JPS61206537U - - Google Patents

Info

Publication number
JPS61206537U
JPS61206537U JP8962385U JP8962385U JPS61206537U JP S61206537 U JPS61206537 U JP S61206537U JP 8962385 U JP8962385 U JP 8962385U JP 8962385 U JP8962385 U JP 8962385U JP S61206537 U JPS61206537 U JP S61206537U
Authority
JP
Japan
Prior art keywords
wafer
chuck
receiving surface
guide
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8962385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542977Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985089623U priority Critical patent/JPH0542977Y2/ja
Publication of JPS61206537U publication Critical patent/JPS61206537U/ja
Application granted granted Critical
Publication of JPH0542977Y2 publication Critical patent/JPH0542977Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1985089623U 1985-06-14 1985-06-14 Expired - Lifetime JPH0542977Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985089623U JPH0542977Y2 (enrdf_load_stackoverflow) 1985-06-14 1985-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985089623U JPH0542977Y2 (enrdf_load_stackoverflow) 1985-06-14 1985-06-14

Publications (2)

Publication Number Publication Date
JPS61206537U true JPS61206537U (enrdf_load_stackoverflow) 1986-12-26
JPH0542977Y2 JPH0542977Y2 (enrdf_load_stackoverflow) 1993-10-28

Family

ID=30643874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985089623U Expired - Lifetime JPH0542977Y2 (enrdf_load_stackoverflow) 1985-06-14 1985-06-14

Country Status (1)

Country Link
JP (1) JPH0542977Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015233070A (ja) * 2014-06-09 2015-12-24 株式会社ディスコ 加工装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5041259U (enrdf_load_stackoverflow) * 1973-08-14 1975-04-26
JPS56109890U (enrdf_load_stackoverflow) * 1980-01-21 1981-08-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5041259U (enrdf_load_stackoverflow) * 1973-08-14 1975-04-26
JPS56109890U (enrdf_load_stackoverflow) * 1980-01-21 1981-08-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015233070A (ja) * 2014-06-09 2015-12-24 株式会社ディスコ 加工装置

Also Published As

Publication number Publication date
JPH0542977Y2 (enrdf_load_stackoverflow) 1993-10-28

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