JPS61206649U - - Google Patents

Info

Publication number

JPS61206649U

JPS61206649U JP8953085U JP8953085U JPS61206649U JP S61206649 U JPS61206649 U JP S61206649U JP 8953085 U JP8953085 U JP 8953085U JP 8953085 U JP8953085 U JP 8953085U JP S61206649 U JPS61206649 U JP S61206649U

Authority

JP

Japan

Prior art keywords

plasma processing

gas introduction

processing apparatus

processing chamber

wall

Prior art date

1985-06-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000002093 peripheral effect Effects 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 1
• 238000012986 modification Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1

Cited By (1)