JPS61225637A - 高周波プラズマ発光分析装置 - Google Patents

高周波プラズマ発光分析装置

Info

Publication number
JPS61225637A
JPS61225637A JP6624285A JP6624285A JPS61225637A JP S61225637 A JPS61225637 A JP S61225637A JP 6624285 A JP6624285 A JP 6624285A JP 6624285 A JP6624285 A JP 6624285A JP S61225637 A JPS61225637 A JP S61225637A
Authority
JP
Japan
Prior art keywords
port
chamber
cleaning
cleaning liquid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6624285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545140B2 (enrdf_load_stackoverflow
Inventor
Haruo Mizukami
水上　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6624285A priority Critical patent/JPS61225637A/ja
Publication of JPS61225637A publication Critical patent/JPS61225637A/ja
Publication of JPH0545140B2 publication Critical patent/JPH0545140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP6624285A 1985-03-29 1985-03-29 高周波プラズマ発光分析装置 Granted JPS61225637A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6624285A JPS61225637A (ja) 1985-03-29 1985-03-29 高周波プラズマ発光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6624285A JPS61225637A (ja) 1985-03-29 1985-03-29 高周波プラズマ発光分析装置

Publications (2)

Publication Number Publication Date
JPS61225637A true JPS61225637A (ja) 1986-10-07
JPH0545140B2 JPH0545140B2 (enrdf_load_stackoverflow) 1993-07-08

Family

ID=13310196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6624285A Granted JPS61225637A (ja) 1985-03-29 1985-03-29 高周波プラズマ発光分析装置

Country Status (1)

Country Link
JP (1) JPS61225637A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0545140B2 (enrdf_load_stackoverflow) 1993-07-08

Similar Documents

Publication Publication Date Title
TWI632001B (zh) 二相流霧化噴射清洗裝置
JP5084007B2 (ja) 粒子の分離方法と分離装置
US7611636B2 (en) Ultrasonic solution separating method and ultrasonic separating apparatus used in such method
JP4938357B2 (ja) 洗浄方法と洗浄装置
JPH09253011A (ja) サイクロン式湿式電気掃除機
US6730177B1 (en) Method and apparatus for washing and/or drying using a revolved coanda profile
JPS61225637A (ja) 高周波プラズマ発光分析装置
CA1214099A (en) Apparatus for paint mist removal
JP3721337B2 (ja) レーザ発振器
RU2136352C1 (ru) Оросительный мокрый сепаратор
JPH0244201Y2 (enrdf_load_stackoverflow)
JP3084885B2 (ja) Ｉｃｐ発光分光分析装置
RU2005115000A (ru) Способ смешивания сыпучих материалов и аэродинамическое устройство для его осуществления
JPH1183694A (ja) 微粒子収集装置
JP3980345B2 (ja) 液体微粒子発生用ノズル
JPS60209148A (ja) Ｉｃｐ分析用の密閉循環式チェンバ
JP4691718B2 (ja) 分離装置、及びこれを用いた液体分溜装置
JP2004057968A (ja) 霧化塗料等の分離回収装置
SU1500349A1 (ru) Центробежный мокрый пылеуловитель
JPS6316998Y2 (enrdf_load_stackoverflow)
SU816471A1 (ru) Электроаэрозольный аппарат дл вак-циНАции и ТЕРАпии жиВОТНыХ
JPH05133860A (ja) 分析装置用超音波霧化装置
JPS6339966Y2 (enrdf_load_stackoverflow)
KR200368349Y1 (ko) 웨이퍼용 세정조
JPH05142124A (ja) 試料導入装置