JPS6122243Y2 - - Google Patents

Info

Publication number
JPS6122243Y2
JPS6122243Y2 JP7366381U JP7366381U JPS6122243Y2 JP S6122243 Y2 JPS6122243 Y2 JP S6122243Y2 JP 7366381 U JP7366381 U JP 7366381U JP 7366381 U JP7366381 U JP 7366381U JP S6122243 Y2 JPS6122243 Y2 JP S6122243Y2
Authority
JP
Japan
Prior art keywords
light
scale
lens
light source
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7366381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57185917U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7366381U priority Critical patent/JPS6122243Y2/ja
Publication of JPS57185917U publication Critical patent/JPS57185917U/ja
Application granted granted Critical
Publication of JPS6122243Y2 publication Critical patent/JPS6122243Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP7366381U 1981-05-21 1981-05-21 Expired JPS6122243Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7366381U JPS6122243Y2 (enrdf_load_stackoverflow) 1981-05-21 1981-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7366381U JPS6122243Y2 (enrdf_load_stackoverflow) 1981-05-21 1981-05-21

Publications (2)

Publication Number Publication Date
JPS57185917U JPS57185917U (enrdf_load_stackoverflow) 1982-11-25
JPS6122243Y2 true JPS6122243Y2 (enrdf_load_stackoverflow) 1986-07-04

Family

ID=29869436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7366381U Expired JPS6122243Y2 (enrdf_load_stackoverflow) 1981-05-21 1981-05-21

Country Status (1)

Country Link
JP (1) JPS6122243Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57185917U (enrdf_load_stackoverflow) 1982-11-25

Similar Documents

Publication Publication Date Title
JP2862417B2 (ja) 変位測定装置及び方法
JP3210111B2 (ja) 変位検出装置
JP2586120B2 (ja) エンコーダー
US5481106A (en) Encoder with an optical scale and interference of zero and first order diffraction beams
JPS6333604A (ja) 相対変位測定装置
JP3144143B2 (ja) 光学式変位測定装置
JP2697919B2 (ja) 信号内挿回路及び該回路を備えた変位測定装置
EP0489399B1 (en) Displacement detector
JPS6122243Y2 (enrdf_load_stackoverflow)
JPH046884B2 (enrdf_load_stackoverflow)
JPS632323B2 (enrdf_load_stackoverflow)
EP0486050B1 (en) Method and apparatus for measuring displacement
JPH05256666A (ja) ロータリーエンコーダー
JPS6234246Y2 (enrdf_load_stackoverflow)
JPH0599638A (ja) 測角装置
JPH0317210Y2 (enrdf_load_stackoverflow)
JPS6244332Y2 (enrdf_load_stackoverflow)
JP2670457B2 (ja) 零点位置検出装置
JPS628489Y2 (enrdf_load_stackoverflow)
JPS6210641Y2 (enrdf_load_stackoverflow)
JPS5999220A (ja) 光電式のエンコ−ダ
JPS6234243Y2 (enrdf_load_stackoverflow)
JPH10103917A (ja) 位置計測装置
JPS6234244Y2 (enrdf_load_stackoverflow)
JP3392898B2 (ja) 格子干渉型変位測定装置