JPS61239078A - Seal apparatus in reactor for continuous low temperature plasma treatment - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a sealing device for a reactor for continuously subjecting fabric to low-temperature plasma treatment.

[Background of the invention]

Traditionally, industrial fabrics such as woven fabrics, knitted fabrics, and non-woven fabrics have been processed continuously, for example, in the process before dyeing, by removing water-repellent impurities attached to the fibers or making the fabric hydrophilic so that the dye solution can be easily applied to the fabric. There is a scouring process to infiltrate the dye, and a finishing process to impart properties such as flexibility, water repellency, antistatic, antifouling, and water absorption after dyeing, but both processes are water-based treatments. . For this reason, this type of conventional treatment process requires a large amount of heat, and furthermore, in the case of the scouring process, residual liquid contained in the treated fabric,
Alternatively, a large number of water washers are required to remove impurities and/or deposits, a large amount of water resources are required to be supplied to each of these washers, and a device is required to dispose of the washed waste liquid. Currently, processing of fabrics requires a large amount of water resources, heat energy equipment, etc., which is expensive. Furthermore, since the waste liquid discharged from the water washing machine inevitably contains chemicals, problems such as waste liquid pollution arise, and processing of the waste liquid also requires a large amount of equipment costs.
Due to high labor costs, it was not economically viable, especially in the textile processing industry.

For this reason, it has recently been proposed to treat 4m fiber products such as fabrics in a low-temperature plasma atmosphere to obtain, for example, desizing, scouring effects, or finishing effects. During plasma treatment, the inside of the reactor is kept under good pressure (
In order to maintain the inside of the reactor at a predetermined reduced pressure state (for example, 10 to 2 Torr or less) while continuously passing the fabric to be treated into the reactor, is influenced by the sealing performance of the sealing device in the reactor.

[Purpose of the invention]

The present invention has been made in view of the above, and allows continuous transfer of fabric through the fabric inlet and fabric outlet of a reactor for continuous low-temperature plasma treatment of fabric, but maintains a constant and good reduced pressure state within the reactor. The object of the present invention is to provide a sealing device for a reactor for low-temperature plasma processing that can be maintained.

[Fruit of invention/S example]

The present invention will be explained in detail below based on embodiments shown in the drawings.

1 is a reactor for low-temperature plasma treatment (hereinafter simply referred to as the reactor), and inside this reactor 1, there are electrode plates, gas supply ports, fabric guide rolls, etc. for creating a low-temperature plasma atmosphere. However, since the low-temperature plasma generation structure inside the reactor 1 is not the gist of the present invention, a description of its structure will be omitted. The reactor 1 is provided with a fabric inlet 2 and a fabric outlet 3 through which the fabric can be passed continuously. A sealing machine with the same structure that can maintain a reduced pressure inside! ! #4 is provided. This sealing machine @4 has seal blocks 5e5tv installed vertically.
A cylindrical fabric insertion passage extending upwardly and downwardly is formed by 5 holes, and a partition wall 7°71.7. has fabric insertion holes 6 between each seal block of the fabric insertion passage. This partition wall 7+7! e 7S is a decompression chamber 8,
81,8. is formed. 9°9,. 9. is bulkhead 7
．． 7t and 7m, there are multiple pairs of seal rolls rotatably provided via the frame 10 and facing each other in pressure contact with each other.
+91 +91 is made of metal or rubber. 11 is seal roll 9+91+91
The elastic seal piece is interposed between the frame 10 and the seal rolls, and a part of the seal roll is airtightly fixed to the frame 10, and the other part is an elastic seal piece that is pressed in the direction of the generatrix of the seal roll. . That is, this elastic seal piece 11 is
Each seal roll is in contact with a high pressure side pressure receiving surface. 12 is a seal roll, an elastic seal piece 11, and an end seal plate that is in elastic contact with the end face of the frame IO;
13 is a pressure reducing pipe, and 14 is a fabric.

Next, to describe its function, the fabric 14 is introduced from the outside into the reactor 1 or led out from the reactor to the outside through a plurality of pairs of seal rolls arranged in the seal mechanism 4. The mechanism 4 has a plurality of vacuum chambers 8.8.8 through each sealing roll. ．． 8. If the pressure inside each vacuum chamber is reduced through the vacuum vibrator 13 communicating with each vacuum chamber, the pressure within the vacuum chamber 8 will be lower than the internal pressure of the vacuum chamber 8.
The internal pressure in the vacuum chamber is low, and the pressure in the vacuum chamber is also low. The internal pressure of the reactor 1 is low, and therefore the interior of the reactor 1 can be maintained at a desired reduced pressure atmosphere. Further, the elastic seal piece 11 that is pressed against each seal roll 9, 91, 91 is connected to each seal roll 9+9.
Since each seal roll 9.9 is in contact with the high-pressure side pressure receiving surface of 9.9m when the reactor 1 is in operation.
The close contact force between □9□ and the elastic seal piece 11 is increased, and thereby the reduced pressure state in the reaction @Sl can be effectively maintained, and a favorable low-temperature plasma atmosphere can be ensured.

[Summary of the Invention] As described above, the present invention provides a method in which a plurality of decompression chambers each having a series of fabric transfer paths are provided in stages at the fabric inlet and fabric outlet of a low-temperature plasma reactor through which fabric can be passed continuously. , a pair of seal rolls are disposed close to the fabric insertion hole penetrating the partition wall of each decompression chamber, and are arranged to close the fabric insertion hole and press against each other; This is a sealing device for a reactor for continuous low-temperature plasma processing, characterized by providing an elastic seal piece that is pressed against the pressure part of a seal roll.

〔Effect of the invention〕

Therefore, according to this sealing device, the sealing mechanism consisting of a plurality of decompression chambers effectively performs a depressurizing sealing action within the reactor, and the elastic seal piece that is pressed against each seal roll is Since the pressure-receiving surface on the high-pressure side and the pressure-contact portion of the seal roll are brought into close contact with each other, the contact force between each seal roll and the elastic seal piece is increased during operation of the reactor, and the peeling causes the reactor to This has the effect of effectively maintaining a reduced pressure state inside the chamber and ensuring a good low-temperature plasma atmosphere.

[Brief explanation of drawings]

FIG. 1 is an overall explanatory diagram showing an embodiment of a low temperature plasma processing apparatus equipped with a sealing mechanism according to the present invention.
The figure is an enlarged sectional view of only the sealing device. 1...Reactor 2...Fabric introduction port 3...
Fabric outlet 4...Seal mechanism"#51p5t・
...Seal block 6...Fabric insertion hole 7, 71, 7. ...Bulkhead 8
．． 8. ．． 8.Decompression chamber 9.9 Electric, 9.Seal roll 10.Frame 11.Elastic seal piece 12
... End seal plate 13 ... Decompression pipe 14 ...
fabric.

Claims (1)

[Claims] A plurality of vacuum chambers each having a series of fabric transfer paths are provided in stages at the fabric inlet and fabric outlet of a low-temperature plasma reactor through which fabric can be passed continuously, and are adjacent to fabric insertion holes that penetrate the partition walls of each vacuum chamber. Then, a pair of seal rolls which close the fabric insertion hole and are pressed against each other are arranged, and an elastic seal piece is pressed against the high pressure receiving surface of these seal rolls and at a position close to the pressure contact part of the seal roll. A sealing device for a reactor for continuous low-temperature plasma processing, characterized by being provided with.