JPS61205155U - - Google Patents

Info

Publication number

JPS61205155U

JPS61205155U JP8992185U JP8992185U JPS61205155U JP S61205155 U JPS61205155 U JP S61205155U JP 8992185 U JP8992185 U JP 8992185U JP 8992185 U JP8992185 U JP 8992185U JP S61205155 U JPS61205155 U JP S61205155U

Authority

JP

Japan

Prior art keywords

lead

piezo

pressure sensor

semiconductor substrate

resistance layer

Prior art date

1985-06-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000002161 passivation Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 4
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
• 229910052710 silicon Inorganic materials 0.000 claims 2
• 239000010703 silicon Substances 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 7
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 239000004020 conductor Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1