JPS61208706A - Manufacture of tape-like wire - Google Patents

Manufacture of tape-like wire

Info

Publication number
JPS61208706A
JPS61208706A JP4998985A JP4998985A JPS61208706A JP S61208706 A JPS61208706 A JP S61208706A JP 4998985 A JP4998985 A JP 4998985A JP 4998985 A JP4998985 A JP 4998985A JP S61208706 A JPS61208706 A JP S61208706A
Authority
JP
Japan
Prior art keywords
film
thickness
tape
base film
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4998985A
Other languages
Japanese (ja)
Inventor
堀口 正男
金也 熊沢
信光 山中
昭夫 野尻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP4998985A priority Critical patent/JPS61208706A/en
Publication of JPS61208706A publication Critical patent/JPS61208706A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は可撓性t−NL、Lかも薄厚のテープ状又はシ
ート状の新規なテープ状電線の製造方法に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing a novel tape-shaped electric wire in the form of a flexible T-NL, L or thin tape or sheet.

〔従来の技術〕[Conventional technology]

従来この種のテープ状電線は、基体フィルムに銅箔を接
着剤を用いて貼着したものの銅箔上に回路模様を印刷し
、不要部分をエツチングにより除去して線路或は導体回
路を形成する方法又はフラットな金属導体をシート等に
整列状に貼着して得ているものである。
Conventionally, this type of tape-shaped electric wire is made by pasting copper foil onto a base film using adhesive, printing a circuit pattern on the copper foil, and removing unnecessary parts by etching to form a line or conductor circuit. It is obtained by attaching flat metal conductors to a sheet or the like in an aligned manner.

然しなからこれらの方法によるテープ状電線は、導体の
厚さが必然的に厚くなり、通常18μm以上となるもの
であり、それよりも薄い導体をプラスチックフィルム又
はシートに貼着して回路を形成することは出来ないもの
でありた。
However, tape-shaped electric wires made using these methods inevitably have thick conductors, usually 18 μm or more, and it is not possible to form a circuit by attaching a thinner conductor to a plastic film or sheet. There was nothing I could do.

近時エレクトロニクスでの分野においては軽薄短小化の
要望が強く、テープ状′鑞線の導体においても極薄にし
て微細なパターンを有するものが要求されているもので
あった。
Recently, in the field of electronics, there has been a strong demand for lighter, thinner, and shorter conductors, and tape-shaped conductors have also been required to be extremely thin and have fine patterns.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明はかかる現状に鑑み鋭意研究全行った結果、回路
を形成するための導体の厚さを極薄−& にして且つ微細なノJ?ターンft答易にうるアーグ電
線の製造法を開発したものである。
The present invention was developed as a result of extensive research in view of the current situation, and as a result, the thickness of the conductor used to form the circuit is made extremely thin, and the thickness of the conductor is made extremely thin. We have developed a method for manufacturing arg electric wires that can be easily turned.

〔問題点を解決するための手段〕[Means for solving problems]

本発明方法は基材となるゲラステックフィルムの表面に
、形成せしめんとする回路以外の不要部分に加熱乾燥タ
イプのレノストインキを塗着する第1工程とレジストイ
ンクを塗着せしめた該フィルムの全面に蒸着粒子エネル
ギーが1eV以上の物理的蒸着手段により導体金属’i
 300X〜50,000Xの厚さに付着せしめる#f
、2工程と、上記回路以外の部分に設けた導体金属及び
レジストインキを基材フィルムから剥離する第3工程と
よシなるものである。
The method of the present invention consists of a first step of applying a heat-drying type renost ink to unnecessary parts other than the circuit to be formed on the surface of a gelastec film as a base material, and the entire surface of the film coated with resist ink. Conductive metal 'i' is deposited by physical vapor deposition with particle energy of 1 eV or more
#f attached to a thickness of 300X to 50,000X
, two steps, and a third step of peeling off the conductive metal and resist ink provided on the parts other than the circuit from the base film.

本発明方法において基体とするプラスチックフィルムは
、ポリエステル、ポリイミド、ポリアミド、ポリアミド
イミド、ポリカーゴネート。
The plastic film used as a substrate in the method of the present invention is polyester, polyimide, polyamide, polyamideimide, or polycargonate.

7、素樹脂、ポリエーテルサルホン、ポリエーテルエー
テルケトンその他ポリオレフィンや熱硬化性樹脂を使用
するものであり、その厚さは2〜100μm通常は4〜
50μm程度のものが用いられる。
7. It uses base resin, polyether sulfone, polyether ether ketone, other polyolefins, and thermosetting resins, and its thickness is 2 to 100 μm, usually 4 to 100 μm.
A thickness of about 50 μm is used.

而して本発明方法は第1工程として上記基体フィルムの
上に予めレノストインキを、回路形成部以外の不必要な
部分に塗着するものであるが、このレノストインキに用
いる主な樹脂はロジン変性マレイン酸樹脂、アルコール
溶性フェノール樹脂、ビニル系塩素化ポリエチレン、ゴ
ム系、スチレン系、共重合体、アクリル系共重合体等の
溶剤揮発タイプ樹脂に体質顔料2着色顔料、溶剤、補助
剤を添加してなるものであり、特に体質顔料2着色顔料
については金属が蒸着されにくい顔料例えばカーゲン、
シリカ、チタン等を添加することが好ましい。
In the method of the present invention, as a first step, Renosto ink is applied in advance to unnecessary parts other than the circuit forming part on the base film, and the main resin used for this Renosto ink is rosin-modified malein. Add extender pigment 2 color pigment, solvent, and auxiliary agent to solvent-volatile resin such as acid resin, alcohol-soluble phenol resin, vinyl chlorinated polyethylene, rubber type, styrene type, copolymer, acrylic copolymer, etc. In particular, for extender pigments and color pigments, pigments to which metals are difficult to be deposited, such as Kagen,
It is preferable to add silica, titanium, etc.

このレノストインキを塗着する方法としては、スクリー
ン印11 、 !Jパースロールコーター、グラビヤ、
オフセット等の印刷手段により回路として不必要な部分
にレジストインキを均一に塗布した後、溶剤t−蒸発せ
しめて硬化するものである。このレノストインキの塗膜
厚は0.5〜50μm程度が好ましく蒸着する導体厚さ
によりてレジストの膜厚が決定されるものである。
The method for applying this Renost ink is Screen Mark 11,! J Perth roll coater, gravure,
After the resist ink is uniformly applied to unnecessary parts of the circuit by printing means such as offset printing, the resist ink is cured by evaporation of a solvent. The coating thickness of this Renost ink is preferably about 0.5 to 50 μm, and the resist film thickness is determined by the thickness of the conductor to be deposited.

次に第2工程として物理的蒸着手段により基体フィルム
の全面に導体金属を付着させるものであり、通常の真空
蒸着、ス・母ツタリング、イオンプレーティング等の化
学変化を伴わない各種の金属蒸気例えば銅、アルミによ
るものである。通常10  Torr以下の真空圧力下
で金属を原子状態或は集合状態でイオン化するか又は原
子のiま飛ばすことにより得るものである。
Next, in the second step, a conductive metal is deposited on the entire surface of the base film by physical vapor deposition, using various metal vapors that do not involve chemical changes such as ordinary vacuum evaporation, sintering, ion plating, etc. It is made of copper and aluminum. It is usually obtained by ionizing a metal in an atomic state or an aggregated state, or by blowing away the atoms, under a vacuum pressure of 10 Torr or less.

即ち、本発明方法において導体金属を強い付着力によっ
て基体フィルム上に密着させるため、粒子の有するエネ
ルギーが大きいことが望ましく、又、基体フィルムの清
浄化が極めて重要である。物理的蒸着手段を行うに先立
ち基体フィルムに金属を密着性よく付着せしめるには先
づ10−’ Torr以下の真空圧力下で基体フィルム
を加熱することにより水分、ガス、モノマー等を除去す
゛る。この場合の基体フィルムの加熱温度は60℃以上
とすることが好ましく、基体フィルムにできるだけ影響
をあたえない温度まで高くすることが望ましい。又、加
熱時間は10〜300秒程度にして基体フィルムの有す
る特性により最適条件を設定する。更にボンバードによ
り基体フィルムの表面にミクロエッチフグ処理を行うも
のであるが、前記と同様に10Torr    −以下
の真空圧力下で基体フィルムをヘリウム。
That is, in the method of the present invention, since the conductive metal is brought into close contact with the base film by strong adhesive force, it is desirable that the particles have large energy, and cleaning of the base film is extremely important. In order to adhere the metal to the base film with good adhesion prior to physical vapor deposition, the base film is first heated under a vacuum pressure of 10-' Torr or less to remove water, gas, monomer, etc. In this case, the heating temperature of the base film is preferably 60° C. or higher, and it is desirable to raise the temperature to a temperature that does not affect the base film as much as possible. Further, the heating time is set to about 10 to 300 seconds, and optimum conditions are set depending on the characteristics of the base film. Furthermore, the surface of the base film is subjected to micro-etching treatment by bombardment, and the base film is exposed to helium under a vacuum pressure of 10 Torr or less in the same manner as described above.

アルゴン、ネオン、チ、ソ、酸素等のRF7’ラズマ、
DCグロー放電等の1種又は2種以上にて処理する。基
体フィルムをプラズマ中に入れると該フィルムの表面は
電子やイオンによりgン・フードされてミクロエツチン
グされる。
RF7' lasma such as argon, neon, chi, so, oxygen, etc.
Treatment is performed using one or more methods such as DC glow discharge. When a base film is placed in plasma, the surface of the film is bombarded with electrons and ions and micro-etched.

このように基体フィルムに前処理を施すことにより該フ
ィルムの表面に金属を密着せしめるにおいて、優れた付
着性を発揮するものである。
By pre-treating the base film in this way, excellent adhesion is exhibited when metal is brought into close contact with the surface of the film.

特にフッ素樹脂例えば47フ化エチレン−67ツ化プロ
ピレン共重合体(以下FEPという)に付着力を高める
手段として最適である。なお、ボンバードの時間は基体
フィルムの有する特性により決定するものである。
It is particularly suitable as a means for increasing adhesion to fluororesins such as 47-fluorinated ethylene-67-fluorinated propylene copolymer (hereinafter referred to as FEP). Note that the bombardment time is determined by the characteristics of the base film.

次いで本発明方法は第3工程として回路以外の部分に設
けた導体金属及びレノストインキ金基材フィルムから剥
離する方法としては、レジストインキを膨潤、溶解可能
にするアルカリ溶液、溶剤例えばカセイソーダ、トリク
レーン等に浸漬し超音波等により、レジストインキに浸
透せしめて溶解させると同時に導体金属をも剥離する方
法又は加圧した溶剤、アルカリ水溶液等をノズルから吹
きつけて上記と同様に剥離する方法がある。また必要に
応じてパフ研磨を行うものである。
Next, in the method of the present invention, as a third step, the conductor metal provided in the area other than the circuit and the method of peeling the renost ink from the gold base film include immersion in an alkaline solution or solvent such as caustic soda, triclane, etc. that allows the resist ink to swell and dissolve. There is a method in which the resist ink is penetrated and dissolved using ultrasonic waves and the conductive metal is also peeled off at the same time, or a method in which a pressurized solvent, alkaline aqueous solution, etc. is sprayed from a nozzle and peeled off in the same manner as above. Puff polishing is also performed if necessary.

〔実施例〕〔Example〕

実施例(1) ポリイミドフィルム(厚さ50μm)の表面に回路とし
て、1ピツチ巾を2.511.導体中を1i11の導体
路をもったテープ電線を製造するにおいて、まず該ポリ
イミドフィルムに太陽インキ製造■製エツチングレノス
トX−77Kエタノールで10%希釈(加熱乾燥タイ7
’)t−1゜54關のピッチ巾にグラビヤ印刷して乾燥
した。このときのレノスト厚さは8μmであった。次に
真空槽中において100℃2分間加熱し、更にDCCグ
ロー放電より1分間処理を行った後、この表面にス・母
ツタリングにより銅を10.0001の厚さに蒸着した
。次いでこの蒸着銅付きポリイミドフィルムを真空槽内
から取出し、3%NaOH溶液を1.6◆62の圧力に
てノズルにより吹付は該レノストインキを膨潤溶解せし
めると同時に該インキ上に設けた銅箔を剥離して本発明
テープ電線を得た。
Example (1) A circuit with a pitch width of 2.511 mm was formed on the surface of a polyimide film (thickness: 50 μm). In manufacturing a tape wire having 111 conductor paths in the conductor, first, the polyimide film was diluted 10% with Etching Lenost X-77K ethanol (heat-dried Tie 7
') Gravure was printed on a pitch width of t-1°54 and dried. The Lennost thickness at this time was 8 μm. Next, it was heated in a vacuum chamber at 100° C. for 2 minutes, and then treated with DCC glow discharge for 1 minute, and then copper was vapor-deposited on the surface to a thickness of 10.000 mm by sintering. Next, this vapor-deposited polyimide film with copper was taken out from the vacuum chamber, and a 3% NaOH solution was sprayed with a nozzle at a pressure of 1.6◆62 to cause the Renost ink to swell and dissolve, and at the same time peel off the copper foil provided on the ink. A tape electric wire of the present invention was obtained.

実施例(2) 実施例(1)と同様にしてプリイミドフィルムにレジス
トインキを塗布した後、真空加熱処理及びDCグロー放
電を行い、スパッタリングに°よシ銅を15,000X
の厚さに蒸着した。次いでこの蒸着錆付Iリイミドフイ
ルムを真空槽内から取出し、3%NaOH溶液中に浸漬
しながら超音波処理を行ってレジストインキを膨潤せし
めた後これを取出し水中にて回転ブラシをかけたところ
レジストインキ面上の銅箔が容易に剥離し、ポリアミド
フィルム上に1ピy f 、2.54 Ill 。
Example (2) After applying resist ink to a pre-imide film in the same manner as in Example (1), vacuum heat treatment and DC glow discharge were performed, and copper was heated at 15,000X for sputtering.
It was deposited to a thickness of . Next, this vapor-deposited rusted I-imide film was taken out of the vacuum chamber and subjected to ultrasonic treatment while immersed in a 3% NaOH solution to swell the resist ink, and then taken out and subjected to a rotating brush in water. The copper foil on the resist ink surface was easily peeled off, and 1 p y f , 2.54 Ill was deposited on the polyamide film.

導体中lHの導体路を有する本発明テープ電線を得た。A tape electric wire of the present invention having a conductor path of lH in the conductor was obtained.

実施例(3) フッ素系フィルム(FEP) 、厚さ50μmの表面に
コロナ放電によ多処理し、太陽インキ製造■製エツチン
グレノストX−88にエタノールで10%希釈(加熱乾
燥タイプ)ヲ、実施例(1)と同様にして8μmの厚さ
に塗着した。次いで真空槽中にて120℃、2分加熱し
、更にDCCグロー放電より2分処理を行った後、ス・
々、タリングにより銅1&:IO,o00Xの厚さにコ
ートした。
Example (3) A fluorine-based film (FEP), the surface of which was 50 μm thick, was subjected to multiple corona discharge treatments, and diluted 10% with ethanol (heat-dried type) in etching lens X-88 manufactured by Taiyo Ink Manufacturing. It was coated to a thickness of 8 μm in the same manner as in Example (1). Next, it was heated in a vacuum chamber at 120°C for 2 minutes, and then treated with DCC glow discharge for 2 minutes.
Copper was coated to a thickness of 1&:IO,o00X by talling.

次いでこれを真空槽から取出し、3%NaOH溶液f:
2ψ讐の圧力でノズルから吹付は該レジストインキを膨
潤、溶解せしめると同時に該インキ上に設けた銅箔を剥
離して本発明テープ電線をえた。
This was then taken out from the vacuum chamber and 3% NaOH solution f:
The resist ink was sprayed from a nozzle at a pressure of 2ψ to cause it to swell and dissolve, and at the same time, the copper foil provided on the ink was peeled off to obtain the tape electric wire of the present invention.

〔効果〕〔effect〕

以上詳述した如く本発明方法によれば基材フィルム上の
回路全構成する導体を蒸着によpうるため、その厚さを
極薄にすることが出来ると共に浸れた寸法精度を有する
テープ電線を連続的にうろことが出来る。従って本発明
方法によるテープ電線は軽量にして且安価なため工業的
に極めて有用なものである。
As detailed above, according to the method of the present invention, since the conductors constituting the entire circuit on the base film can be deposited by vapor deposition, the thickness can be made extremely thin, and the tape electric wire can be manufactured with excellent dimensional accuracy. Can wander continuously. Therefore, the tape electric wire produced by the method of the present invention is lightweight and inexpensive, making it extremely useful industrially.

Claims (1)

【特許請求の範囲】[Claims] 基材であるプラスチックフィルムの表面に、形成せしめ
んとする回路以外の不要部分に加熱乾燥タイプのレジス
トインキを塗着する第1工程と、レジストインクを塗着
せしめた該フィルムの全面に蒸着粒子エネルギーが1e
V以上の物理的蒸着手段により導体金属を300Å〜5
0,000Åの厚さに付着せしめる第2工程と、上記回
路以外の部分に設けた導体金属及びレジストインキを基
材フィルムから剥離する第3工程とよりなることを特徴
とするテープ状電線の製造法。
The first step is to apply a heat-drying type resist ink to unnecessary parts other than the circuit to be formed on the surface of the plastic film that is the base material, and the vapor-deposited particles are applied to the entire surface of the film coated with the resist ink. energy is 1e
The conductive metal is deposited by physical vapor deposition with a thickness of 300 Å to 5
Production of a tape-shaped electric wire characterized by comprising a second step of adhering it to a thickness of 0,000 Å, and a third step of peeling off the conductive metal and resist ink provided in the parts other than the circuit from the base film. Law.
JP4998985A 1985-03-13 1985-03-13 Manufacture of tape-like wire Pending JPS61208706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4998985A JPS61208706A (en) 1985-03-13 1985-03-13 Manufacture of tape-like wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4998985A JPS61208706A (en) 1985-03-13 1985-03-13 Manufacture of tape-like wire

Publications (1)

Publication Number Publication Date
JPS61208706A true JPS61208706A (en) 1986-09-17

Family

ID=12846420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4998985A Pending JPS61208706A (en) 1985-03-13 1985-03-13 Manufacture of tape-like wire

Country Status (1)

Country Link
JP (1) JPS61208706A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583175U (en) * 1981-06-30 1983-01-10 三洋電機株式会社 electric razor storage case

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583175U (en) * 1981-06-30 1983-01-10 三洋電機株式会社 electric razor storage case

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