JPS63189337U - - Google Patents

Info

Publication number

JPS63189337U

JPS63189337U JP8182587U JP8182587U JPS63189337U JP S63189337 U JPS63189337 U JP S63189337U JP 8182587 U JP8182587 U JP 8182587U JP 8182587 U JP8182587 U JP 8182587U JP S63189337 U JPS63189337 U JP S63189337U

Authority

JP

Japan

Prior art keywords

coated

silicon

cylinder

carbide

titanium

Prior art date

1987-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 229910052581 Si3N4 Inorganic materials 0.000 claims 1
• NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
• 229910003481 amorphous carbon Inorganic materials 0.000 claims 1
• 229910021417 amorphous silicon Inorganic materials 0.000 claims 1
• OHJMTUPIZMNBFR-UHFFFAOYSA-N biuret Chemical compound NC(=O)NC(N)=O OHJMTUPIZMNBFR-UHFFFAOYSA-N 0.000 claims 1
• 150000001875 compounds Chemical class 0.000 claims 1
• 239000011521 glass Substances 0.000 claims 1
• 239000011347 resin Substances 0.000 claims 1
• 229920005989 resin Polymers 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1