JPS6122531U - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPS6122531U
JPS6122531U JP10533384U JP10533384U JPS6122531U JP S6122531 U JPS6122531 U JP S6122531U JP 10533384 U JP10533384 U JP 10533384U JP 10533384 U JP10533384 U JP 10533384U JP S6122531 U JPS6122531 U JP S6122531U
Authority
JP
Japan
Prior art keywords
vacuum processing
processing equipment
gate valve
air bearing
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10533384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242752Y2 (enrdf_load_stackoverflow
Inventor
義暢 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10533384U priority Critical patent/JPS6122531U/ja
Publication of JPS6122531U publication Critical patent/JPS6122531U/ja
Application granted granted Critical
Publication of JPS6242752Y2 publication Critical patent/JPS6242752Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
JP10533384U 1984-07-12 1984-07-12 真空処理装置 Granted JPS6122531U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10533384U JPS6122531U (ja) 1984-07-12 1984-07-12 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10533384U JPS6122531U (ja) 1984-07-12 1984-07-12 真空処理装置

Publications (2)

Publication Number Publication Date
JPS6122531U true JPS6122531U (ja) 1986-02-10
JPS6242752Y2 JPS6242752Y2 (enrdf_load_stackoverflow) 1987-11-02

Family

ID=30664662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10533384U Granted JPS6122531U (ja) 1984-07-12 1984-07-12 真空処理装置

Country Status (1)

Country Link
JP (1) JPS6122531U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010159164A (ja) * 2008-12-12 2010-07-22 Tokyo Electron Ltd 真空処理装置、真空処理システムおよび処理方法
JP2012224411A (ja) * 2011-04-15 2012-11-15 Daifuku Co Ltd 被搬送物の中継装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010159164A (ja) * 2008-12-12 2010-07-22 Tokyo Electron Ltd 真空処理装置、真空処理システムおよび処理方法
JP2012224411A (ja) * 2011-04-15 2012-11-15 Daifuku Co Ltd 被搬送物の中継装置

Also Published As

Publication number Publication date
JPS6242752Y2 (enrdf_load_stackoverflow) 1987-11-02

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