JPS61205137U - - Google Patents
Info
- Publication number
- JPS61205137U JPS61205137U JP8935285U JP8935285U JPS61205137U JP S61205137 U JPS61205137 U JP S61205137U JP 8935285 U JP8935285 U JP 8935285U JP 8935285 U JP8935285 U JP 8935285U JP S61205137 U JPS61205137 U JP S61205137U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- supply pipe
- upper limit
- limit level
- semiconductor devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8935285U JPS61205137U (fi) | 1985-06-13 | 1985-06-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8935285U JPS61205137U (fi) | 1985-06-13 | 1985-06-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61205137U true JPS61205137U (fi) | 1986-12-24 |
Family
ID=30643345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8935285U Pending JPS61205137U (fi) | 1985-06-13 | 1985-06-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61205137U (fi) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5444472A (en) * | 1977-09-14 | 1979-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Cleaning unit of semiconductor substrate |
-
1985
- 1985-06-13 JP JP8935285U patent/JPS61205137U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5444472A (en) * | 1977-09-14 | 1979-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Cleaning unit of semiconductor substrate |