause accidents such as insulation deterioration or burnout around the anode of the laser tube or the stabilizer resistor.
（問題点を解決するための手段）
本発明は、レーザ管と、レーザ管に高圧を供給する高圧
整流回路、高圧トランスおよびスイッチング回路とから
なるレーザ電源と、高圧整流回路の出力電圧を分圧する
抵抗と、この分圧抵抗の検出電圧と基準電源の出力電圧
とを比較する比較器と、この比較器の出力により動作す
るタイマー回路と、このタイマー回路の出力に動作する
入力し中断回路とを備え、レーザ管が寿命になったり、
また破損などを生じた場合に入力をしや断し、レーザ管
のアノードや安定抵抗の周囲の絶縁劣化および焼損を防
止するようにしたことをＩｌ！！歎とする。(Means for Solving the Problems) The present invention provides a laser power supply consisting of a laser tube, a high-voltage rectifier circuit that supplies high voltage to the laser tube, a high-voltage transformer, and a switching circuit, and divides the output voltage of the high-voltage rectifier circuit. A resistor, a comparator that compares the detected voltage of this voltage dividing resistor with the output voltage of the reference power supply, a timer circuit that operates based on the output of this comparator, and an input interrupt circuit that operates based on the output of this timer circuit. In case the laser tube reaches the end of its service life,
In addition, in the event of damage, the input is immediately cut off to prevent insulation deterioration and burnout around the laser tube anode and stabilizer resistor. ! I regret it.
（実施例）
以下、図面によ〕本発明の詳細な説明する。第１図は本
発明の一実施例を示す回路図であり、第２図の従来例と
異なるのは、入力端子１６ 、１６’とスイッチング回
路１０間に入力し中断回路１０゜１０′か接続されてお
シ、この入力しゃ断回路１０゜１０′が高圧整流回路３
の出力端に接続した分圧抵抗１４．１５の中点の電圧と
基準電源１３の出力とを比較する比較増幅器１２の出力
によりタイマー回路１１を介してし中断されるように構
成されている点である。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a circuit diagram showing an embodiment of the present invention, which differs from the conventional example shown in FIG. This input cutoff circuit 10°10' is connected to the high voltage rectifier circuit 3.
The output of the comparison amplifier 12, which compares the voltage at the midpoint of the voltage dividing resistor 14.15 connected to the output terminal of the reference power supply 13, is interrupted via the timer circuit 11. It is.
次に本発明装置の動作について述べる。入力端子１６
、１６’に入力電圧が印加されると、入力し中断回路１
０の接点１０′は閉じておりスイッチング回路１は動作
し、高圧トランス２に交流電圧を供給し、高圧整流回路
３から直流高電圧であるスタート電圧（約１０ＫＶ）が
発生し、レーザ管５のアノード６、カソード７間は放電
を開始する。Next, the operation of the device of the present invention will be described. Input terminal 16
, 16', the input interrupt circuit 1
0 contact 10' is closed, the switching circuit 1 operates, supplies AC voltage to the high voltage transformer 2, and a start voltage (approximately 10 KV), which is a high DC voltage, is generated from the high voltage rectifier circuit 3. Discharge begins between the anode 6 and cathode 7.
そうすると高圧整流回路３の出力電圧は、アノード６、
カソード７間の放電維持電圧（約２ＫＶ）まで低下し、
ミラー８，８′によりレーザ発振を生じレーザ出力９が
得られる。Then, the output voltage of the high voltage rectifier circuit 3 is the anode 6,
The voltage decreases to the discharge sustaining voltage (approximately 2KV) between the cathode 7,
Laser oscillation is generated by the mirrors 8 and 8', and a laser output 9 is obtained.
ここで、レーザ管５が破損や寿命となった場合には、放
電が停止しアノード６、アノード７閣は無限大の抵抗と
なるため、高圧！１ｆｆ回路３の出力電圧はスタート電
圧（約１０ＫＶ）まで上昇する・一方、高圧整流回路３
の出力電圧は分圧抵抗１４゜１５により検出され中点の
電圧Ｖｒと基準電源１３の出力電圧Ｖｓは比較増幅器１
２により比較増幅されタイマー回路１１をスタートさせ
る。タイマー回路１１は約５〜１０秒後には入力し中断
回路１０を駆動し、接点１０′を開く。その結果入力電
圧はスイッチング回路ｌに印加されなくなり、高圧整流
回路３の出力電圧も低下し、レーザ管や安定抵抗などが
絶縁劣化を起こしたプ焼損することがなくなる。If the laser tube 5 is damaged or reaches the end of its service life, the discharge will stop and the anodes 6 and 7 will have infinite resistance, resulting in high voltage! The output voltage of the 1ff circuit 3 rises to the start voltage (approximately 10 KV). On the other hand, the high voltage rectifier circuit 3
The output voltage of is detected by voltage dividing resistor 14.
2, the signal is compared and amplified, and the timer circuit 11 is started. Timer circuit 11 will input after about 5 to 10 seconds, driving interrupt circuit 10 and opening contact 10'. As a result, the input voltage is no longer applied to the switching circuit 1, the output voltage of the high-voltage rectifier circuit 3 is also reduced, and the laser tube, ballast resistor, etc. are prevented from burning out due to insulation deterioration.
（発明の効果）
以上のように本発明は、レーザ管５が寿命となったり破
損によって高圧整流回路３の出力電圧ガスタート電圧（
約１０ＫＶ）となっても、約５〜１０秒後には入力し中
断回路が動作し、高圧整流回路３の出力電圧か低下（い
ずれ０になる）し、安定抵抗やレーザ管のアノードに高
圧が印加されなくなるので、これらの絶縁劣化や焼損も
なく、安全なガスレーザ装置を提供できるという効果を
奏する。(Effects of the Invention) As described above, the present invention provides the output voltage of the high voltage rectifier circuit 3, the gas start voltage (
Even if the voltage is about 10KV), the interruption circuit will operate after about 5 to 10 seconds, and the output voltage of the high voltage rectifier circuit 3 will drop (eventually it will become 0), causing high voltage to be applied to the stabilizer resistor and the anode of the laser tube. Since no voltage is applied, there is no insulation deterioration or burnout, and a safe gas laser device can be provided.
第１図は本発明のガスレーザ装置の一実施例の概略図、
第２図は従来のガスレーザ装置の概略図である。
１・・・・・・スイッチング回路、２・・・・・・高圧
トランス、３・・・・・・高圧整流回路、４・・・・・
・安定抵抗、５・・・・・・レーザ管、６・・・・・・
アノード、７・・・・・・カソード、８゜８′・・・・
・・ミラー、９・・・・・・レーザ出力、１０・・・・
・・入力し中断回路、１１・・・・・・タイマー回路、
１２・・・・・・比較増幅器、１３・・・・・・基準電
源、１４．１５・・・・・・抵抗、１６ 、１６’・・
・・・・入力端子。FIG. 1 is a schematic diagram of an embodiment of the gas laser device of the present invention,
FIG. 2 is a schematic diagram of a conventional gas laser device. 1...Switching circuit, 2...High voltage transformer, 3...High voltage rectifier circuit, 4...
・Stabilizing resistor, 5... Laser tube, 6...
Anode, 7...Cathode, 8°8'...
...Mirror, 9...Laser output, 10...
...Input and interrupt circuit, 11... Timer circuit,
12... Comparison amplifier, 13... Reference power supply, 14.15... Resistor, 16, 16'...
...Input terminal.
Claims (1)
該レーザ電源の出力電圧を分圧する抵抗と、該分圧抵抗
の検出電圧と基準電源の出力電圧とを比較する比較器と
、該比較器の出力電圧により動作するタイマー回路と、
該タイマー回路の出力により動作する前記レーザ電源へ
の入力をしゃ断する回路とを具備することを特徴とする
ガスレーザ装置。A laser tube, a laser power supply that supplies high voltage to the laser tube,
a resistor that divides the output voltage of the laser power source; a comparator that compares the detected voltage of the voltage dividing resistor with the output voltage of the reference power source; and a timer circuit that operates based on the output voltage of the comparator.
A gas laser device comprising: a circuit that cuts off input to the laser power source operated by the output of the timer circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6931685A JPS61228689A (en) | 1985-04-02 | 1985-04-02 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6931685A JPS61228689A (en) | 1985-04-02 | 1985-04-02 | Gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61228689A true JPS61228689A (en) | 1986-10-11 |
Family
ID=13399027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6931685A Pending JPS61228689A (en) | 1985-04-02 | 1985-04-02 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61228689A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0323686A (en) * | 1989-06-21 | 1991-01-31 | Fanuc Ltd | Nc laser device |
-
1985
- 1985-04-02 JP JP6931685A patent/JPS61228689A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0323686A (en) * | 1989-06-21 | 1991-01-31 | Fanuc Ltd | Nc laser device |
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