JPS61214950A - Driving controller for x-y-table - Google Patents

Abstract

PURPOSE:To improve the actual-use effect by automatically correcting the error due to the minute strain of a table by driving and controlling the table, automatically correcting the strain of the table, on the basis of the actually measured values of the quantity of strain of the table finely driven along the X-Y-axes. CONSTITUTION:Since the absolute coordinates (A, B) in the case when it is supposed that no strain exists on a table is (A+a, B-b), the given instruction (A,B) is corrected to (A-a, B+b) and given to an automatic control part 11. Then, an X-Y-table driving means 12 drives the table to the (A-a) point on the X-coordinate. Since the X-coordinate at the point (A, B) on the table strains by +a, the error due to the strain of the table can be corrected by the drive of the standard point to (A-a) position. Similarly, since the Y-coordinate strains by -b, this strain is corrected by the drive of the standard point to the (B+b) position. Thus, the error due to the fine strain of the table can be corrected automatically.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a device for controlling and controlling an X-Y table, and in particular, a device for automatically correcting minute distortions in an X-Y table by Km. This is related to the drive/control device that I created.

[Background of the invention]

When performing submicron order processing on a semiconductor wafer using optical means, it is necessary to position the semiconductor wafer with ultra-precision. Such a purpose KX-Y table is used.

FIG. 2 is a plan view schematically showing the above-mentioned X-Y table. The table 1 is mounted on an X-direction guiding/driving means 2 and is tightly driven in the X-axis direction. The above-mentioned X-direction guide/drive means 2 is further mounted on a Y-direction guide/drive means 3 and is precisely driven in the Y-axis direction.

The table l is precisely driven in the horizontal plane in two orthogonal axes directions as described above, and the semiconductor wafer (not shown) placed thereon is positioned (including alignment) with ultra-precision. .

The coordinates in the X-axis direction and the coordinates in the Y-axis direction of the table 1 are detected by the linear position sensors 4x and 4y, and the linear position sensors 4x and 4y are precisely driven while feeding back the detected coordinate values.

FIG. 3 is a block diagram showing an outline of the above-mentioned drive mechanism. 5x and sy are an X motor and a Y motor that drive the table in the X-axis direction and Y-axis direction, respectively.

The automatic control device 6 composed of a microcomputer receives the command 7 and receives position information as feedback from the X position sensor 4X and the Y position sensor 4y, and determines that the feedback information matches the X and Y coordinate values specified in the command 7. Automatic control is performed to operate the X motor 5X and Y motor 5y as follows.

In the X-Y table device configured as described above, ultra-high accuracy on the order of submicrons is required, so even if the reference point P of the table 1 is controlled precisely to a predetermined coordinate value, The distortion of the table l cannot be ignored.

It is possible to actually measure and record how the distortion of the table I is distributed over the entire surface of the table. However, when driving the table 1 in the X and Y directions, it requires a high level of skill and a great deal of effort to manually correct the distortion (actually measured, recorded values). , Moreover, it significantly reduces work efficiency.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned circumstances, and it automatically corrects the above-mentioned distortion based on the actual measured value of the amount of distortion of the table that is precisely driven along the X-Y axis. The present invention aims to provide a device that can drive and control a table.

[Summary of the invention]

In order to achieve the above object, the drive/control device of the present invention includes means for driving an X-Y table for semiconductor wafer processing and inspection, an automatic control section of the drive means, and an X-Y control section for the automatic control section. In an X-Y table drive/control device comprising means for inputting X and Y coordinate values as commands for operating the table, the absolute values of the coordinates are input from the coordinate value input means, and the X-Y A coordinate correction calculation device is provided for correcting table distortion, calculating corrected coordinate values, and inputting the calculation results to the automatic control unit, and the absolute value of the coordinates is input from the coordinate value input means. A matrix coordinate value converter that calculates matrix coordinates and the above matrix)
A data tank is provided in which the IJ Lux target value is input and data for correcting it is stored, and the correction data output from the correction data link is input to the coordinate correction calculation device. It is characterized by

[Embodiments of the invention]

FIG. 1 shows a block diagram of an embodiment of an X-Y table drive/control device constructed by applying the present invention.

The data bank 7 is made to store correction values calculated by actually measuring the amount of distortion in the table 1.

For example, if the reference point P of table 1 shown in FIG.
-b), make (A, B) correspond to K and (-
a, +b) are recorded.

The coordinate absolute value input means 8 inputs the coordinate absolute value (
When A, B) are input, the coordinate absolute values are input to the coordinate correction calculation device 9 and also input to the correction value data bank 7 via the matrix coordinate converter 10.

The correction value data bank 7 searches for correction data (-a, +b) from the stored data and inputs it to the coordinate correction calculation device 9.

The coordinate correction calculation device 9 calculates corrected coordinate values ( A-a, B+b) are input to the table automatic control unit 11, and the X, Y table driving means 12 (consisting of an X motor and a Y motor)
+b).

As mentioned above, Table 1 in this example shows the absolute coordinates (assuming there is no distortion) in an ideal state (assuming no distortion).
A, B) becomes (A+a, B-b), so as explained above, the given command (A, B)
When corrected to (A-a, B+b) is given to the automatic control unit 11, the X-Y table driving means drives the table 1 to point A-a in terms of the X coordinate.

Since the X coordinate of the point (A, B) in this table 1 is distorted by +a, the error caused by the distortion of the table 1 is corrected by driving the standard point P to the A-a position.

Similarly, since the Y coordinate of this table l is distorted by -b at the point (A, B), the standard point P is driven to the B+b position to correct the above distortion.

In this way, in this embodiment, errors caused by minute distortions in the table 1 are automatically canceled out and corrected.

〔Effect of the invention〕

As detailed above, according to the apparatus of the present invention, the above-mentioned distortion is automatically corrected based on the actual measured value of the distortion amount of the table that is precisely driven along the X-Y axis. It has an excellent practical effect of being able to drive and control the table.

[Brief explanation of drawings]

Fig. 1 shows a part of the X-Y table drive and control device of the present invention.
It is a block diagram showing an example. FIG. 2 is a schematic plan view for explaining the general configuration of the X-Y table, and FIG. 3 is an operational system diagram. 1...Table, 2...X-axis direction guide, drive means,
3...Y-axis direction guide, drive means h4X+4Y...+
7 = 7 position senna. Patent Applicant Hitachi Electronic Engineering Co., Ltd. Agent Patent Attorney Tadashi Akimoto Actual Figure 1 Corner Figure 2

Claims (1)

[Claims] A means for driving an X-Y table for semiconductor wafer processing and inspection, an automatic control section for the driving means, and an input of X and Y coordinate positions as a command for operating the X-Y table to the automatic control section. Driving an X-Y table with means and
In the control device, the absolute value of the coordinate is input from the coordinate value input means, the distortion of the X-Y table is corrected, the corrected coordinate value is calculated, and the calculation result is input to the automatic control unit. a matrix coordinate value converter which is provided with a correction calculation device and which calculates matrix coordinates by inputting absolute values of coordinates from the coordinate value input means; and data which receives the above matrix coordinate calculation values and corrects them. X-
Y table drive/correction device.