JPS61225637A - 高周波プラズマ発光分析装置 - Google Patents

高周波プラズマ発光分析装置

Info

Publication number
JPS61225637A
JPS61225637A JP6624285A JP6624285A JPS61225637A JP S61225637 A JPS61225637 A JP S61225637A JP 6624285 A JP6624285 A JP 6624285A JP 6624285 A JP6624285 A JP 6624285A JP S61225637 A JPS61225637 A JP S61225637A
Authority
JP
Japan
Prior art keywords
port
chamber
cleaning
cleaning liquid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6624285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545140B2 (enrdf_load_stackoverflow
Inventor
Haruo Mizukami
水上　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6624285A priority Critical patent/JPS61225637A/ja
Publication of JPS61225637A publication Critical patent/JPS61225637A/ja
Publication of JPH0545140B2 publication Critical patent/JPH0545140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP6624285A 1985-03-29 1985-03-29 高周波プラズマ発光分析装置 Granted JPS61225637A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6624285A JPS61225637A (ja) 1985-03-29 1985-03-29 高周波プラズマ発光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6624285A JPS61225637A (ja) 1985-03-29 1985-03-29 高周波プラズマ発光分析装置

Publications (2)

Publication Number Publication Date
JPS61225637A true JPS61225637A (ja) 1986-10-07
JPH0545140B2 JPH0545140B2 (enrdf_load_stackoverflow) 1993-07-08

Family

ID=13310196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6624285A Granted JPS61225637A (ja) 1985-03-29 1985-03-29 高周波プラズマ発光分析装置

Country Status (1)

Country Link
JP (1) JPS61225637A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0545140B2 (enrdf_load_stackoverflow) 1993-07-08

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