JPS61205141U - - Google Patents
Info
- Publication number
- JPS61205141U JPS61205141U JP8916385U JP8916385U JPS61205141U JP S61205141 U JPS61205141 U JP S61205141U JP 8916385 U JP8916385 U JP 8916385U JP 8916385 U JP8916385 U JP 8916385U JP S61205141 U JPS61205141 U JP S61205141U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pusher
- transfer section
- carriers
- outlet hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
- 239000000969 carrier Substances 0.000 claims 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8916385U JPS61205141U (enExample) | 1985-06-13 | 1985-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8916385U JPS61205141U (enExample) | 1985-06-13 | 1985-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61205141U true JPS61205141U (enExample) | 1986-12-24 |
Family
ID=30642975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8916385U Pending JPS61205141U (enExample) | 1985-06-13 | 1985-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61205141U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS525261B1 (enExample) * | 1971-03-06 | 1977-02-10 | ||
| JPS5389675A (en) * | 1977-01-19 | 1978-08-07 | Hitachi Ltd | Jig pair for wafer transfer |
-
1985
- 1985-06-13 JP JP8916385U patent/JPS61205141U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS525261B1 (enExample) * | 1971-03-06 | 1977-02-10 | ||
| JPS5389675A (en) * | 1977-01-19 | 1978-08-07 | Hitachi Ltd | Jig pair for wafer transfer |
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