JPS6122338U - バッチ式アッシャー - Google Patents

バッチ式アッシャー

Info

Publication number
JPS6122338U
JPS6122338U JP10548884U JP10548884U JPS6122338U JP S6122338 U JPS6122338 U JP S6122338U JP 10548884 U JP10548884 U JP 10548884U JP 10548884 U JP10548884 U JP 10548884U JP S6122338 U JPS6122338 U JP S6122338U
Authority
JP
Japan
Prior art keywords
batch type
type plasma
atsher
quartz tube
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10548884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445239Y2 (enExample
Inventor
淳一 荒見
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP10548884U priority Critical patent/JPS6122338U/ja
Publication of JPS6122338U publication Critical patent/JPS6122338U/ja
Application granted granted Critical
Publication of JPH0445239Y2 publication Critical patent/JPH0445239Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10548884U 1984-07-12 1984-07-12 バッチ式アッシャー Granted JPS6122338U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10548884U JPS6122338U (ja) 1984-07-12 1984-07-12 バッチ式アッシャー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10548884U JPS6122338U (ja) 1984-07-12 1984-07-12 バッチ式アッシャー

Publications (2)

Publication Number Publication Date
JPS6122338U true JPS6122338U (ja) 1986-02-08
JPH0445239Y2 JPH0445239Y2 (enExample) 1992-10-23

Family

ID=30664808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10548884U Granted JPS6122338U (ja) 1984-07-12 1984-07-12 バッチ式アッシャー

Country Status (1)

Country Link
JP (1) JPS6122338U (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122373A (enExample) * 1974-08-16 1976-02-23 Int Purazuma Corp
JPS52153665A (en) * 1976-06-16 1977-12-20 Hitachi Ltd Etching method of film
JPS5915072U (ja) * 1982-07-20 1984-01-30 日産自動車株式会社 液晶表示器
JPS5918674U (ja) * 1982-07-28 1984-02-04 石川島播磨重工業株式会社 建設機械等のシユ−ピン抜け止め機構

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122373A (enExample) * 1974-08-16 1976-02-23 Int Purazuma Corp
JPS52153665A (en) * 1976-06-16 1977-12-20 Hitachi Ltd Etching method of film
JPS5915072U (ja) * 1982-07-20 1984-01-30 日産自動車株式会社 液晶表示器
JPS5918674U (ja) * 1982-07-28 1984-02-04 石川島播磨重工業株式会社 建設機械等のシユ−ピン抜け止め機構

Also Published As

Publication number Publication date
JPH0445239Y2 (enExample) 1992-10-23

Similar Documents

Publication Publication Date Title
JPS6122338U (ja) バッチ式アッシャー
JPS6191647U (enExample)
JPS5813513U (ja) 眼鏡用ねじの緩み防止装置
JPS59139763U (ja) 点火プラグの固定装置
JPS5852758U (ja) 四重極質量分析装置
JPS60114958U (ja) ガスクロマトグラフ質量分析装置
JPS5840614U (ja) 脱落防止付止めねじ装置
JPS58190591U (ja) 扉
JPS6114208U (ja) ケ−ス取付装置
JPS5973628U (ja) ボルト
JPS5995234U (ja) 赤外線検出器
JPH03100074U (enExample)
JPS5923515U (ja) 筒状ガスバ−ナ
JPS61207001U (enExample)
JPS5919799U (ja) 網戸等の固定具
JPS59152833U (ja) センサの取付構造
JPS60126655U (ja) 建物用スペ−サ
JPS6138557U (ja) センサ−
JPS6019861U (ja) 仮栓
JPS60193646U (ja) 端子装置
JPH01146446U (enExample)
JPS5819065U (ja) 錠装置におけるストライク
JPS60161867U (ja) 計器箱
JPS60177309U (ja) 鋼板の締付け構造
JPS60158654U (ja) イオン源装置