JPS61205141U - - Google Patents

Info

Publication number
JPS61205141U
JPS61205141U JP1985089163U JP8916385U JPS61205141U JP S61205141 U JPS61205141 U JP S61205141U JP 1985089163 U JP1985089163 U JP 1985089163U JP 8916385 U JP8916385 U JP 8916385U JP S61205141 U JPS61205141 U JP S61205141U
Authority
JP
Japan
Prior art keywords
wafer
pusher
transfer section
carriers
outlet hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985089163U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985089163U priority Critical patent/JPS61205141U/ja
Publication of JPS61205141U publication Critical patent/JPS61205141U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1985089163U 1985-06-13 1985-06-13 Pending JPS61205141U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985089163U JPS61205141U (enExample) 1985-06-13 1985-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985089163U JPS61205141U (enExample) 1985-06-13 1985-06-13

Publications (1)

Publication Number Publication Date
JPS61205141U true JPS61205141U (enExample) 1986-12-24

Family

ID=30642975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985089163U Pending JPS61205141U (enExample) 1985-06-13 1985-06-13

Country Status (1)

Country Link
JP (1) JPS61205141U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS525261B1 (enExample) * 1971-03-06 1977-02-10
JPS5389675A (en) * 1977-01-19 1978-08-07 Hitachi Ltd Jig pair for wafer transfer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS525261B1 (enExample) * 1971-03-06 1977-02-10
JPS5389675A (en) * 1977-01-19 1978-08-07 Hitachi Ltd Jig pair for wafer transfer

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