JPS61206671U - - Google Patents

Info

Publication number
JPS61206671U
JPS61206671U JP7732986U JP7732986U JPS61206671U JP S61206671 U JPS61206671 U JP S61206671U JP 7732986 U JP7732986 U JP 7732986U JP 7732986 U JP7732986 U JP 7732986U JP S61206671 U JPS61206671 U JP S61206671U
Authority
JP
Japan
Prior art keywords
regulating
opening
metal
vapor deposition
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7732986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114678Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986077329U priority Critical patent/JPH0114678Y2/ja
Publication of JPS61206671U publication Critical patent/JPS61206671U/ja
Application granted granted Critical
Publication of JPH0114678Y2 publication Critical patent/JPH0114678Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP1986077329U 1986-05-22 1986-05-22 Expired JPH0114678Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986077329U JPH0114678Y2 (enrdf_load_stackoverflow) 1986-05-22 1986-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986077329U JPH0114678Y2 (enrdf_load_stackoverflow) 1986-05-22 1986-05-22

Publications (2)

Publication Number Publication Date
JPS61206671U true JPS61206671U (enrdf_load_stackoverflow) 1986-12-27
JPH0114678Y2 JPH0114678Y2 (enrdf_load_stackoverflow) 1989-04-28

Family

ID=30620298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986077329U Expired JPH0114678Y2 (enrdf_load_stackoverflow) 1986-05-22 1986-05-22

Country Status (1)

Country Link
JP (1) JPH0114678Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS453063Y1 (enrdf_load_stackoverflow) * 1966-10-19 1970-02-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS453063Y1 (enrdf_load_stackoverflow) * 1966-10-19 1970-02-10

Also Published As

Publication number Publication date
JPH0114678Y2 (enrdf_load_stackoverflow) 1989-04-28

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