JPS6126834A - 静電容量型圧力センサ - Google Patents

静電容量型圧力センサ

Info

Publication number
JPS6126834A
JPS6126834A JP14886484A JP14886484A JPS6126834A JP S6126834 A JPS6126834 A JP S6126834A JP 14886484 A JP14886484 A JP 14886484A JP 14886484 A JP14886484 A JP 14886484A JP S6126834 A JPS6126834 A JP S6126834A
Authority
JP
Japan
Prior art keywords
pressure
base
coil
spiral coil
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14886484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582540B2 (enrdf_load_html_response
Inventor
Isao Iwasaki
功 岩崎
Toshiyuki Matsunaka
敏行 松中
Hide Kobayashi
秀 小林
Akira Arakawa
彰 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP14886484A priority Critical patent/JPS6126834A/ja
Publication of JPS6126834A publication Critical patent/JPS6126834A/ja
Publication of JPH0582540B2 publication Critical patent/JPH0582540B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP14886484A 1984-07-17 1984-07-17 静電容量型圧力センサ Granted JPS6126834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14886484A JPS6126834A (ja) 1984-07-17 1984-07-17 静電容量型圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14886484A JPS6126834A (ja) 1984-07-17 1984-07-17 静電容量型圧力センサ

Publications (2)

Publication Number Publication Date
JPS6126834A true JPS6126834A (ja) 1986-02-06
JPH0582540B2 JPH0582540B2 (enrdf_load_html_response) 1993-11-19

Family

ID=15462440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14886484A Granted JPS6126834A (ja) 1984-07-17 1984-07-17 静電容量型圧力センサ

Country Status (1)

Country Link
JP (1) JPS6126834A (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990715A (en) * 1988-02-11 1991-02-05 The British Petroleum Company P.L.C. Zeolite catalysts suitable for hydrocarbon conversion
US6053057A (en) * 1990-10-12 2000-04-25 Okada; Kazuhiro Force detector
WO2007099928A1 (ja) * 2006-03-02 2007-09-07 Alps Electric Co., Ltd. 広帯域発振器
JP2014517316A (ja) * 2011-06-21 2014-07-17 ローベルト ボッシュ ゲゼルシャフト ミット ベシュレンクテル ハフツング 測定室内の流状媒体の圧力を検知するための圧力センサ装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990715A (en) * 1988-02-11 1991-02-05 The British Petroleum Company P.L.C. Zeolite catalysts suitable for hydrocarbon conversion
US6053057A (en) * 1990-10-12 2000-04-25 Okada; Kazuhiro Force detector
US7533582B2 (en) 1990-10-12 2009-05-19 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
WO2007099928A1 (ja) * 2006-03-02 2007-09-07 Alps Electric Co., Ltd. 広帯域発振器
JP2014517316A (ja) * 2011-06-21 2014-07-17 ローベルト ボッシュ ゲゼルシャフト ミット ベシュレンクテル ハフツング 測定室内の流状媒体の圧力を検知するための圧力センサ装置

Also Published As

Publication number Publication date
JPH0582540B2 (enrdf_load_html_response) 1993-11-19

Similar Documents

Publication Publication Date Title
EP0412100B1 (en) Capacitive pressure sensor
US7427819B2 (en) Film-bulk acoustic wave resonator with motion plate and method
EP0640818B1 (en) Pressure sensor
US3965746A (en) Pressure transducer
EP0740777B1 (en) Screened capacitive sensor
Ko Solid-state capacitive pressure transducers
JPH0324793B2 (enrdf_load_html_response)
JPS60195829A (ja) 静電容量形絶対圧力検出器
JPS6227636A (ja) 圧力変換器
CN1129980A (zh) 电容压力传感器
EP0143702A3 (fr) Capteur inductif de pression différentielle
JPS6126834A (ja) 静電容量型圧力センサ
CN116659711B (zh) Mems压力传感器及电子设备
JPH0465645A (ja) 圧力センサアレイ
JPS62228927A (ja) 圧力センサ
JPH0495743A (ja) 静電容量式差圧検出器
JPH02195223A (ja) 圧力センサ素子
JPS5844324A (ja) 静電容量形圧力トランスジユ−サ
JPS6294988A (ja) 電界効果型圧力センサ
JPH05142079A (ja) 静電容量式差圧検出装置
JPS59195537U (ja) 差圧伝送器
JPS58221138A (ja) 圧力センサ
JPH0158114U (enrdf_load_html_response)
JP2000292291A (ja) 密閉容器の内部圧力検出用センサ
JPS59163513A (ja) 静電容量式センサ