JPS61235707A - 膜厚測定装置 - Google Patents

膜厚測定装置

Info

Publication number
JPS61235707A
JPS61235707A JP60076712A JP7671285A JPS61235707A JP S61235707 A JPS61235707 A JP S61235707A JP 60076712 A JP60076712 A JP 60076712A JP 7671285 A JP7671285 A JP 7671285A JP S61235707 A JPS61235707 A JP S61235707A
Authority
JP
Japan
Prior art keywords
light
film thickness
parallel
measurement
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60076712A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04522B2 (enrdf_load_stackoverflow
Inventor
Chikayasu Yamazaki
山崎　親康
Mutsumi Hayashi
睦 林
Ichiro Kumo
一郎 雲
Jun Torikai
潤 鳥飼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP60076712A priority Critical patent/JPS61235707A/ja
Publication of JPS61235707A publication Critical patent/JPS61235707A/ja
Publication of JPH04522B2 publication Critical patent/JPH04522B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
JP60076712A 1985-04-12 1985-04-12 膜厚測定装置 Granted JPS61235707A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60076712A JPS61235707A (ja) 1985-04-12 1985-04-12 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60076712A JPS61235707A (ja) 1985-04-12 1985-04-12 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS61235707A true JPS61235707A (ja) 1986-10-21
JPH04522B2 JPH04522B2 (enrdf_load_stackoverflow) 1992-01-07

Family

ID=13613153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60076712A Granted JPS61235707A (ja) 1985-04-12 1985-04-12 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS61235707A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227861A (en) * 1989-09-25 1993-07-13 Mitsubishi Denki Kabushiki Kaisha Apparatus for and method of evaluating multilayer thin film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1319492B1 (en) 2000-09-21 2009-04-15 Toray Industries, Inc. Method of manufacturing sheet, device and program for controlling sheet thickness, and sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227861A (en) * 1989-09-25 1993-07-13 Mitsubishi Denki Kabushiki Kaisha Apparatus for and method of evaluating multilayer thin film

Also Published As

Publication number Publication date
JPH04522B2 (enrdf_load_stackoverflow) 1992-01-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees