JPS61219901A - Manufacture of multicolor display element - Google Patents

Abstract

PURPOSE:To form a color filter layer with a high accuracy and at a low cost by forming an alignment mark of each color on one or both of a glass substrate and a mask used for an exposure, etc. CONSTITUTION:On a glass substrate 11, color filter layers 12R, 12G and 12B of red, green and blue are formed so as to become a pattern repeated with a prescribed pitch. When forming this filter layer, a photomask 13 is used. Also, on the substrate 11, alignment marks 15R, 15G and 15B of each color are set at a prescribed interval. Moreover, an alignment mark 16 is formed on the mask 13. Subsequently, when forming a color filter layer, first of all, the red filter layer 12R is formed by setting the mask 13 to that the marks 15R and 16 coincide with each other. Next, the mask 13 is set so that the mark 15G and 16 coincide with each other, by which a mask pattern 14 form the green filter layer 12G by its position relation. Next, in this state, the layer 12G is formed, and thereafter, the blue filter layer 12B is formed by setting the mask 13 so that the mark 15B and 16 coincide with each other.

Description

DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a method for manufacturing a full-color liquid crystal display element, and particularly to an improvement in the process of forming a color filter layer on a transparent electrode by a dyeing method.

(Prior Art) In a full-color liquid crystal display element, as shown in FIG. 8, color filter layers 2R, 2G of predetermined colors, for example, red, green, and blue, are formed on transparent electrodes cut into a lath substrate 1.
2B is formed. One of the methods is the dyeing method. This staining method involves applying photosensitive chromosomes (gelatin, etc.) onto a glass substrate with 74 turns of transparent electrodes using a spinner.
After coating with a roll coater or the like, it is exposed using a photomask, and then developed and dyed to obtain a color filter layer.

In the case of full-color display, color filter layers of three colors are required, so exposure is performed using a photomask 3 having a predetermined mask pattern for each color, as shown in FIG. In that case, alignment marks 4 and 5 are formed on the glass substrate 1 and the photomask 3, and alignment is performed using the marks as marks.

However, if a different mask is used for each color in this way, the number of masks corresponding to the number of colors is required, resulting in high costs. Furthermore, the higher the precision of the borehole, the more precise the alignment of the masks is required.

(Object of the invention) The object of the invention is to form a multicolor color filter layer with high precision.
Another object of the present invention is to provide a method for manufacturing a multicolor display element that can be formed at low cost.

(Summary of the Invention) The present invention provides a method for repeating t
In a full-color liquid crystal display device having an e-turn multicolor color filter layer, the glass substrate on which the filter layer of each color is formed, the mask used for exposure, etc. when forming the filter layer, or both, The method is characterized in that alignment marks are formed and a mask is moved so that the marks coincide to form filter layers of each color.

(Example) Figures 1 to 3 show an example of the present invention, in which transparent electrodes are arranged on a glass substrate 11 with red, green, and
The blue color filter layers 12R, 12G, and 12B are formed so as to be repeated at a predetermined pitch to form a mother turn.

A photomask 13 as shown in FIG. 2 is used to form this filter layer. The mask 13 has two turfs 14 to obtain a pattern of one color.

The glass substrate 11 has alignment marks 1 for each color.
5R, 15G, and 15B at a predetermined interval, for example, the interval P between marks 15R and 15G, and the interval P2 between marks 15R and 15B as shown in Fig. 3. When the main turn pitch is P□ = xc + a P2 = yc Set so that J-b. However, X and 7 are integers.

Furthermore, alignment marks I6 are formed on the mask 13.

When forming the color filter layer, first, the photomask 13 is cut so that the alignment marks 15R and 16 match, and the red filter layer 12R is formed. Next, the mask 13 is set so that the alignment marks 15G and 16 match. As a result, the mask 2 turf 16 becomes a pattern that forms the green filter layer 12G depending on the positional relationship.

After forming the filter layer 12G in this state, the mask 13
are set so that the marks 15B and 16 match to form the back filter layer 12B.

Note that the formation of the filter layers is not limited to the above-mentioned order, and may be started from any filter layer.

Further, as shown in FIGS. 4 and 5, alignment marks include a common alignment mark 17 on the glass substrate 11 and alignment marks 18R and 18G for each color on the mask 13.

As shown in FIGS. 6 and 7, alignment marks 19R, 19G, 19B and marks 2O of each color are formed on the lath substrate 11 and the mask 13, respectively.
R920(), 20B may be formed.

Furthermore, the pattern is not limited to a stripe pattern, but a repeating pattern of the same size and pitch. Applicable if it is a turn. It can also be used to form the filter layer by means other than photorin technology, for example by printing.

(Effects) As described above, according to the present invention, alignment marks of each color are formed on at least either the glass substrate or the mask, and filter layers of each color are formed by the transfer of the alignment marks, so that the mask Only one piece is required, which reduces costs and costs. Furthermore, since each color filter layer is formed using the same mask, each color is formed with the same precision, and the precision is improved when a plurality of filter layers are used.

[Brief explanation of the drawing]

1 and 2 are plan views showing one embodiment of the present invention, FIG. 3 is an explanatory diagram of the four-tank spacing in the same embodiment, and FIGS.
FIG. 7 is a plan view showing another embodiment, and FIGS. 8 and 9 are plan views showing a conventional example. 11... Glass substrate, 12R, 12G and 12B... Color filter layer, 13... Mask, 14... Mask pattern, 15R, 15G, 15B and 16...
···Alignment mark. Figure 3 Jl 1'/ Figure 6 Figure 7 Figure 8. Figure procedure amendment opening (Patent Office examiner) 1. Indication of the case 1985 Patent Application No. 61550 2. Name of the invention Method for manufacturing multi-color display elements 3. Person making the amendment Relationship to the case Application Name (230) Stanley Electric Co., Ltd. 4,
Agent address: 1 person outside 1-1 Minami Aoyama-chome, Minato-ku, Tokyo 5 Date of amendment order (voluntary) 7 Contents of amendment (1) “Cut” on page 5, line 17 of the specification Set r and correct as j. (2) "Photorin technology" on page 5, lines 17 to 18 is corrected to "photolithography technology". that's all

Claims (1)

[Claims] In full-color liquid crystal display devices, etc., which have multicolor color filter layers of the same shape and repeating pattern at the same pitch, a glass substrate on which each color filter layer is formed, and a mask used for exposure, etc. when forming the filter layer. A method for manufacturing a multicolor color display element, comprising forming alignment marks for each color on one or both of the above, and moving a mask so that the marks match to form a filter layer for each color.