JPS61268378A - Spinner head - Google Patents

Abstract

PURPOSE:To enable the formation of a stable coating film, by making the diameter of a disc substrate mounting surface smaller than the diameter of the available region of the coating film on the disc substrate and fixing the same to the central part of the substrate under suction. CONSTITUTION:The disc substrate mount surface 35 of a spinner head has a disc shape and the diameter thereof is set to about 20-100mm which is smaller than the diameter of the available region of a coating film 9. 2-6 hole parts 5 provided to the mount part 3 are provided to the mount surface 35 in the circumferential direction at constant intervals and a disc substrate 8 is sucked and fixed to the mount surface 35 through the hole parts 5 or the elastic members provided to said hole parts 5. As mentioned above, the disc substrate 8 is sucked and fixed at the central part thereof in a scattered spot state, said substrate 8 can be surely and well held even if warpage or corrugation is generated in the substrate 8 and, because the spinner head is small-sized, the power consumption of a motor and the like is reduced.

Description

[Detailed Description of the Invention] ■ Background Technical Field of the Invention The present invention provides an optical recording disk, a magnetic disk, etc.
The present invention relates to a spinner head used for spinner coating a disk substrate with a coating liquid.

Prior art and its problems For example, a spinner head used for spinner coating to form various coatings on various disk substrates, such as coating the recording layer of an optical recording disk, has conventionally been used as a spinner head for the entire surface shown in Fig. 3. There is a suction type spinner head.

In this method, the disk substrate 8 is placed on the disk substrate mounting portion 3 which is approximately the same size as the disk substrate 8, and then the suction path 7
The disk substrate 8 is suctioned and fixed to the disk substrate mounting portion 3 and rotated in the direction of arrow a.

However, in this method, if a portion of the disk substrate 8 is warped and the entire surface is not flat, suction and fixation to the disk substrate mounting portion 3 may be incomplete, and suction and fixation may not be possible.

Furthermore, heat generated from the motor bearing (not shown) is transmitted to the disk substrate 8 through the disk substrate mounting section 3, which causes evaporation of the solvent of the coating solution and the drying rate to fluctuate, making the coating film thickness unstable.

Furthermore, since the spinner head is large, a motor with a large output must be used, and there are disadvantages such as a large amount of power consumption.

In order to solve these drawbacks, there is a center screw type spinner head shown in FIG.

This type of spinner head has a disk substrate mounting section 3.
Place the disk substrate 8 on the plate and attach the chuck 4 to the threaded portion 4.
By connecting and fixing with the disk board mounting part 3 at 5,
The disk substrate 8 is fixed and rotated in the direction of arrow a.

However, in this method, dust generation due to the sliding of the threaded portion 45 may have an adverse effect on the recording layer. Further, there is a drawback that the attachment/detachment operation is not easy and takes time and effort.

II. OBJECTS OF THE INVENTION An object of the present invention is to provide a spinner head for spinner coating that is small in size, consumes little energy, and is easy to operate, capable of forming a stable coating film.

■Disclosure of invention These objects are achieved by the invention described below.

That is, the first invention is a spinner head that is connected to a motor and has a smooth disk substrate mounting surface for suctioning and mounting the disk substrate, in order to apply a coating liquid to the disk substrate using a spinner. The diameter of the mounting surface is smaller than the diameter of the coating film effective area,
This spinner head is characterized in that a plurality of holes are provided on the disk substrate mounting surface, and a suction path communicating with the holes is provided.

A second invention is a spinner head that is connected to a motor and has a smooth disk substrate mounting surface for adsorbing and mounting a disk substrate in order to apply a coating liquid to the disk substrate using a spinner. The diameter of the surface is smaller than the diameter of the effective area of the coating film, a plurality of holes are provided on the disk substrate mounting surface, a suction path is provided communicating with the holes, and the hole is in contact with the disk substrate. This is a spinner head characterized by being provided with an elastic member.

(2) Specific Structure of the Invention The specific structure of the present invention will be explained in detail below according to the embodiment shown in FIGS. 1 and 2.

FIG. 1 and FIG. 2 are for explaining the present invention,
FIG. 1 is a vertical cross-sectional view of the spinner head, and FIG. 2 is a vertical cross-sectional view when a disk substrate is set in the spinner head.

In FIG. 1, a spinner head 1 has a base portion 2 and a disk substrate mounting portion 3. As shown in FIG. The disk substrate mounting section 3 has a smooth and circular disk substrate mounting surface 35 on which the disk substrate 8 is mounted.

Further, the disk substrate mounting section 3 has a plurality of holes 5. A suction path 7 is formed in the base portion 2 and the disk substrate mounting portion 3 in communication with the hole portion 5 .

Preferably, the hole 5 is provided with an elastic member that contacts the disk substrate 8. Thereby, the disk substrate 8 can be more reliably fixed by suction.

As such an elastic member, for example, a suction cup 6 may be provided in the hole 5 in communication with the suction path 7 as shown in the figure.
Alternatively, in the cylindrical part of the hole 5 that comes into contact with the disk substrate 8,
An 0-ring (not shown) may also be provided.

The suction path 7 communicates with a suction pump (not shown), and suctions and fixes the disk substrate 8 to the mounting surface 35 of the disk substrate mounting section 3 via the hole 5 or an elastic member provided in the hole 5. .

In this case, a known sealing mechanism is disposed at the lower outlet 5 of the suction path 7, and the suction passage 7 is communicated with an external suction pump (not shown) via the sealing mechanism (not shown).

In addition, at the center of the disk substrate mounting surface 35, although not necessarily required, a convex portion 38 for positioning the rotational shaft insertion opening on the inner circumferential portion of the substrate 8 may be provided as shown in the figure.

Note that the base portion 2 is connected to a motor (not shown) by known means such as screwing or groove alignment.

The disk substrate mounting surface 35 of the spinner head described above is disk-shaped, and its diameter may be smaller than the diameter of the effective area of the coating film 9 (for example, the recording surface of an optical disk), and is usually about 20 to 100 mm. shall be. Moreover, by doing this, the influence of motor heat generation is eliminated.

The holes 5 provided in the disk board mounting part 3 are preferably 2 to 6 at regular intervals in the circumferential direction of the disk board mounting surface 35.
It is sufficient to provide at least one. In addition, the hole diameter is 1-10m.
It should be about m.

In this way, by providing a plurality of holes 5 in a scattered manner, preferably in the circumferential direction, and performing substrate suction using these, the suction area is reduced compared to when holes are continuously provided in a ring shape. This reduces the effect of warping of the substrate, making suction and holding much more stable.

In addition, in the illustration, the disk board mounting portion 3 has a disk shape, and the base 2 connected thereto has a cylindrical shape with a smaller diameter, but even if the diameter of the base 2 is the same, it has a larger diameter. It may be.

In FIG. 2, a disk substrate 8 is set on a spinner head l. The disk substrate 8 is suctioned and fixed to the disk substrate mounting surface 35 by suction force in the direction of arrow (b) by an external suction pump (not shown), and rotates in the direction of arrow a.

■Specific Effects of the Invention The spinner head 1 of the present invention attracts and fixes the disk substrate 8 at its center via the hole 5 or the elastic member, so even if the disk substrate has some warpage or undulation, The disk substrate can be held reliably and well.
In this case, compared to the conventional example shown in FIG. 4 in which the entire surface of the disk substrate 8 is mounted, the disk substrate has more warpage at the outer periphery, so that the substrate can be held much more stably.

Further, heat from a part of the motor is hardly transmitted to the effective coating film area of the disk substrate.

Therefore, the coating film 9 can be stably applied to a predetermined thickness by dropping the coating liquid onto the disk substrate according to a conventional method using the spinner head of the present invention.

Note that the rotation speed is approximately 2.00 to 6000 r, p, m.

As the disk substrate 8, a resin plate, a glass plate, a metal plate, etc. can be used depending on the purpose. For optical recording discs,
This disk substrate is preferably made of acrylic resin, polycarbonate resin, nylon, or the like.

Further, examples of coating materials include recording layers for optical recording disks, recording layers for magnetic disks, protective layers for various disks, and various resists.

In the case of an optical recording disk, the recording layer may be of various types, but preferably consists of a dye alone or a dye composition.

The dye to be used may be appropriately determined from among those that effectively absorb the wavelengths of the writing light and reading light. In this case, these light sources are
Since it is preferable to use a semiconductor laser because the device can be made smaller, the dyes may be cyanine-based, phthalocyanine-based, anthraquinone-based, azo-based, triphenylmethane-based,
Pyrylium or thiapyrylium salts are preferred.

Further, when the dye composition is used as a recording layer, it can contain a self-oxidizing resin such as nitrocellulose, or a thermoplastic resin such as polystyrene or nylon. Furthermore, a quencher may be included in order to prevent oxidative deterioration of the dye. Furthermore, other additives may also be included.

In such a case, a mixture of an indolenine cyanine dye and a quencher such as bisphenyldithiol is particularly preferred.

It is also preferable to use these as an ionic combination of a cation of a dye and an anion of a quencher, or a mixture of this and a dye.

(2) Specific Effects of the Invention The spinner head of the present invention exhibits the following effects in spinner coating of a coating liquid onto a disk substrate.

(1) Since the disk substrate 8 is suctioned and fixed at its center, the disk substrate can be held reliably and well even if the disk substrate has some warpage or undulation, and stable coating can be performed.

(2) Furthermore, since the disk is attracted through a small diameter hole in the center, the influence of warping of the disk substrate is further reduced, and the substrate holding becomes extremely stable.

(3) If an elastic member is provided in the hole, the substrate can be held even more stably.

(4) Since only the center portion of the disk substrate is in contact with the spinner head, the heat from a portion of the motor is hardly transmitted through the spinner head and reaches the coating area of the disk substrate.

Therefore, the drying rate of the coating film is stable and there is no variation in film thickness.

(5) Since the disk substrate is attached and detached by suction, operation is easy, and there is no dust generation due to the sliding of spinner head parts, so there is no adverse effect on the coating film.

(6) The spinner head is small, the power of the motor is low, the power consumption is low, and the device is small.

When an indolenine cyanine dye was applied to an 8-inch acrylic resin disk at a film thickness of 0.06 Jj.m using toluene/dichloroethane as a solvent using the spinner head with a disk substrate mounting surface diameter of 70 mm according to the present invention, coating unevenness was observed. There wasn't any. On the other hand, when coating was performed in the same manner as above using a conventional spinner head with a diameter of 8 inches on the disk substrate mounting surface, uneven coating occurred due to heat at the local edges of the suction portion.

As described above, the spinner head of the present invention enables stable coating film formation in spinner coating on a disk substrate.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing one embodiment of the spinner head of the present invention. FIG. 2 is a longitudinal sectional view showing a state in which a disk substrate is set in the spinner head shown in FIG. 1. FIGS. 3 and 4 are longitudinal cross-sectional views showing conventional spinner heads, respectively. Explanation of symbols 1...Spinner head, 2...Base, 3...Disk board mounting part, 35...Disc board mounting surface, 38...Inner circumference rotation shaft fitting inlet position of disc board Convex portion for mating, 5...hole, 6...suction cup. 7...Suction path, 8...Disk substrate, 9...Coating film, 4...Chuck, 45...Threaded portion, a...Rotation direction, b... Suction direction Applicant: TDC Co., Ltd. FIG, I FIG, 2 (-)a

Claims (2)

[Claims] (1) A spinner head that is connected to a motor and has a smooth disk substrate mounting surface for adsorbing and mounting the disk substrate in order to apply a spinner coat with a coating liquid to the disk substrate, and the spinner head has a diameter of the disk substrate mounting surface. is smaller than the effective area diameter of the coating film, a plurality of holes are provided on the disk substrate mounting surface, and a suction path is provided that communicates with the holes. (2) A spinner head that is connected to a motor and has a smooth disk substrate mounting surface for adsorbing and mounting the disk substrate in order to apply a spinner coating to the disk substrate with a coating liquid, the spinner head having a diameter of the disk substrate mounting surface. is smaller than the diameter of the effective area of the coating film, a plurality of holes are provided on the disk substrate mounting surface, a suction path communicating with the holes is provided, and an elastic member is provided in the hole to contact with the disk substrate. A spinner head characterized by the following.