JPS6125767A - Work holding mechanism in surface polishing machine - Google Patents

Abstract

PURPOSE:To polish a work smoothly by providing an Oldham's coupling between the work holding section having convex face and the supporting section having concave section engagable slidably with the convex section. CONSTITUTION:Semi-spherical member 33 of press board 34 is engaged slidably in the concave section 32a made in the lower end flange 32 of spline shaft 31 to adsorb a material 20 through a hole 35 communicated with a tube 19 to the press board 34. The projection 38 of the flange 32 is engaged with the groove 37 of an intermediate body 37 to enable horizontal sliding of an annular intermediate body 37 while the groove 40 and the projection 41 are engaged in the perpendicular direction to constitute an Oldham's coupling between the flange 32 and the pressboard 34 where the pressboard 34 will rotate along the spline shaft 31. Since slight gap is provided axially in the coupling 42, the pressboard 34 can incline slightly in accordance to the waving of the polishing face 22 while since it can move horizontally, inclination of the pressboard 34 will never cause considerable frictional force resulting in smooth polishing.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a workpiece holding mechanism for a flat surface polishing apparatus, and particularly to a workpiece holding mechanism for a flat surface polishing apparatus for polishing the surface of a thin plate.

[Prior art]

Generally, the workpiece holding mechanism of a flat surface polishing device includes a holding part that holds the workpiece on the polishing surface of the flat surface polishing device, and slides the workpiece on the polishing surface. The surface is polished.

FIG. 3 is a longitudinal sectional view of a workpiece holding mechanism of a conventional surface polishing apparatus. In FIG. 3, a disk 1 of a surface polishing device is rotated about an axis 2. In FIG.

On the other hand, a sleeve 4 is rotatably attached to the frame 3 of the surface polishing device, and a spline shaft 5 is movable in the axial direction in the shaft hole of the sleeve 4, and rotates together with the sleeve 4 around the shaft. It is installed like this. A lever 7 attached to an air cylinder 6 provided on the frame 3 is rotatably engaged with the spline shaft 5. Further, a gear 9 attached to a motor 8 provided on the frame 3 meshes with a gear 10 provided on the sleeve 4.

A hemisphere 1 is placed in a spherical recess provided at the tip of the spline shaft 5.
1 is slidably engaged. Suppression plate 12 on hemisphere 11
is fixed, and a frame 13 is provided on the suppression plate 12.

A pin 14 provided on the frame 13 engages with a groove 15 provided at the tip of the spline shaft 5. A compression spring 16 provided between the spline shaft 5 and the frame 13 acts to press the hemisphere 11 against the spline shaft 5, and prevents the hemisphere 11 from falling when the sleeve shaft 5 rises. .

A conduction hole 17 provided in the pressing plate 12 and a conduction hole 18 provided between the hemisphere 11 and the suppression plate 12 are connected to the spline shaft 3.
A vacuum pump (not shown) is connected to the material 20 of the magnetic desk, which is the workpiece, through a pipe 19 passing through a hole provided in the
This is for vacuum suctioning the pressure plate 12 to the pressure plate 12. Further, a ring 21 is fixed to the press plate 12 in order to determine the position of the material 20.

To polish the surface of the material 20 with this flat surface polishing device, the air cylinder 6 is operated to raise the suppressing plate 12, and the material 20 is vacuum-adsorbed inside the ring 21 on the lower surface of the pressing plate 12. Next, the suppression plate 1 is rotated by the motor 8.
2 is lowered by the air cylinder 6, and the material 20 is placed in the disk 1.
Press it against the polishing surface 22 of. Further, although not shown in the figure, a polishing liquid is sprinkled on the polishing surface 22. Therefore, the lower surface of the material 20 is polished by its own rotation and sliding movement due to the rotation of the disk 1.

The polished surface 22 of the disk l is processed to be flat, but in reality, slight undulations are often left. Therefore, in order to keep the material 20 in close contact with the polishing surface 22 and polishing it smoothly, it is necessary to allow the material 20 and the pressing plate 2 to tilt somewhat according to the undulations of the polishing surface 22. This inclination is obtained by sliding the spline axis of the hemisphere 11 with the spherical recess, and the hemisphere 11
Since the center C of the spherical surface of is set to be located on the bottom surface of the material 20, the material 20 is tilted about the center C,
Even if the material 20 is tilted, the lower surface of the material 20 can be polished without changing its position.

Note that the tube 19 has elasticity and can absorb some inclination of the hemisphere 11. Also, since the hemisphere 11 slides on the spline shaft 5, the engagement between the pin 14 and the groove 15 causes the press plate 1 to
The rotation by the motor 8 is transmitted to the material 2 and the material 20.

[Problem that the invention seeks to solve]

However, the followability of the pressing plate 12 and the polished surface 22 of the material 20 to the undulations was not very good. One of the reasons for this is that a large frictional force is generated between the bottle 14 and the groove 15. FIG. 4 is a schematic diagram for explaining the force acting on the bottle 14, and corresponds to the right side view of the main part of FIG. 3. When the spline shaft 5 is rotating as shown by arrow a in FIG. 4, a force that balances the frictional force between the material 20 and the polishing surface 22 is applied to the groove 15 by the pin 14. Furthermore, the polished surface 2
2, the right side is opened between the material 20 and the polished surface 22 as shown in FIG. 4, and the piston 6
Assuming that force P is applied by , force P acts upward on the left end of the material 20 . Center C of the spherical surface of hemisphere 11 and material 2
The dimension to the left end of d1 is the height from the center C to the bottle 14, and h is the balance of moments around the center C.A force of #-ty also acts on the bottle 14. In reality, this force P becomes quite large, so a large force also acts on the bottle 14, causing a large frictional force.

In addition, in FIG. 4, the bottle 14 is always pushed leftward by the groove 15, and the pressing plate 12 is swung around the bottle 14 according to the undulations of the polishing surface 22, relative to the spline shaft 5. In addition, the root l of the bottle 14 is displaced from side to side, resulting in fluctuations in the rotation of the suppressing plate 12, which is a drawback.

The purpose of the present invention is to eliminate the above-mentioned drawbacks, to have good followability to the undulations of the polishing surface due to the inclination of the workpiece, and to be able to polish the workpiece smoothly by reducing rotational fluctuations of the workpiece. An object of the present invention is to provide a workpiece holding mechanism for a flat surface polishing apparatus.

[Means for Solving the Problems] The present invention holds a workpiece 20 on the polishing surface of a flat surface polishing device, and has a convex spherical surface centered at a point on the surface of the workpiece 20. a holding part 34; a supporting part 32 which is provided to maintain a constant posture and has a concave spherical surface that is centered at a point on the workpiece and slidably engages with the convex spherical surface; the holding part and the supporting part. It has an Oldham joint 42 provided between the two.

[Effect]

By tilting the holding part with respect to the support part via the Oldham joint 42, the ability to follow the undulations of the polished surface is improved and rotational fluctuations of the workpiece are reduced.

[Explanation of Examples]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a longitudinal sectional view of an embodiment of the present invention.

The disk 1, shaft 2, frame 3, sleeve 4, air cylinder 6, lever 7, motor 8, and gears 9 and 10 are the same as those shown in FIG. The spline shaft 31 is attached to the sleeve 4 so as to be slidable in the axial direction and to rotate integrally around the shaft K.

A hemisphere 33 is slidably engaged with a concave spherical surface 32a provided on a flange 32 (supporting portion) at the lower end of the spline shaft 31. A suppression plate 34 (holding portion) is fixed to the hemisphere 33. The through hole 35 of the press plate 34 is connected to the pipe 19 and serves to attract the material 20 to the press plate 34. The tension spring 36 has both ends attached to the spline shaft 31 and the spherical body 33, and presses the spherical body 33 against the flange 32. FIG. 2 shows the flange 32 and tension 9 of this embodiment.
FIG. 7 is a plan view with a portion above the spring 36 removed.

An annular intermediate body 37 is arranged between the periphery of the flange 32 and the press plate 34. A protruding portion 38 provided on the flange 32 so that the intermediate body 37 can slide in the horizontal direction
The groove 39 of the intermediate body 37 is engaged with the groove 39 of the intermediate body 37. Also, intermediate 37
A protruding strip 41 provided on the suppression plate 34 is slidably engaged with a groove 40 provided in the horizontal direction and perpendicular to the groove 39 . Therefore, the flange 32, the intermediate body 37, and the suppressing plate 34
These constitute an Oldham joint 42, and the suppression plate 34 rotates according to the flange 32 and the spline shaft 31. Moreover, by providing a slight gap 43 in the axial direction of the Oldham joint 42, the pressing plate 34 can be tilted within a very small range according to the undulations of the polished surface 22. Furthermore, since the Oldham joint 420 function allows the suppression plate 34 to move horizontally with respect to the flange 32, the pin 14 and groove 1 shown in FIG.
5, no large frictional force is generated even when the pressing plate 34 is tilted, and the pressing plate 12 and the polishing surface 22 of the material 20 can follow the undulations well.

The present invention can also be applied to a flat surface polishing apparatus in which the disc is fixed and the suppressing plate 34 and the like rotate together with the frame 3 about the shaft 12.

Further, a steel ball or the like may be interposed between the concave spherical surface of the flange 32 and the convex spherical surface of the hemisphere 33 to reduce the frictional force.

〔Effect of the invention〕

As explained above, the workpiece holding mechanism of the surface polishing apparatus of the present invention provides an Oldham joint instead of the groove and pin engagement, thereby eliminating the generation of large frictional force between the groove and the pin. The holding portion is tilted, and the tilt of the workpiece can be better followed with respect to the undulations of the polished surface.

In addition, when the holding part is tilted, it no longer swings about the pin, making it possible to significantly reduce fluctuations in the rotational speed of the workpiece, which has the effect of smoothly polishing the workpiece.

[Brief explanation of drawings]

Figures 1 and 2 are a longitudinal sectional view and a plan view of an embodiment of the present invention, respectively, with the upper part removed from the flange and compression spring, and Figure 3 is an example of a conventional workpiece holding mechanism for a surface polishing device. FIG. 4 is a schematic diagram for explaining the force acting on the example pin shown in FIG. 3. 1... Disc, 5, 31 Spline shaft, 11, 33
- Hemisphere, 12, 34 Pressing plate, 14 - Pin, 15
・Groove, 2o Material, 37 ・Intermediate, 38, 41...
Convex portions, 39, 40, grooves, 42...Oldham joint patent applicant NEC Corporation Figure 2 Figure 4

Claims (1)

[Claims] (1) A holding part that holds a workpiece on the polishing surface of the flat surface polishing apparatus and has a convex spherical surface centered at a point on the surface of the workpiece, and a holding part that is provided to maintain a constant posture. It is characterized by having a support part having a concave spherical surface centered at one point on the workpiece and slidably engaged with the convex spherical surface, and an Oldham joint provided between the holding part and the support part. Workpiece holding mechanism for surface polishing equipment.