JPS61205155U - - Google Patents

Info

Publication number
JPS61205155U
JPS61205155U JP8992185U JP8992185U JPS61205155U JP S61205155 U JPS61205155 U JP S61205155U JP 8992185 U JP8992185 U JP 8992185U JP 8992185 U JP8992185 U JP 8992185U JP S61205155 U JPS61205155 U JP S61205155U
Authority
JP
Japan
Prior art keywords
lead
piezo
pressure sensor
semiconductor substrate
resistance layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8992185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8992185U priority Critical patent/JPS61205155U/ja
Publication of JPS61205155U publication Critical patent/JPS61205155U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP8992185U 1985-06-14 1985-06-14 Pending JPS61205155U (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8992185U JPS61205155U (pl) 1985-06-14 1985-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8992185U JPS61205155U (pl) 1985-06-14 1985-06-14

Publications (1)

Publication Number Publication Date
JPS61205155U true JPS61205155U (pl) 1986-12-24

Family

ID=30644454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8992185U Pending JPS61205155U (pl) 1985-06-14 1985-06-14

Country Status (1)

Country Link
JP (1) JPS61205155U (pl)

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