JPS61260106A - ３次元計測方法および装置 - Google Patents

３次元計測方法および装置

Info

Publication number
JPS61260106A
JPS61260106A JP10148185A JP10148185A JPS61260106A JP S61260106 A JPS61260106 A JP S61260106A JP 10148185 A JP10148185 A JP 10148185A JP 10148185 A JP10148185 A JP 10148185A JP S61260106 A JPS61260106 A JP S61260106A
Authority
JP
Japan
Prior art keywords
scanning
laser
measured
striped pattern
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10148185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525043B2 (enExample
Inventor
Shigeru Kawai
滋 河合
Keiichi Kubota
恵一 窪田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10148185A priority Critical patent/JPS61260106A/ja
Publication of JPS61260106A publication Critical patent/JPS61260106A/ja
Publication of JPH0525043B2 publication Critical patent/JPH0525043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10148185A 1985-05-15 1985-05-15 ３次元計測方法および装置 Granted JPS61260106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10148185A JPS61260106A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10148185A JPS61260106A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Publications (2)

Publication Number Publication Date
JPS61260106A true JPS61260106A (ja) 1986-11-18
JPH0525043B2 JPH0525043B2 (enExample) 1993-04-09

Family

ID=14301906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10148185A Granted JPS61260106A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Country Status (1)

Country Link
JP (1) JPS61260106A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008216039A (ja) * 2007-03-05 2008-09-18 Nikon Corp 形状測定方法および形状測定装置
CN109323665A (zh) * 2018-01-31 2019-02-12 黑龙江科技大学 一种线结构光驱动全息干涉的精密三维测量方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008216039A (ja) * 2007-03-05 2008-09-18 Nikon Corp 形状測定方法および形状測定装置
CN109323665A (zh) * 2018-01-31 2019-02-12 黑龙江科技大学 一种线结构光驱动全息干涉的精密三维测量方法
CN109323665B (zh) * 2018-01-31 2020-03-27 黑龙江科技大学 一种线结构光驱动全息干涉的精密三维测量方法

Also Published As

Publication number Publication date
JPH0525043B2 (enExample) 1993-04-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term