JPH04522B2 - - Google Patents
Info
- Publication number
- JPH04522B2 JPH04522B2 JP60076712A JP7671285A JPH04522B2 JP H04522 B2 JPH04522 B2 JP H04522B2 JP 60076712 A JP60076712 A JP 60076712A JP 7671285 A JP7671285 A JP 7671285A JP H04522 B2 JPH04522 B2 JP H04522B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- parallel
- film thickness
- lens
- optical fibers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60076712A JPS61235707A (ja) | 1985-04-12 | 1985-04-12 | 膜厚測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60076712A JPS61235707A (ja) | 1985-04-12 | 1985-04-12 | 膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61235707A JPS61235707A (ja) | 1986-10-21 |
JPH04522B2 true JPH04522B2 (enrdf_load_stackoverflow) | 1992-01-07 |
Family
ID=13613153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60076712A Granted JPS61235707A (ja) | 1985-04-12 | 1985-04-12 | 膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61235707A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1987942A2 (en) | 2000-09-21 | 2008-11-05 | Toray Industries Inc. | A sheet obtained by extruding and molding a raw material |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69033111T2 (de) * | 1989-09-25 | 1999-09-09 | Jasco Corp. | Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen |
-
1985
- 1985-04-12 JP JP60076712A patent/JPS61235707A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1987942A2 (en) | 2000-09-21 | 2008-11-05 | Toray Industries Inc. | A sheet obtained by extruding and molding a raw material |
Also Published As
Publication number | Publication date |
---|---|
JPS61235707A (ja) | 1986-10-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |